Lingampalli; Ramkishan Rao

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lingampalli; Ramkishan Rao.The latest application filed is for "lamellar ceramic structure".

Company Profile

6.12.11

Lingampalli; Ramkishan Rao - Danville CA
Lingampalli; Ramkishan Rao - Fremont CA
Lingampalli; Ramkishan Rao - Dublin CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Lamellar Ceramic Structure App 20220181126 - Hollingsworth; Joel Philip ; et al.	2022-06-09
Apparatus including metallized-ceramic tubes for radio-frequency and gas delivery Grant 10,964,545 - Lingampalli , et al. March 30, 2	2021-03-30
Module Including Metallized Ceramic Tubes For Rf And Gas Delivery App 20200051822 - Lingampalli; Ramkishan Rao ; et al.	2020-02-13
Module including metallized ceramic tubes for RF and gas delivery Grant 10,431,467 - Lingampalli , et al. O	2019-10-01
Hybrid ceramic showerhead Grant 10,400,333 - Sabri , et al. Sep	2019-09-03
Module Including Metallized Ceramic Tubes For Rf And Gas Delivery App 20190109008 - Lingampalli; Ramkishan Rao ; et al.	2019-04-11
Ceramic gas distribution plate with embedded electrode Grant 10,217,614 - Tucker , et al. Feb	2019-02-26
Monolithic Ceramic Gas Distribution Plate App 20190032211 - Tucker; Jeremy ; et al.	2019-01-31
Substrate Pedestal Module Including Metallized Ceramic Tubes For Rf And Gas Delivery App 20180350610 - Lingampalli; Ramkishan Rao ; et al.	2018-12-06
Substrate pedestal module including metallized ceramic tubes for RF and gas delivery Grant 10,147,610 - Lingampalli , et al. De	2018-12-04
System and apparatus for flowable deposition in semiconductor fabrication Grant 9,719,169 - Mohn , et al. August 1, 2	2017-08-01
Hybrid Ceramic Showerhead App 20160348244 - Sabri; Mohamed ; et al.	2016-12-01
Ceramic showerhead with embedded RF electrode for capacitively coupled plasma reactor Grant 9,449,795 - Sabri , et al. September 20, 2	2016-09-20
Hybrid ceramic showerhead Grant 9,441,296 - Sabri , et al. September 13, 2	2016-09-13
Ceramic Gas Distribution Plate With Embedded Electrode App 20160203952 - Tucker; Jeremy ; et al.	2016-07-14
Ceramic Showerhead With Embedded Rf Electrode For Capacitively Coupled Plasma Reactor App 20140238608 - Sabri; Mohamed ; et al.	2014-08-28
Hybrid Ceramic Showerhead App 20120222815 - Sabri; Mohamed ; et al.	2012-09-06
System And Apparatus For Flowable Deposition In Semiconductor Fabrication App 20120161405 - Mohn; Jonathan D. ; et al.	2012-06-28
Article for use in a semiconductor processing chamber and method of fabricating same Grant 6,632,325 - Lingampalli October 14, 2	2003-10-14
Article For Use In A Semiconductor Processing Chamber And Method Of Fabricating Same App 20030148035 - Lingampalli, Ramkishan Rao	2003-08-07
RF antenna having high temperature, oxidation resistant coating Grant 5,785,878 - Lingampalli July 28, 1	1998-07-28

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