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Patent applications and USPTO patent grants for LIND; Gary B..The latest application filed is for "preventing deposition on pedestal in semiconductor substrate processing".
Patent | Date |
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Preventing Deposition On Pedestal In Semiconductor Substrate Processing App 20210230749 - GULABAL; Vinayakaraddy ;   et al. | 2021-07-29 |
In-situ chamber clean end point detection systems and methods using computer vision systems Grant 10,895,539 - Sawlani , et al. January 19, 2 | 2021-01-19 |
In-situ Chamber Clean End Point Detection Systems And Methods Using Computer Vision Systems App 20190120775 - Sawlani; Kapil ;   et al. | 2019-04-25 |
Pedestal Bottom Clean For Improved Fluorine Utilization And Integrated Symmetric Foreline App 20150030766 - Lind; Gary B. ;   et al. | 2015-01-29 |
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