| Patent | Date |
|---|
Pellicle design for mask application
Grant 11,454,881 - Lin September 27, 2 | 2022-09-27 |
Photomask Pellicle And Method Of Forming The Same
App 20220283493 - LIN; YUN-YUE ; et al. | 2022-09-08 |
Extreme Ultraviolet Mask And Method For Forming The Same
App 20220269163 - LIN; Yun-Yue | 2022-08-25 |
Robust, High Transmission Pellicle For Extreme Ultraviolet Lithography Systems
App 20220252986 - LIN; Yun-Yue | 2022-08-11 |
Mask for EUV lithography and method of manufacturing the same
Grant 11,402,745 - Lin August 2, 2 | 2022-08-02 |
Pellicle Assembly and Method for Advanced Lithography
App 20220229360 - CHEN; AMO ; et al. | 2022-07-21 |
Pellicle and Method of Manufacturing Same
App 20220197132 - Li; Po Hsuan ; et al. | 2022-06-23 |
Extreme ultraviolet mask and method for forming the same
Grant 11,360,376 - Lin June 14, 2 | 2022-06-14 |
Pellicle and method of manufacturing same
Grant 11,340,525 - Li , et al. May 24, 2 | 2022-05-24 |
Robust, high transmission pellicle for extreme ultraviolet lithography systems
Grant 11,314,169 - Lin April 26, 2 | 2022-04-26 |
Pellicle assembly and method for advanced lithography
Grant 11,294,274 - Chen , et al. April 5, 2 | 2022-04-05 |
Pellicle Having Vent Hole
App 20220026797 - YOO; Chue San ; et al. | 2022-01-27 |
Pellicle For An Euv Lithography Mask And A Method Of Manufacturing Thereof
App 20220026795 - LIN; Yun-Yue | 2022-01-27 |
Euv Photo Masks And Manufacturing Method Thereof
App 20210397075 - LIN; Yun-Yue | 2021-12-23 |
Method For Forming Structure Of Pellicle-mask Structure With Vent Structure
App 20210389665 - LIN; Yun-Yue | 2021-12-16 |
Lithography mask and method for manufacturing the same
Grant 11,156,912 - Lin October 26, 2 | 2021-10-26 |
Pellicle For An Euv Lithography Mask And A Method Of Manufacturing Thereof
App 20210325774 - LIN; Yun-Yue | 2021-10-21 |
Pellicle removal method
Grant 11,143,952 - Yoo , et al. October 12, 2 | 2021-10-12 |
Pellicle for an EUV lithography mask and a method of manufacturing thereof
Grant 11,143,951 - Lin October 12, 2 | 2021-10-12 |
Lithography mask with both transmission-type and reflective-type overlay marks and method of fabricating the same
Grant 11,137,684 - Lin , et al. October 5, 2 | 2021-10-05 |
Mask and method for forming the same
Grant 11,137,672 - Lin October 5, 2 | 2021-10-05 |
Structure of pellicle-mask structure with vent structure
Grant 11,106,127 - Lin August 31, 2 | 2021-08-31 |
Extreme ultraviolet mask with reduced mask shadowing effect and method of manufacturing the same
Grant 11,086,215 - Lin , et al. August 10, 2 | 2021-08-10 |
Euv Pellicle With Structured Ventilation Frame
App 20210240071 - LIN; Yun-Yue | 2021-08-05 |
Extreme Ultraviolet Mask And Method Of Manufacturing The Same
App 20210240069 - LIN; Yun-Yue | 2021-08-05 |
Chromeless phase shift mask structure and process
Grant 11,022,874 - Lin , et al. June 1, 2 | 2021-06-01 |
Pellicle for an EUV lithography mask and a method of manufacturing thereof
Grant 11,016,383 - Lin May 25, 2 | 2021-05-25 |
Robust, High Transmission Pellicle For Extreme Ultraviolet Lithography Systems
App 20210132490 - LIN; Yun-Yue | 2021-05-06 |
Extreme ultraviolet mask and method of manufacturing the same
Grant 10,962,873 - Lin March 30, 2 | 2021-03-30 |
Pellicle and Method of Manufacturing Same
App 20210080823 - Li; Po Hsuan ; et al. | 2021-03-18 |
Extreme Ultraviolet Mask And Method For Forming The Same
App 20210063865 - LIN; Yun-Yue | 2021-03-04 |
Pellicle Design for Mask Application
App 20210033963 - Lin; Yun-Yue | 2021-02-04 |
Mask For Euv Lithography And Method Of Manufacturing The Same
App 20210033962 - LIN; Yun-Yue | 2021-02-04 |
Mask And Method For Forming The Same
App 20210018828 - LIN; Yun-Yue | 2021-01-21 |
Mask for EUV lithography and method of manufacturing the same
Grant 10,809,613 - Lin October 20, 2 | 2020-10-20 |
Pellicle And Method Of Using The Same
App 20200264505 - YOO; Chue San ; et al. | 2020-08-20 |
Pellicle fabrication methods and structures thereof
Grant 10,747,103 - Lin , et al. A | 2020-08-18 |
Pellicle and method of using the same
Grant 10,670,959 - Yoo , et al. | 2020-06-02 |
Pellicle Assembly and Method for Advanced Lithography
App 20200150527 - CHEN; AMO ; et al. | 2020-05-14 |
Lithography Mask With Both Transmission-type And Reflective-type Overlay Marks And Method Of Fabricating The Same
App 20200124958 - Lin; Yun-Yue ; et al. | 2020-04-23 |
Mask For Euv Lithography And Method Of Manufacturing The Same
App 20200096858 - LIN; Yun-Yue | 2020-03-26 |
Pellicle For An Euv Lithography Mask And A Method Of Manufacturing Thereof
App 20200073230 - LIN; Yun-Yue | 2020-03-05 |
Pellicle assembly and method for advanced lithography
Grant 10,534,256 - Chen , et al. Ja | 2020-01-14 |
Lithography mask with both transmission-type and reflective-type overlay marks and method of fabricating the same
Grant 10,514,597 - Lin , et al. Dec | 2019-12-24 |
Chromeless Phase Shift Mask Structure and Process
App 20190377255 - Lin; Yun-Yue ; et al. | 2019-12-12 |
Pellicle For An Euv Lithography Mask And A Method Of Manufacturing Thereof
App 20190332005 - LIN; Yun-Yue | 2019-10-31 |
Chromeless phase shift mask structure and process
Grant 10,394,114 - Lin , et al. A | 2019-08-27 |
Pellicle structures and methods of fabricating thereof
Grant 10,353,285 - Lee , et al. July 16, 2 | 2019-07-16 |
Pellicle Fabrication Methods And Structures Thereof
App 20190204730 - LIN; Yun-Yue ; et al. | 2019-07-04 |
Extreme Ultraviolet Mask With Reduced Mask Shadowing Effect And Method Of Manufacturing The Same
App 20190146331 - LIN; Yun-Yue ; et al. | 2019-05-16 |
Structure Of Pellicle-mask Structure With Vent Structure
App 20190137865 - LIN; Yun-Yue | 2019-05-09 |
Lithography Mask And Method For Manufacturing The Same
App 20190101818 - LIN; Yun-Yue | 2019-04-04 |
Extreme Ultraviolet Mask And Method Of Manufacturing The Same
App 20190101817 - LIN; Yun-Yue | 2019-04-04 |
Pellicle Removal Method
App 20190094683 - YOO; Chue San ; et al. | 2019-03-28 |
Pellicle fabrication methods and structures thereof
Grant 10,162,258 - Lin , et al. Dec | 2018-12-25 |
Pellicle And Method Of Using The Same
App 20180329288 - YOO; Chue San ; et al. | 2018-11-15 |
Pellicle Structures And Methods Of Fabricating Thereof
App 20180292744 - LEE; Hsin-Chang ; et al. | 2018-10-11 |
Graphene pellicle for extreme ultraviolet lithography
Grant 10,012,899 - Tu , et al. July 3, 2 | 2018-07-03 |
Pellicle Fabrication Methods And Structures Thereof
App 20180173092 - LIN; Yun-Yue ; et al. | 2018-06-21 |
Pellicle Structures And Methods Of Fabricating Thereof
App 20180173093 - HSU; Pei-Cheng ; et al. | 2018-06-21 |
Pellicle structures and methods of fabricating thereof
Grant 10,001,701 - Hsu , et al. June 19, 2 | 2018-06-19 |
Lithography mask
Grant 9,995,999 - Lin , et al. June 12, 2 | 2018-06-12 |
Lithography Mask With Both Transmission-type And Reflective-type Overlay Marks And Method Of Fabricating The Same
App 20180149959 - Lin; Yun-Yue ; et al. | 2018-05-31 |
Graphene Pellicle for Extreme Ultraviolet Lithography
App 20180059534 - Tu; Chih-Chiang ; et al. | 2018-03-01 |
Chromeless Phase Shift Mask Structure And Process
App 20180059531 - Lin; Yun-Yue ; et al. | 2018-03-01 |
Pellicle and method for manufacturing the same
Grant 9,864,270 - Ma , et al. January 9, 2 | 2018-01-09 |
Pellicle Assembly and Method for Advanced Lithography
App 20170351170 - CHEN; AMO ; et al. | 2017-12-07 |
Pellicle assembly and method for advanced lithography
Grant 9,759,997 - Chen , et al. September 12, 2 | 2017-09-12 |
Pellicle And Method For Manufacturing The Same
App 20170205705 - Ma; Jeng-Shin ; et al. | 2017-07-20 |
Pellicle Assembly and Method for Advanced Lithography
App 20170176850 - Chen; Amo ; et al. | 2017-06-22 |
Mask and method for forming the same
Grant 9,651,857 - Lin , et al. May 16, 2 | 2017-05-16 |
Lithography Mask
App 20160299419 - Lin; Yun-Yue ; et al. | 2016-10-13 |
Lithography mask
Grant 9,366,953 - Lin , et al. June 14, 2 | 2016-06-14 |
Pellicle structure and method for forming the same
Grant 9,360,749 - Lin , et al. June 7, 2 | 2016-06-07 |
Lithography system and method for patterning photoresist layer on EUV mask
Grant 9,341,937 - Lin , et al. May 17, 2 | 2016-05-17 |
Method for forming a photo-active layer of the solar cell
Grant 9,287,422 - Su , et al. March 15, 2 | 2016-03-15 |
Method for forming a solar cell with tree-like nanostructure
Grant 9,269,840 - Su , et al. February 23, 2 | 2016-02-23 |
Pellicle Structure And Method For Forming The Same
App 20150309404 - LIN; Yun-Yue ; et al. | 2015-10-29 |
Lithography System And Method For Patterning Photoresist Layer On Euv Mask
App 20150309401 - LIN; Yun-Yue ; et al. | 2015-10-29 |
Lithography Mask
App 20150205194 - LIN; Yun-Yue ; et al. | 2015-07-23 |
Mask And Method For Forming The Same
App 20150177612 - Lin; Yun-Yue ; et al. | 2015-06-25 |
Mask and method for forming the same
Grant 8,974,988 - Lin , et al. March 10, 2 | 2015-03-10 |
Method of making a lithography mask
Grant 8,916,482 - Lee , et al. December 23, 2 | 2014-12-23 |
Apparatus Of Repairing A Mask And A Method For The Same
App 20140186751 - Yu; Chia-Hao ; et al. | 2014-07-03 |
Apparatus of repairing a mask and a method for the same
Grant 8,753,788 - Yu , et al. June 17, 2 | 2014-06-17 |
Method of fabricating a lithography mask
Grant 8,679,707 - Lee , et al. March 25, 2 | 2014-03-25 |
Method of Fabricating a Lithography Mask
App 20140038088 - Lee; Hsin-Chang ; et al. | 2014-02-06 |
Mask And Method For Forming The Same
App 20130280644 - Lin; Yun-Yue ; et al. | 2013-10-24 |
Method Of Making A Lithography Mask
App 20130260289 - Lin; Yun-Yue ; et al. | 2013-10-03 |
Method Of Making A Lithography Mask
App 20130260573 - Lee; Hsin-Chang ; et al. | 2013-10-03 |
Photo-active layer of a multi-layered structure within a solar cell
Grant 8,502,068 - Su , et al. August 6, 2 | 2013-08-06 |
Photo-Active Layer Of A Multi-Layered Structure Within A Solar Cell
App 20120211070 - SU; WEI-FANG ; et al. | 2012-08-23 |
Method for Forming A Solar Cell With Tree-Like Nanostructure
App 20120214274 - SU; WEI-FANG ; et al. | 2012-08-23 |
Method For Forming A Photo-Active Layer Of The Solar Cell
App 20120208316 - SU; WEI-FANG ; et al. | 2012-08-16 |
Solar cell having tree-like nanostructure and method for preparing the same
Grant 8,198,531 - Su , et al. June 12, 2 | 2012-06-12 |
Photovoltaic Devices with Nanostructure/Conjugated Polymer Hybrid Layer and its Matched Electron Transporting Layer
App 20110308613 - Tseng; Tsung-Wei ; et al. | 2011-12-22 |
Solar Cell Having Tree-Like Nanostructure and Method for Preparing the Same
App 20090038677 - Su; Wei-Fang ; et al. | 2009-02-12 |
Photovoltaic Devices with Nanostructure/Conjugated Polymer Hybrid Layer and its Matched Electron Transporting Layer
App 20080041447 - Tseng; Tsung-Wei ; et al. | 2008-02-21 |
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