Lin; Qun Ying

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lin; Qun Ying.The latest application filed is for "determination of lithography tool process condition".

Company Profile

0.8.11

Lin; Qun Ying - Singapore SG

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Litho scanner alignment signal improvement Grant 9,034,720 - Liu , et al. May 19, 2	2015-05-19
Determination Of Lithography Tool Process Condition App 20140170539 - ZHOU; Wenzhan ; et al.	2014-06-19
Determination of lithography tool process condition Grant 8,741,511 - Zhou , et al. June 3, 2	2014-06-03
Litho Scanner Alignment Signal Improvement App 20140050439 - LIU; Hui ; et al.	2014-02-20
Waferless Measurement Recipe App 20140019927 - YUDHISTIRA; Yasri ; et al.	2014-01-16
Mask and method to pattern chromeless phase lithography contact hole Grant 8,057,968 - Tan , et al. November 15, 2	2011-11-15
Monitoring structure Grant 7,866,224 - Tan , et al. January 11, 2	2011-01-11
Mask And Method To Pattern Chromeless Phase Lithography Contact Hole App 20100196805 - TAN; Sia Kim ; et al.	2010-08-05
Mask and method to pattern chromeless phase lithography contact hole Grant 7,655,388 - Tan , et al. February 2, 2	2010-02-02
Monitoring Structure App 20080127998 - Tan; Sia Kim ; et al.	2008-06-05
Method for dual damascene patterning with single exposure using tri-tone phase shift mask Grant 7,288,366 - Tan , et al. October 30, 2	2007-10-30
Mask and method to pattern chromeless phase lithography contact hole App 20060147813 - Tan; Sya Kim ; et al.	2006-07-06
Structure and method to fabricate a protective sidewall liner for an optical mask App 20060105520 - Tan; Sia Kim ; et al.	2006-05-18
Half tone alternating phase shift masks Grant 7,014,962 - Lin , et al. March 21, 2	2006-03-21
Method for dual damascene patterning with single exposure using tri-tone phase shift mask App 20050089763 - Tan, Sia Kim ; et al.	2005-04-28
Half tone alternating phase shift masks App 20050058912 - Lin, Qun Ying ; et al.	2005-03-17

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