LIN; Kuan-Wen
Patent Applications and Registrations
Patent applications and USPTO patent grants for LIN; Kuan-Wen.The latest application filed is for "method and device for cleaning substrates".
- LIN; Kuan-Wen - Taichung City TW
- Lin; Kuan-Wen - Taichung TW
- Lin; Kuan-Wen - Changhua County TW
| Patent | Date |
|---|---|
| Method And Device For Cleaning Substrates App 20220308464 - LIU; Chung-Hsuan ; et al. | 2022-09-29 |
| Ozone wafer cleaning module having an ultraviolet lamp module with rotatable reflectors Grant 11,430,671 - Lin , et al. August 30, 2 | 2022-08-30 |
| Particle Removing Assembly And Method Of Cleaning Mask For Lithography App 20220252993 - LIN; Chen-Yang ; et al. | 2022-08-11 |
| Particle removing assembly and method of cleaning mask for lithography Grant 11,294,292 - Lin , et al. April 5, 2 | 2022-04-05 |
| Ozone Wafer Cleaning Module Having An Ultraviolet Lamp Module With Rotatable Reflectors App 20220037171 - LIN; Chen-Yang ; et al. | 2022-02-03 |
| System and method for localized EUV pellicle glue removal Grant 11,079,669 - Chou , et al. August 3, 2 | 2021-08-03 |
| Particle Removing Assembly And Method Of Cleaning Mask For Lithography App 20210200107 - LIN; Chen-Yang ; et al. | 2021-07-01 |
| Acoustic Measurement of Fabrication Equipment Clearance App 20210072196 - Deng; Jun-Hao ; et al. | 2021-03-11 |
| Acoustic measurement of film thickness Grant 10,845,342 - Deng , et al. November 24, 2 | 2020-11-24 |
| Acoustic measurement of fabrication equipment clearance Grant 10,794,872 - Deng , et al. October 6, 2 | 2020-10-06 |
| System and Method for Localized EUV Pellicle Glue Removal App 20200150523 - Chou; Tzu-Ting ; et al. | 2020-05-14 |
| System and method for localized EUV pellicle glue removal Grant 10,520,805 - Chou , et al. Dec | 2019-12-31 |
| Systems and methods of EUV mask cleaning Grant 10,156,784 - Shen , et al. Dec | 2018-12-18 |
| Acoustic Measurement of Fabrication Equipment Clearance App 20180348171 - Deng; Jun-Hao ; et al. | 2018-12-06 |
| Systems and Methods of EUV Mask Cleaning App 20180157168 - Shen; Ching-Wei ; et al. | 2018-06-07 |
| Systems and methods of EUV mask cleaning Grant 9,885,952 - Shen , et al. February 6, 2 | 2018-02-06 |
| System and Method for Localized EUV Pellicle Glue Removal App 20180031962 - Chou; Tzu-Ting ; et al. | 2018-02-01 |
| Damage prevention on EUV mask Grant 9,740,094 - Lin , et al. August 22, 2 | 2017-08-22 |
| Method and system for EUV mask cleaning with non-thermal solution Grant 9,665,000 - Shen , et al. May 30, 2 | 2017-05-30 |
| Mask pellicle indicator for haze prevention Grant 9,658,526 - Lin , et al. May 23, 2 | 2017-05-23 |
| Acoustic Measurement of Fabrication Equipment Clearance App 20170138911 - Deng; Jun-Hao ; et al. | 2017-05-18 |
| Method and System for EUV Mask Cleaning with Non-Thermal Solution App 20170139322 - Shen; Ching-Wei ; et al. | 2017-05-18 |
| Damage Prevention on EUV Mask App 20170052443 - Lin; Kuan-Wen ; et al. | 2017-02-23 |
| Systems and Methods of EUV Mask Cleaning App 20170031241 - Shen; Ching-Wei ; et al. | 2017-02-02 |
| Mask Pellicle Indicator for Haze Prevention App 20170003585 - Lin; Kuan-Wen ; et al. | 2017-01-05 |
| Lithography system and method for haze elimination Grant 9,418,847 - Shen , et al. August 16, 2 | 2016-08-16 |
| Lithography System And Method For Haze Elimination App 20150212419 - Shen; Ching-Wei ; et al. | 2015-07-30 |
| Device manufacturing and cleaning method Grant 8,932,958 - Lu , et al. January 13, 2 | 2015-01-13 |
| Device Manufacturing And Cleaning Method App 20140051252 - Lu; Chi-Lun ; et al. | 2014-02-20 |
| Device Manufacturing And Cleaning Method App 20130323931 - Lu; Chi-Lun ; et al. | 2013-12-05 |
| Device manufacturing and cleaning method Grant 8,598,042 - Lu , et al. December 3, 2 | 2013-12-03 |
| Storable Structure Of Table And Chair App 20100320811 - Lin; Hsiung-Wei ; et al. | 2010-12-23 |
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