loadpatents
Patent applications and USPTO patent grants for LIN; Hom-Chung.The latest application filed is for "method of monitoring tool".
Patent | Date |
---|---|
Method Of Monitoring Tool App 20220130697 - LIN; Hom-Chung ;   et al. | 2022-04-28 |
Tool monitoring device and method of monitoring tool Grant 11,239,099 - Lin , et al. February 1, 2 | 2022-02-01 |
Gas Delivery System For Ion Implanter App 20210366690 - LIN; Hom-Chung ;   et al. | 2021-11-25 |
Fault detection method in semiconductor fabrication facility Grant 11,056,365 - Lin , et al. July 6, 2 | 2021-07-06 |
Tool Monitoring Device And Method Of Monitoring Tool App 20200105555 - LIN; Hom-Chung ;   et al. | 2020-04-02 |
Fault Detection Method In Semiconductor Fabrication Facility App 20190096723 - LIN; Hom-Chung ;   et al. | 2019-03-28 |
Arc chamber filament for ion implanter Grant 6,787,781 - Lin , et al. September 7, 2 | 2004-09-07 |
Auto-centering device for mechanical clamp Grant 6,767,407 - Yu , et al. July 27, 2 | 2004-07-27 |
Apparatus and method for detecting tilt angle of a wafer platform Grant 6,737,663 - Lin , et al. May 18, 2 | 2004-05-18 |
Apparatus and method for detecting tilt angle of a wafer platform App 20030218144 - Lin, Hom-Chung ;   et al. | 2003-11-27 |
Auto-centering device for mechanical clamp App 20030209325 - Yu, Chi-Fu ;   et al. | 2003-11-13 |
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