| Patent | Date |
|---|
Transmission mask with differential attenuation to improve ISO-dense proximity
Grant 8,229,062 - Liu , et al. July 24, 2 | 2012-07-24 |
Transmission Mask With Differential Attenuation To Improve Iso-dense Proximity
App 20100321656 - Liu; Hang Yip ; et al. | 2010-12-23 |
Transmission mask with differential attenuation to improve ISO-dense proximity
Grant 7,807,342 - Liu , et al. October 5, 2 | 2010-10-05 |
Method and related operation system for immersion lithography
Grant 7,633,601 - Huang , et al. December 15, 2 | 2009-12-15 |
Method for designing photomask
Grant 7,476,472 - Shieh , et al. January 13, 2 | 2009-01-13 |
Method Of Forming A Pattern
App 20080160459 - Lin; Benjamin Szu-Min | 2008-07-03 |
Method Of Moving Bubbles
App 20080067335 - Hou; Ya-Ching ; et al. | 2008-03-20 |
Method For Characterizing Line Width Roughness (lwr) Of Printed Features
App 20080055597 - Sun; Jie-Wei ; et al. | 2008-03-06 |
Method For Immersion Lithography
App 20070224545 - Lin; Benjamin Szu-Min | 2007-09-27 |
Method And Related Operation System For Immersion Lithography
App 20070215040 - Huang; Yong-Fa ; et al. | 2007-09-20 |
Profile improvement method for patterning
Grant 7,268,070 - Huang , et al. September 11, 2 | 2007-09-11 |
Method For Improving The Alignment Accuracy Of Semiconductor Process And Method Of Forming Opening
App 20070190805 - Lin; Benjamin Szu-Min | 2007-08-16 |
Semiconductor Exposure Method And Method Of Controlling Semiconductor Exposure Apparatus
App 20070182948 - Lin; Benjamin Szu-Min ; et al. | 2007-08-09 |
Method for improving illumination uniformity in exposure process, and exposure apparatus
App 20070024835 - Huang; Kuo-Chun ; et al. | 2007-02-01 |
Method For Designing Photomask
App 20070020532 - Shieh; Ming-Feng ; et al. | 2007-01-25 |
Method For Forming Composite Pattern Including Different Types Of Patterns
App 20060257795 - Lin; Benjamin Szu-Min | 2006-11-16 |
EUV reflection mask and lithographic process using the same
Grant 7,105,255 - Lin September 12, 2 | 2006-09-12 |
Immersion Lithography Without Using A Topcoat
App 20060194142 - Lin; Benjamin Szu-Min | 2006-08-31 |
Method for fabricating etch mask and patterning process using the same
App 20060191863 - Lin; Benjamin Szu-Min | 2006-08-31 |
Effective assist pattern for nested and isolated contacts
Grant 7,074,528 - Schacht , et al. July 11, 2 | 2006-07-11 |
Lithography Method
App 20060133222 - Lin; Benjamin Szu-Min | 2006-06-22 |
Transmission mask with differential attenuation to improve ISO-dense proximity
Grant 7,052,808 - Liu , et al. May 30, 2 | 2006-05-30 |
Transmission mask with differential attenuation to improve ISO-dense proximity
App 20060093971 - Liu; Hang Yip ; et al. | 2006-05-04 |
Phase shifting lithographic process
Grant 7,018,788 - Lin March 28, 2 | 2006-03-28 |
Mask device for photolithography and application thereof
App 20050250019 - Lin, Benjamin Szu-Min | 2005-11-10 |
Method Of Forming Dual Damascene Structures
App 20050196951 - Lin, Benjamin Szu-Min ; et al. | 2005-09-08 |
Effective assist pattern for nested and isolated contacts
App 20050136336 - Schacht, Jochen ; et al. | 2005-06-23 |
Phase Shifting Lithographic Process
App 20050074678 - Lin, Benjamin Szu-Min | 2005-04-07 |
Structure of phase shifting mask
Grant 6,866,967 - Lin March 15, 2 | 2005-03-15 |
Phase shifting lithographic process
Grant 6,849,393 - Lin February 1, 2 | 2005-02-01 |
Sandwich photoresist structure in photolithographic process
Grant 6,844,143 - Lin , et al. January 18, 2 | 2005-01-18 |
Profile improvement method for patterning
App 20040241587 - Huang, Hui-Ling ; et al. | 2004-12-02 |
EUV reflection mask and lithographic process using the same
App 20040219437 - Lin, Benjamin Szu-Min | 2004-11-04 |
Method for shrinking pattern photoresist
App 20040166447 - Chang, Vencent ; et al. | 2004-08-26 |
Method for shrinking the image of photoresist
App 20040166448 - Chang, Vencent ; et al. | 2004-08-26 |
Phase Shifting Lithographic Process
App 20040161675 - Lin, Benjamin Szu-Min | 2004-08-19 |
Transmission mask with differential attenuation to improve iso-dense proximity
App 20040157135 - Liu, Hang Yip ; et al. | 2004-08-12 |
Method For Shrinking Critical Dimension Of Semiconductor Devices
App 20040106067 - Lin, Benjamin Szu-Min ; et al. | 2004-06-03 |
Method for shrinking critical dimension of semiconductor devices
Grant 6,740,473 - Lin , et al. May 25, 2 | 2004-05-25 |
Structural design of alignment mark
App 20040075179 - Liu, George ; et al. | 2004-04-22 |
Method for detecting wafer level defect
App 20040008879 - Lin, Benjamin Szu-Min | 2004-01-15 |
Sandwich photoresist structure in phtotlithographic process
App 20040009434 - Lin, Benjamin Szu-Min ; et al. | 2004-01-15 |
Structure of phase shifting mask
App 20040005505 - Lin, Benjamin Szu-Min | 2004-01-08 |
Metal-insulator-metal capacitor and method of manufacture
App 20030025143 - Lin, Benjamin Szu-Min ; et al. | 2003-02-06 |
Method Of Preventing Toppling Of Lower Electrode Through Flush Cleaning
App 20020192923 - Sun, Nathna ; et al. | 2002-12-19 |
Self-aligned photolithographic process for forming silicon-on-insulator devices
App 20020177085 - Lin, Benjamin Szu-Min | 2002-11-28 |
Optical proximity correction algorithm for pattern transfer
App 20020123866 - Lin, Benjamin Szu-Min | 2002-09-05 |
Photolithography technique utilizing alignment marks at scribe line intersections
Grant 6,071,656 - Lin June 6, 2 | 2000-06-06 |
Half tone phase shift mask comprising second pattern layer on backside of substrate
Grant 6,048,650 - Lin April 11, 2 | 2000-04-11 |
Method of fabricating a dual damascene structure
Grant 6,042,996 - Lin , et al. March 28, 2 | 2000-03-28 |
Double-sided photomask
Grant 6,022,645 - Lin February 8, 2 | 2000-02-08 |
Phase-shifting mask for photolithography in semiconductor fabrications
Grant 6,010,807 - Lin January 4, 2 | 2000-01-04 |
Phase-shifting mask structure and method of fabricating the same
Grant 6,004,702 - Lin December 21, 1 | 1999-12-21 |
Method for manufacturing DRAM capacitor
Grant 5,998,260 - Lin December 7, 1 | 1999-12-07 |
Method for forming dual damascene structure
Grant 5,989,997 - Lin , et al. November 23, 1 | 1999-11-23 |
Method for manufacturing dram capacitor
Grant 5,888,865 - Lin March 30, 1 | 1999-03-30 |
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