loadpatents
Patent applications and USPTO patent grants for LIMDULPAIBOON; Ratsamee.The latest application filed is for "methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layers".
Patent | Date |
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Methods, Systems, And Apparatus For Processing Substrates Using One Or More Amorphous Carbon Hardmask Layers App 20220262643 - NITTALA; Krishna ;   et al. | 2022-08-18 |
Method Of In Situ Ceramic Coating Deposition App 20220098728 - BOBEK; Sarah Michelle ;   et al. | 2022-03-31 |
Dielectric Coating For Deposition Chamber App 20220020589 - Xu; Lu ;   et al. | 2022-01-20 |
Methods Of Reducing Chamber Residues App 20200362457 - HU; Liangfa ;   et al. | 2020-11-19 |
Plasma Densification Within A Processing Chamber App 20200328066 - KWON; Byung Seok ;   et al. | 2020-10-15 |
Plasma treatment of low-K surface to improve barrier deposition Grant 9,245,793 - Limdulpaiboon , et al. January 26, 2 | 2016-01-26 |
Methods for fabricating integrated circuits including fluorine incorporation Grant 9,196,475 - Lee , et al. November 24, 2 | 2015-11-24 |
Methods For Fabricating Integrated Circuits Including Fluorine Incorporation App 20150303057 - Lee; Bongki ;   et al. | 2015-10-22 |
Plasma Treatment of Low-K Surface to Improve Barrier Deposition App 20150179509 - Limdulpaiboon; Ratsamee ;   et al. | 2015-06-25 |
Hydrogen plasma cleaning of germanium oxide surfaces Grant 8,987,143 - Limdulpaiboon , et al. March 24, 2 | 2015-03-24 |
Nucleation interface for high-k layer on germanium Grant 8,901,677 - Greer , et al. December 2, 2 | 2014-12-02 |
Controlling Radical Lifetimes in a Remote Plasma Chamber App 20140273309 - Niyogi; Sandip ;   et al. | 2014-09-18 |
Channel-Last Methods for Making FETS App 20140264281 - Niyogi; Sandip ;   et al. | 2014-09-18 |
Hydrogen Plasma Cleaning of Germanium Oxide Surfaces App 20140273493 - Limdulpaiboon; Ratsamee ;   et al. | 2014-09-18 |
Nucleation Interface for High-K Layer on Germanium App 20140252565 - Greer; Frank ;   et al. | 2014-09-11 |
Resolving of fluorine loading effect in the vacuum chamber Grant 7,435,684 - Lang , et al. October 14, 2 | 2008-10-14 |
Strain engineering--HDP thin film with tensile stress for FEOL and other applications Grant 7,381,451 - Lang , et al. June 3, 2 | 2008-06-03 |
Helium-based etch process in deposition-etch-deposition gap fill Grant 7,344,996 - Lang , et al. March 18, 2 | 2008-03-18 |
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