Limbach; Guido

Patent Applications and Registrations

Patent applications and USPTO patent grants for Limbach; Guido.The latest application filed is for "euv exposure apparatus with reflective elements having reduced influence of temperature variation".

Company Profile

4.21.21

Limbach; Guido - Aalen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
EUV exposure apparatus with reflective elements having reduced influence of temperature variation Grant 10,684,551 - Baer , et al.	2020-06-16
Euv Exposure Apparatus With Reflective Elements Having Reduced Influence Of Temperature Variation App 20190310555 - Baer; Norman ; et al.	2019-10-10
EUV exposure apparatus with reflective elements having reduced influence of temperature variation Grant 10,317,802 - Baer , et al.	2019-06-11
Optical element unit for exposure processes Grant 10,203,607 - Schwertner , et al. Feb	2019-02-12
Euv Exposure Apparatus With Reflective Elements Having Reduced Influence Of Temperature Variation App 20180299784 - Baer; Norman ; et al.	2018-10-18
EUV exposure apparatus with reflective elements having reduced influence of temperature variation Grant 10,031,423 - Baer , et al. July 24, 2	2018-07-24
Lens Module Comprising At Least One Exchangeable Optical Element App 20180031827 - SOYEZ; Guido ; et al.	2018-02-01
Euv Exposure Apparatus With Reflective Elements Having Reduced Influence Of Temperature Variation App 20170315449 - Baer; Norman ; et al.	2017-11-02
EUV exposure apparatus with reflective elements having reduced influence of temperature variation Grant 9,746,778 - Baer , et al. August 29, 2	2017-08-29
Lens module comprising at least one exchangeable optical element Grant 9,703,098 - Soyez , et al. July 11, 2	2017-07-11
Mirror, projection objective with such mirror, and projection exposure apparatus for microlithography with such projection objective Grant 9,575,224 - Freimann , et al. February 21, 2	2017-02-21
Method for replacing objective parts Grant 9,551,944 - Geuppert , et al. January 24, 2	2017-01-24
Lens Module Comprising At Least One Exchangeable Optical Element App 20160357012 - SOYEZ; Guido ; et al.	2016-12-08
Lens module comprising at least one exchangeable optical element Grant 9,423,695 - Soyez , et al. August 23, 2	2016-08-23
Euv Exposure Apparatus With Reflective Elements Having Reduced Influence Of Temperature Variation App 20160195818 - Baer; Norman ; et al.	2016-07-07
EUV exposure apparatus with reflective elements having reduced influence of temperature variation Grant 9,316,929 - Baer , et al. April 19, 2	2016-04-19
Optical module with a measuring device Grant 9,175,948 - Schoeppach , et al. November 3, 2	2015-11-03
Optical Element Unit For Exposure Processes App 20150168846 - Schwertner; Tilman ; et al.	2015-06-18
Optical element unit for exposure processes having sealing element Grant 9,046,795 - Schwertner , et al. June 2, 2	2015-06-02
Lens Module Comprising At Least One Exchangeable Optical Element App 20150138521 - SOYEZ; Guido ; et al.	2015-05-21
Lens module comprising at least one exchangeable optical element Grant 8,939,587 - Soyez , et al. January 27, 2	2015-01-27
Method and Device for Replacing Objective Parts App 20140359990 - Geuppert; Bernhard ; et al.	2014-12-11
Optical Module With A Measuring Device App 20140125995 - Schoeppach; Armin ; et al.	2014-05-08
Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations Grant 8,659,745 - Limbach , et al. February 25, 2	2014-02-25
Mirror, Projection Objective With Such Mirror, And Projection Exposure Apparatus For Microlithography With Such Projection Objective App 20130286471 - FREIMANN; Rolf ; et al.	2013-10-31
Optical System With An Exchangeable, Manipulable Correction Arrangement For Reducing Image Aberrations App 20130278911 - Limbach; Guido ; et al.	2013-10-24
Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations Grant 8,542,346 - Limbach , et al. September 24, 2	2013-09-24
Lens Module Comprising At Least One Exchangeable Optical Element App 20130155509 - SOYEZ; Guido ; et al.	2013-06-20
EUV Exposure Apparatus App 20130141707 - Baer; Norman ; et al.	2013-06-06
Lens module comprising at least one exchangeable optical element Grant 8,376,559 - Soyez , et al. February 19, 2	2013-02-19
Lens Module Comprising At Least One Exchangeable Optical Element App 20120105958 - SOYEZ; Guido ; et al.	2012-05-03
Lens module comprising at least one exchangeable optical element Grant 8,092,029 - Soyez , et al. January 10, 2	2012-01-10
Method And Device For Replacing Objective Parts App 20090260654 - Geuppert; Bernhard ; et al.	2009-10-22
Optical System With An Exchangeable, Manipulable Correction Arrangement For Reducing Image Aberrations App 20090244509 - Limbach; Guido ; et al.	2009-10-01
Optical element unit for exposure processes Grant 7,545,483 - Gellrich , et al. June 9, 2	2009-06-09
Optical Element Unit For Exposure Processes App 20080225247 - Schwertner; Tilman ; et al.	2008-09-18
Optical element unit for exposure processes App 20080192215 - Gellrich; Bernhard ; et al.	2008-08-14
Lens Module Comprising at Least One Exchangeable Optical Element App 20080137192 - Soyez; Guido ; et al.	2008-06-12

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