Lim; Mayasari
Patent Applications and Registrations
Patent applications and USPTO patent grants for Lim; Mayasari.The latest application filed is for "process modulation to prevent structure erosion during gap fill".
- Lim; Mayasari - London GB
- Lim; Mayasari - Union CIty CA
| Patent | Date |
|---|---|
| Process modulation to prevent structure erosion during gap fill Grant 7,217,658 - Bayman , et al. May 15, 2 | 2007-05-15 |
| Method for controlling etch process repeatability Grant 7,078,312 - Sutanto , et al. July 18, 2 | 2006-07-18 |
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