| Patent | Date |
|---|
Method of setting a measurement instrument and system for setting a measurement instrument
Grant 11,366,193 - Ramian , et al. June 21, 2 | 2022-06-21 |
Method Of Setting A Measurement Instrument And System For Setting A Measurement Instrument
App 20210088615 - RAMIAN; Florian ; et al. | 2021-03-25 |
Gas sensing method with chemical and thermal conductivity sensing
Grant 10,935,509 - Liu , et al. March 2, 2 | 2021-03-02 |
Live fingerprint detection utilizing an integrated ultrasound and infrared sensor
Grant 10,891,461 - Liu , et al. January 12, 2 | 2021-01-12 |
Methods for CMOS-MEMS integrated devices with multiple sealed cavities maintained at various pressures
Grant 10,850,973 - Daneman , et al. December 1, 2 | 2020-12-01 |
Gas Sensing Method With Chemical And Thermal Conductivity Sensing
App 20200173946 - Liu; Fang ; et al. | 2020-06-04 |
Methods For Cmos-mems Integrated Devices With Multiple Sealed Cavities Maintained At Various Pressures
App 20200109045 - DANEMAN; Michael ; et al. | 2020-04-09 |
Gas sensing device with chemical and thermal conductivity sensing
Grant 10,598,621 - Liu , et al. | 2020-03-24 |
Methods for CMOS-MEMS integrated devices with multiple sealed cavities maintained at various pressures
Grant 10,532,926 - Daneman , et al. Ja | 2020-01-14 |
MEMS device and process for RF and low resistance applications
Grant 10,508,022 - Daneman , et al. Dec | 2019-12-17 |
Acoustic ambient temperature and humidity sensing
Grant 10,488,274 - Li , et al. Nov | 2019-11-26 |
Integrated package containing MEMS acoustic sensor and environmental sensor and methodology for fabricating same
Grant 10,343,897 - Tsai , et al. July 9, 2 | 2019-07-09 |
CMOS-MEMS integrated device including multiple cavities at different controlled pressures and methods of manufacture
Grant 10,221,065 - Lee , et al. | 2019-03-05 |
MEMS device and process for RF and low resistance applications
Grant 10,160,635 - Daneman , et al. Dec | 2018-12-25 |
Gas Sensor Platform And The Method Of Making The Same
App 20180340901 - Liu; Fang ; et al. | 2018-11-29 |
Live Fingerprint Detection Utilizing An Integrated Ultrasound And Infrared Sensor
App 20180336390 - Liu; Fang ; et al. | 2018-11-22 |
Mems Device And Process For Rf And Low Resistance Applications
App 20180312394 - DANEMAN; Michael J. ; et al. | 2018-11-01 |
Gas Sensing Method And Device
App 20180292338 - Liu; Fang ; et al. | 2018-10-11 |
CMOS-MEMS-CMOS platform
Grant 10,093,533 - Smeys , et al. October 9, 2 | 2018-10-09 |
Acoustic Ambient Temperature And Humidity Sensing
App 20180217008 - Li; Xiang ; et al. | 2018-08-02 |
Acoustic ambient temperature and humidity sensing
Grant 9,933,319 - Li , et al. April 3, 2 | 2018-04-03 |
Cavity pressure modification using local heating with a laser
Grant 9,878,902 - Dueweke , et al. January 30, 2 | 2018-01-30 |
Cmos-mems-cmos Platform
App 20180009654 - SMEYS; Peter ; et al. | 2018-01-11 |
Capacitive sensing structure with embedded acoustic channels
Grant 9,809,451 - Chan , et al. November 7, 2 | 2017-11-07 |
Systems and apparatus having MEMS acoustic sensors and other MEMS sensors and methods of fabrication of the same
Grant 9,809,448 - Lim , et al. November 7, 2 | 2017-11-07 |
Method for MEMS structure with dual-level structural layer and acoustic port
Grant 9,802,815 - Daneman , et al. October 31, 2 | 2017-10-31 |
CMOS-MEMS-CMOS platform
Grant 9,796,580 - Smeys , et al. October 24, 2 | 2017-10-24 |
Mems Device And Process For Rf And Low Resistance Applications
App 20170297900 - DANEMAN; Michael J. ; et al. | 2017-10-19 |
Methods For Cmos-mems Integrated Devices With Multiple Sealed Cavities Maintained At Various Pressures
App 20170297907 - DANEMAN; Michael ; et al. | 2017-10-19 |
CMOS-MEMS integrated device including multiple cavities at different controlled pressures and methods of manufacture
Grant 9,738,512 - Lee , et al. August 22, 2 | 2017-08-22 |
Method of increasing MEMS enclosure pressure using outgassing material
Grant 9,731,963 - Zhang , et al. August 15, 2 | 2017-08-15 |
Integrated heater for gettering or outgassing activation
Grant 9,718,679 - Lim August 1, 2 | 2017-08-01 |
Integrated Package Containing Mems Acoustic Sensor And Environmental Sensor And Methodology For Fabricating Same
App 20170190571 - Tsai; Julius Ming-Lin ; et al. | 2017-07-06 |
Cmos-mems Integrated Device Including Multiple Cavities At Different Controlled Pressures And Methods Of Manufacture
App 20170183225 - LEE; Daesung ; et al. | 2017-06-29 |
MEMS device with electrodes permeable to outgassing species
Grant 9,663,349 - Shin , et al. May 30, 2 | 2017-05-30 |
Method for providing a MEMS device with a plurality of sealed enclosures having uneven standoff structures and MEMS device thereof
Grant 9,650,241 - Zhang , et al. May 16, 2 | 2017-05-16 |
MEMS device and process for RF and low resistance applications
Grant 9,617,141 - Daneman , et al. April 11, 2 | 2017-04-11 |
Integrated package containing MEMS acoustic sensor and environmental sensor and methodology for fabricating same
Grant 9,617,144 - Tsai , et al. April 11, 2 | 2017-04-11 |
Systems and apparatus having top port integrated back cavity micro electro-mechanical system microphones and methods of fabrication of the same
Grant 9,621,975 - Liu , et al. April 11, 2 | 2017-04-11 |
Cavity Pressure Modification Using Local Heating With A Laser
App 20170096330 - DUEWEKE; Michael ; et al. | 2017-04-06 |
Film induced interface roughening and method of producing the same
Grant 9,611,133 - Liu , et al. April 4, 2 | 2017-04-04 |
Method For Providing A Mems Device With A Plurality Of Sealedenclosures Having Uneven Standoff Structures And Mems Devicethereof
App 20170081181 - ZHANG; Cerina ; et al. | 2017-03-23 |
Gas Sensor Platform And The Method Of Making The Same
App 20170067841 - Liu; Fang ; et al. | 2017-03-09 |
Cavity pressure modification using local heating with a laser
Grant 9,556,019 - Dueweke , et al. January 31, 2 | 2017-01-31 |
Methods for CMOS-MEMS integrated devices with multiple sealed cavities maintained at various pressures
Grant 9,540,230 - Daneman , et al. January 10, 2 | 2017-01-10 |
Method Of Increasing Mems Enclosure Pressure Using Outgassing Material
App 20170001861 - ZHANG; Cerina ; et al. | 2017-01-05 |
Mems Device With Electrodes Permeable To Outgassing Species
App 20160376143 - SHIN; Jongwoo ; et al. | 2016-12-29 |
Cmos-mems-cmos Platform
App 20160362293 - SMEYS; Peter ; et al. | 2016-12-15 |
Cavity Pressure Modification Using Local Heating With A Laser
App 20160325985 - DUEWEKE; Michael ; et al. | 2016-11-10 |
Acoustic Ambient Temperature And Humidity Sensing
App 20160299014 - Li; Xiang ; et al. | 2016-10-13 |
Method of increasing MEMS enclosure pressure using outgassing material
Grant 9,452,925 - Zhang , et al. September 27, 2 | 2016-09-27 |
MEMS acoustic sensor with integrated back cavity
Grant 9,428,379 - Ata , et al. August 30, 2 | 2016-08-30 |
Systems And Apparatus Having Top Port Integrated Back Cavity Micro Electro-mechanical System Microphones And Methods Of Fabrication Of The Same
App 20160165331 - Liu; Fang ; et al. | 2016-06-09 |
Differential sensing acoustic sensor
Grant 9,344,808 - Chan , et al. May 17, 2 | 2016-05-17 |
Film Induced Interface Roughening And Method Of Producing The Same
App 20160115016 - Liu; Fang ; et al. | 2016-04-28 |
Integrated heater on MEMS cap for wafer scale packaged MEMS sensors
Grant 9,302,902 - Yaralioglu , et al. April 5, 2 | 2016-04-05 |
Method For Mems Structure With Dual-level Structural Layer And Acoustic Port
App 20160083247 - Daneman; Michael Julian ; et al. | 2016-03-24 |
Capacitive Sensing Structure With Embedded Acoustic Channels
App 20160068386 - Chan; Mei-Lin ; et al. | 2016-03-10 |
Mems Device And Process For Rf And Low Resistance Applications
App 20160031702 - DANEMAN; Michael Julian ; et al. | 2016-02-04 |
Method for MEMS structure with dual-level structural layer and acoustic port
Grant 9,227,842 - Daneman , et al. January 5, 2 | 2016-01-05 |
Internal electrical contact for enclosed MEMS devices
Grant 9,221,676 - Huang , et al. December 29, 2 | 2015-12-29 |
Capacitive sensing structure with embedded acoustic channels
Grant 9,216,897 - Chan , et al. December 22, 2 | 2015-12-22 |
Method Of Increasing Mems Enclosure Pressure Using Outgassing Material
App 20150360939 - Zhang; Cerina ; et al. | 2015-12-17 |
Internal Electrical Contact For Enclosed Mems Devices
App 20150336792 - HUANG; Kegang ; et al. | 2015-11-26 |
Integrated Package Containing Mems Acoustic Sensor And Environmental Sensor And Methodology For Fabricating Same
App 20150321906 - Tsai; Julius Ming-Lin ; et al. | 2015-11-12 |
Differential Sensing Acoustic Sensor
App 20150266723 - CHAN; Mei-Lin ; et al. | 2015-09-24 |
MEMS device and process for RF and low resistance applications
Grant 9,114,977 - Daneman , et al. August 25, 2 | 2015-08-25 |
Systems And Apparatus Having Mems Acoustic Sensors And Other Mems Sensors And Methods Of Fabrication Of The Same
App 20150158722 - Lim; Martin ; et al. | 2015-06-11 |
Integrated Heater For Gettering Or Outgassing Activation
App 20150158720 - LIM; Martin | 2015-06-11 |
Integrated structure with bidirectional vertical actuation
Grant 9,035,428 - Daneman , et al. May 19, 2 | 2015-05-19 |
Cmos-mems Integrated Device Including Multiple Cavities At Different Controlled Pressures And Methods Of Manufacture
App 20150129991 - LEE; Daesung ; et al. | 2015-05-14 |
Internal electrical contact for enclosed MEMS devices
Grant 8,945,969 - Huang , et al. February 3, 2 | 2015-02-03 |
Capacitive Sensing Structure With Embedded Acoustic Channels
App 20140361388 - Chan; Mei-Lin ; et al. | 2014-12-11 |
Internal Electrical Contact For Enclosed Mems Devices
App 20140349434 - HUANG; Kegang ; et al. | 2014-11-27 |
Surface Roughening To Reduce Adhesion In An Integrated Mems Device
App 20140264655 - WILLIAMS; Kirt Reed ; et al. | 2014-09-18 |
Mems Acoustic Sensor With Integrated Back Cavity
App 20140264656 - ATA; Erhan Polatkan ; et al. | 2014-09-18 |
Integrated Structure With Bidirectional Vertical Actuation
App 20140264645 - Daneman; Michael Julian ; et al. | 2014-09-18 |
Acoustic Sensor With Integrated Programmable Electronic Interface
App 20140264652 - Cagdaser; Baris ; et al. | 2014-09-18 |
Internal electrical contact for enclosed MEMS devices
Grant 8,822,252 - Huang , et al. September 2, 2 | 2014-09-02 |
Method For Mems Structure With Dual-level Structural Layer And Acoustic Port
App 20140239353 - Daneman; Michael Julian ; et al. | 2014-08-28 |
Internal Electrical Contact For Enclosed Mems Devices
App 20140213007 - HUANG; Kegang ; et al. | 2014-07-31 |
Integrated Heater On Mems Cap For Wafer Scale Packaged Mems Sensors
App 20140151869 - YARALIOGLU; Goksen G. ; et al. | 2014-06-05 |
Mems Device And Process For Rf And Low Resistance Applications
App 20140145244 - DANEMAN; Michael J. ; et al. | 2014-05-29 |
MEMS acoustic sensor with integrated back cavity
Grant 8,692,340 - Ata , et al. April 8, 2 | 2014-04-08 |
Integrated heater on MEMS cap for wafer scale packaged MEMS sensors
Grant 8,686,555 - Yaralioglu , et al. April 1, 2 | 2014-04-01 |
Internal electrical contact for enclosed MEMS devices
Grant 8,564,076 - Huang , et al. October 22, 2 | 2013-10-22 |
Integrated MEMS devices with controlled pressure environments by means of enclosed volumes
Grant 8,513,747 - Huang , et al. August 20, 2 | 2013-08-20 |
Micromachined magnetic field sensors
Grant 8,395,381 - Lo , et al. March 12, 2 | 2013-03-12 |
MEMS device including an electrical interconnect through a substrate
Grant 8,384,134 - Daneman , et al. February 26, 2 | 2013-02-26 |
Integrated MEMS devices with controlled pressure environments by means of enclosed volumes
Grant 8,350,346 - Huang , et al. January 8, 2 | 2013-01-08 |
Process For A Sealed Mems Device With A Portion Exposed To The Environment
App 20130001710 - DANEMAN; Michael J. ; et al. | 2013-01-03 |
Integrated Heater On Mems Cap For Wafer Scale Packaged Mems Sensors
App 20130001765 - YARALIOGLU; Goksen G. ; et al. | 2013-01-03 |
Methods For Cmos-mems Integrated Devices With Multiple Sealed Cavities Maintained At Various Pressures
App 20120326248 - DANEMAN; Michael ; et al. | 2012-12-27 |
Method Of Preventing Stiction Of Mems Devices
App 20120313189 - HUANG; Kegang ; et al. | 2012-12-13 |
Wafer Level Packaging Of Mems Devices
App 20120235251 - DANEMAN; Michael J. ; et al. | 2012-09-20 |
Wafer Level Packaging Of Mems Devices
App 20120235297 - DANEMAN; Michael J. ; et al. | 2012-09-20 |
Micromachined Magnetic Field Sensors
App 20120007598 - Lo; Chiung C. ; et al. | 2012-01-12 |
Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
Grant 7,458,263 - Nasiri , et al. December 2, 2 | 2008-12-02 |
Method and system of releasing a MEMS structure
Grant 7,250,353 - Nasiri , et al. July 31, 2 | 2007-07-31 |
Method and system of releasing a MEMS structure
App 20060228831 - Nasiri; Steven S. ; et al. | 2006-10-12 |
Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
App 20060219006 - Nasiri; Steven S. ; et al. | 2006-10-05 |
Bistable latching actuator for optical switching applications
Grant 6,865,313 - Mao , et al. March 8, 2 | 2005-03-08 |
Bistable latching actuator for optical switching applications
App 20040223204 - Mao, Minyao ; et al. | 2004-11-11 |
Micromachined apparatus and technique to align two dimensional fiber array
Grant 6,633,708 - Lim October 14, 2 | 2003-10-14 |
Method of fabricating vertical actuation comb drives
App 20030082917 - Hopkins, Dean A. JR. ; et al. | 2003-05-01 |
Fiber optic switch using MEMS
Grant 6,477,290 - Wan , et al. November 5, 2 | 2002-11-05 |
Translational optical shutter for a fiber optic switch
App 20020126948 - Lim, Martin ; et al. | 2002-09-12 |
Latching mechanism for mems actuator and method of fabrication
App 20020118084 - Lim, Martin ; et al. | 2002-08-29 |
Self-aligned electrical interconnect for two assembled perpendicular semiconductor chips
App 20020085796 - Lim, Martin ; et al. | 2002-07-04 |
Angular rate sensor made from a structural wafer of single crystal silicon
Grant 6,189,381 - Huang , et al. February 20, 2 | 2001-02-20 |
Monolithic silicon intra-ocular pressure sensor and method therefor
Grant 6,010,461 - Haniff , et al. January 4, 2 | 2000-01-04 |
Acoustic printheads with optical alignment
Grant 5,631,678 - Hadimioglu , et al. May 20, 1 | 1997-05-20 |
Lithographically defined ejection units
Grant 5,565,113 - Hadimioglu , et al. October 15, 1 | 1996-10-15 |
| 