Patent | Date |
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Chemical mechanical polishing machine and polishing head assembly Grant 10,195,715 - Kim , et al. Fe | 2019-02-05 |
Vertical memory devices Grant 9,997,534 - Son , et al. June 12, 2 | 2018-06-12 |
Wafer Boat Assembly And Substrate Processing Apparatus Including The Same App 20180114706 - YANG; Sang Ryol ;   et al. | 2018-04-26 |
Memory device and method of manufacturing the same Grant 9,893,077 - Nam , et al. February 13, 2 | 2018-02-13 |
Memory Device And Method Of Manufacturing The Same App 20160358927 - NAM; Phil Ouk ;   et al. | 2016-12-08 |
Vertical Memory Devices App 20160343730 - Son; Yong-Hoon ;   et al. | 2016-11-24 |
Nonvolatile memory device and a method for fabricating the same Grant 9,502,332 - Lim , et al. November 22, 2 | 2016-11-22 |
Chemical Mechanical Polishing Machine And Polishing Head Assembly App 20160129549 - KIM; IN-KWON ;   et al. | 2016-05-12 |
Chemical mechanical polishing machine and polishing head assembly Grant 9,254,546 - Kim , et al. February 9, 2 | 2016-02-09 |
Semiconductor Device And Method Of Manufacturing The Same App 20150200259 - Lim; Jong-Heun ;   et al. | 2015-07-16 |
Non-volatile memory device including etch stop layer pattern Grant 8,912,592 - Lim , et al. December 16, 2 | 2014-12-16 |
Methods of manufacturing semiconductor devices Grant 8,822,287 - Kim , et al. September 2, 2 | 2014-09-02 |
Chemical Mechanical Polishing Machine And Polishing Head Assembly App 20140235144 - KIM; IN-KWON ;   et al. | 2014-08-21 |
Multiple mold structure methods of manufacturing vertical memory devices Grant 8,664,101 - Kim , et al. March 4, 2 | 2014-03-04 |
Nonvolatile Memory Device And A Method For Fabricating The Same App 20140048945 - LIM; Jong-Heun ;   et al. | 2014-02-20 |
Non-volatile Memory Device And Method Of Manufacturing The Same App 20130214344 - Lim; Jong-heun ;   et al. | 2013-08-22 |
Multiple Mold Structure Methods Of Manufacturing Vertical Memory Devices App 20130065386 - Kim; Hyo-Jung ;   et al. | 2013-03-14 |
Methods of manufacturing semiconductor devices Grant 8,283,248 - Kim , et al. October 9, 2 | 2012-10-09 |
Methods Of Manufacturing Semiconductor Devices App 20120149185 - Kim; Hyo-Jung ;   et al. | 2012-06-14 |
Three-dimensional Semiconductor Devices And Methods Of Fabricating The Same App 20120108048 - Lim; Jong Heun ;   et al. | 2012-05-03 |
Methods Of Manufacturing Semiconductor Devices App 20120070976 - KIM; Tae-Hyun ;   et al. | 2012-03-22 |
Apparatus for polishing a wafer and method for detecting a polishing end point by the same Grant 8,038,508 - Lim , et al. October 18, 2 | 2011-10-18 |
Methods of forming semiconductor devices including multistage planarization and crystalization of a semiconductor layer Grant 8,008,172 - Lim , et al. August 30, 2 | 2011-08-30 |
Methods of forming stacked semiconductor devices with single-crystal semiconductor regions Grant 7,932,163 - Lim , et al. April 26, 2 | 2011-04-26 |
Methods of fabricating semiconductor devices including channel layers having improved defect density and surface roughness characteristics Grant 7,678,625 - Lim , et al. March 16, 2 | 2010-03-16 |
Apparatus for polishing a wafer and method for detecting a polishing end point by the same App 20090098804 - Lim; Jong-Heun ;   et al. | 2009-04-16 |
Resistive Random Access Memory Devices Including Sidewall Resistive Layers and Related Methods App 20080247219 - Choi; Suk-Hun ;   et al. | 2008-10-09 |
Methods of Forming Stacked Semiconductor Devices with Single-Crystal Semiconductor Regions App 20080200009 - Lim; Jong-Heun ;   et al. | 2008-08-21 |
Methods of forming semiconductor devices App 20080200007 - Lim; Jong-Heun ;   et al. | 2008-08-21 |
Ferroelectric Memory Devices Having a Protruding Bottom Electrode and Methods of Forming the Same App 20080164503 - Choi; Suk-Hun ;   et al. | 2008-07-10 |
Methods Of Fabricating Semiconductor Devices Including Channel Layers Having Improved Defect Density And Surface Roughness Characteristics App 20080160726 - Lim; Jong Heun ;   et al. | 2008-07-03 |
Method Of Manufacturing A Stack-type Semiconductor Device App 20080138960 - Han; Sang-Yeob ;   et al. | 2008-06-12 |
Methods Of Recycling A Substrate Including Using A Chemical Mechanical Polishing Process App 20080124930 - Lim; Jong Heun ;   et al. | 2008-05-29 |
Chemical mechanical polishing (CMP) slurries and CMP methods using and making the same App 20060124594 - Lim; Jong-heun ;   et al. | 2006-06-15 |