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Organometallic precursors, methods of forming a layer using the same and methods of manufacturing semiconductor devices using the same
Grant 11,062,940 - Sun , et al. July 13, 2 | 2021-07-13 |
Lanthanum compound and methods of forming thin film and integrated circuit device using the lanthanum compound
Grant 10,913,754 - Park , et al. February 9, 2 | 2021-02-09 |
Method of forming tin-containing material film and method of synthesizing a tin compound
Grant 10,882,873 - Ryu , et al. January 5, 2 | 2021-01-05 |
Method of forming a thin film
Grant 10,752,645 - Park , et al. A | 2020-08-25 |
Tantalum compound
Grant 10,651,031 - Ryu , et al. | 2020-05-12 |
Method of forming thin film and method of manufacturing integrated circuit device using the same
Grant 10,600,643 - Park , et al. | 2020-03-24 |
Method of fabricating semiconductor device
Grant 10,468,264 - Lim , et al. No | 2019-11-05 |
Organometallic Precursors, Methods Of Forming A Layer Using The Same And Methods Of Manufacturing Semiconductor Devices Using Th
App 20190304835 - Sun; Chang-Woo ; et al. | 2019-10-03 |
Method Of Forming A Thin Film
App 20190292207 - PARK; Gyu-hee ; et al. | 2019-09-26 |
Organometallic precursors, methods of forming a layer using the same and methods of manufacturing semiconductor devices using the same
Grant 10,361,118 - Sun , et al. | 2019-07-23 |
Lanthanum compound, method of synthesizing lanthanum compound, lanthanum precursor composition, method of forming thin film, and method of manufacturing integrated circuit device
Grant 10,329,312 - Park , et al. | 2019-06-25 |
Lanthanum Compound And Methods Of Forming Thin Film And Integrated Circuit Device Using The Lanthanum Compound
App 20190152996 - PARK; Gyu-hee ; et al. | 2019-05-23 |
Method Of Forming Tin-containing Material Film And Method Of Synthesizing A Tin Compound
App 20190144472 - RYU; Seung-min ; et al. | 2019-05-16 |
Methods of forming thin film and fabricating integrated circuit device using niobium compound
Grant 10,259,836 - Lim , et al. | 2019-04-16 |
Aluminum compound and methods of forming thin film and fabricating integrated circuit device by using the same
Grant 10,242,877 - Park , et al. | 2019-03-26 |
Tantalum Compound
App 20190074175 - RYU; Seung-min ; et al. | 2019-03-07 |
Aluminum compound, method of forming thin film by using the same, and method of fabricating integrated circuit device
Grant 10,224,200 - Park , et al. | 2019-03-05 |
Method Of Forming Thin Film And Method Of Manufacturing Integrated Circuit Device Using The Same
App 20180342391 - PARK; Gyu-hee ; et al. | 2018-11-29 |
Tantalum compound and methods of forming thin film and fabricating integrated circuit device by using the same
Grant 10,134,582 - Ryu , et al. November 20, 2 | 2018-11-20 |
Tin Compound, Method Of Synthesizing The Same, Tin Precursor Compound For Atomic Layer Deposition, And Method Of Forming Tin-containing Material Film
App 20180155372 - RYU; Seung-min ; et al. | 2018-06-07 |
Organometallic Precursors, Methods Of Forming A Layer Using The Same And Methods Of Manufacturing Semiconductor Devices Using The Same
App 20180102284 - Sun; Chang-Woo ; et al. | 2018-04-12 |
Aluminum Compound, Method Of Forming Thin Film By Using The Same, And Method Of Fabricating Integrated Circuit Device
App 20180076024 - PARK; Gyu-hee ; et al. | 2018-03-15 |
Aluminum Compound And Methods Of Forming Thin Film And Fabricating Integrated Circuit Device By Using The Same
App 20180019135 - PARK; Gyu-hee ; et al. | 2018-01-18 |
Method Of Fabricating Semiconductor Device
App 20180005836 - LIM; JAE SOON ; et al. | 2018-01-04 |
Tantalum Compound And Methods Of Forming Thin Film And Fabricating Integrated Circuit Device By Using The Same
App 20170178961 - RYU; Seung-min ; et al. | 2017-06-22 |
Methods of forming dielectric layers and methods of manufacturing semiconductor devices using the same
Grant 9,685,498 - Kang , et al. June 20, 2 | 2017-06-20 |
Methods Of Forming Thin Film And Fabricating Integrated Circuit Device Using Niobium Compound
App 20170152277 - LIM; Jae-soon ; et al. | 2017-06-01 |
Lanthanum Compound, Method Of Synthesizing Lanthanum Compound, Lanthanum Precursor Composition, Method Of Forming Thin Film, And Method Of Manufacturing Integrated Circuit Device
App 20170008914 - PARK; Gyu-hee ; et al. | 2017-01-12 |
Methods Of Forming Dielectric Layers And Methods Of Manufacturing Semiconductor Devices Using The Same
App 20160315137 - KANG; SANG-YEOL ; et al. | 2016-10-27 |
Method of fabricating semiconductor device
Grant 9,349,583 - Park , et al. May 24, 2 | 2016-05-24 |
Semiconductor Device And Method For Fabricating The Same
App 20150091133 - Cho; Kyu-Ho ; et al. | 2015-04-02 |
Method Of Fabricating Semiconductor Device Having Dielectric Layer With Improved Electrical Characteristics
App 20150031186 - KIM; Youn-soo ; et al. | 2015-01-29 |
Method of fabricating semiconductor device having dielectric layer with improved electrical characteristics
Grant 8,859,383 - Kim , et al. October 14, 2 | 2014-10-14 |
ALD method of forming thin film comprising a metal
Grant 8,685,494 - Lim , et al. April 1, 2 | 2014-04-01 |
Method of Fabricating Semiconductor Device
App 20130244445 - Park; Min-Young ; et al. | 2013-09-19 |
Methods Of Forming Dielectric Layers And Methods Of Manufacturing Semiconductor Devices Using The Same
App 20120225548 - KANG; SANG-YEOL ; et al. | 2012-09-06 |
Method Of Fabricating Semiconductor Device Having Dielectric Layer With Improved Electrical Characteristics
App 20120178254 - KIM; Youn-soo ; et al. | 2012-07-12 |
Method Of Forming Metal Thin Film
App 20120094022 - Lim; Jae-Soon ; et al. | 2012-04-19 |
Semiconductor Device, Method Of Fabricating The Same, Semiconductor Module, Electronic Circuit Board, And Electronic System Including The Device
App 20110151639 - Lim; Jae-Soon ; et al. | 2011-06-23 |
Semiconductor device, method of fabricating the same, and semicondutor module, electronic circuit board, and electronic system including the device
App 20110136317 - Kang; Sang-Yeol ; et al. | 2011-06-09 |
Multilayer Structure, Capacitor Including The Multilayer Structure And Method Of Forming The Same
App 20110102968 - CHOI; Jae-Hyoung ; et al. | 2011-05-05 |
Semiconductor Structures Including Dielectric Layers and Capacitors Including Semiconductor Structures
App 20110095397 - Chung; Suk-jin ; et al. | 2011-04-28 |
Semiconductor device having dielectric layer with improved electrical characteristics and associated methods
App 20100200950 - Kim; Youn-soo ; et al. | 2010-08-12 |
Methods Of Fabricating Capacitors Including Low-temperature Capping Layers
App 20100196592 - Kim; Wan-Don ; et al. | 2010-08-05 |
Organometallic compounds and methods of forming thin films including the use of the same
Grant 7,722,926 - Cho , et al. May 25, 2 | 2010-05-25 |
Trench capacitors with insulating layer collars in undercut regions
Grant 7,531,861 - Chung , et al. May 12, 2 | 2009-05-12 |
Methods for Operating Liquid Chemical Delivery Systems Having Recycling Elements
App 20090050210 - Choi; Han-Mei ; et al. | 2009-02-26 |
Method Of Forming High Dielectric Film Using Atomic Layer Deposition And Method Of Manufacturing Capacitor Having The High Dielectric Film
App 20080268653 - KIM; Kyoung-seok ; et al. | 2008-10-30 |
Methods of manufacturing a thin film including zirconium titanium oxide and methods of manufacturing a gate structure, a capacitor and a flash memory device including the same
Grant 7,432,183 - Lim , et al. October 7, 2 | 2008-10-07 |
Method of forming high dielectric film using atomic layer deposition and method of manufacturing capacitor having the high dielectric film
Grant 7,396,719 - Kim , et al. July 8, 2 | 2008-07-08 |
Trench Capacitors With Insulating Layer Collars In Undercut Regions
App 20080135876 - Chung; Suk-jin ; et al. | 2008-06-12 |
Methods of forming a capacitor using an atomic layer deposition process
Grant 7,361,548 - Lim , et al. April 22, 2 | 2008-04-22 |
Methods of fabricating trench capacitors with insulating layer collars in undercut regions
Grant 7,354,821 - Chung , et al. April 8, 2 | 2008-04-08 |
Methods of forming low leakage currents metal-insulator-metal (MIM) capacitors and related MIM capacitors
Grant 7,271,055 - Lee , et al. September 18, 2 | 2007-09-18 |
Electronic devices including dielectric layers with different densities of titanium
App 20070040207 - Nam; Gab-jin ; et al. | 2007-02-22 |
Organometallic Precursors And Methods Of Forming Thin Films Including The Use Of The Same
App 20070031597 - Cho; Kyu-Ho ; et al. | 2007-02-08 |
Methods of forming electronic devices including dielectric layers with different densities of titanium
Grant 7,144,771 - Nam , et al. December 5, 2 | 2006-12-05 |
Methods of forming a multi-layered structure using an atomic layer deposition process and methods of forming a capacitor of an integrated circuit device
Grant 7,135,422 - Nam , et al. November 14, 2 | 2006-11-14 |
Methods of manufacturing a thin film including zirconium titanium oxide and methods of manufacturing a gate structure, a capacitor and a flash memory device including the same
App 20060134849 - Lim; Jae-Soon ; et al. | 2006-06-22 |
Multi-layer film for thin film structure, capacitor using the same and fabrication method thereof
Grant 7,052,918 - Lim , et al. May 30, 2 | 2006-05-30 |
Methods of forming integrated circuit devices with metal-insulator-metal capacitors
App 20060060907 - Kim; Ki-Chul ; et al. | 2006-03-23 |
Methods of forming low leakage currents metal-insulator-metal (MIM) capacitors and related MIM capacitors
App 20060040457 - Lee; Kwang-Hee ; et al. | 2006-02-23 |
Integrated circuit devices with metal-insulator-metal capacitors
Grant 6,992,346 - Kim , et al. January 31, 2 | 2006-01-31 |
Trench capacitors with insulating layer collars in undercut regions and method of fabricating the same
App 20050212026 - Chung, Suk-jin ; et al. | 2005-09-29 |
Methods of forming a capacitor using an atomic layer deposition process
App 20050208718 - Lim, Jae-Soon ; et al. | 2005-09-22 |
Liquid chemical delivery system with recycling element and associated methods
App 20050031495 - Choi, Han-Mei ; et al. | 2005-02-10 |
Methods of forming a multi-layered structure using an atomic layer deposition process and methods of forming a capacitor of an integrated circuit device
App 20050009369 - Nam, Gab-Jin ; et al. | 2005-01-13 |
Integrated circuit devices with metal-insulator-metal capacitors and methods of forming the same
App 20040262661 - Kim, Ki-Chul ; et al. | 2004-12-30 |
Method of forming high dielectric film using atomic layer deposition and method of manufacturing capacitor having the high dielectric film
App 20040266217 - Kim, Kyoung-seok ; et al. | 2004-12-30 |
Methods for forming a capacitor on an integrated circuit device at reduced temperatures
App 20040166627 - Lim, Jae-Soon ; et al. | 2004-08-26 |
Methods of forming electronic devices including dielectric layers with different densities of titanium and related structures
App 20040075130 - Nam, Gab-Jin ; et al. | 2004-04-22 |
Multi-layer film for thin film structure, capacitor using the same and fabrication method thereof
App 20030207529 - Lim, Jae-Soon ; et al. | 2003-11-06 |
Method for manufacturing capacitor of semiconductor device having improved leakage current characteristics
Grant 6,599,807 - Lim , et al. July 29, 2 | 2003-07-29 |
Method of forming thin film using atomic layer deposition method
Grant 6,576,053 - Kim , et al. June 10, 2 | 2003-06-10 |
Method for manufacturing capacitor of semiconductor device having improved leakage current characteristics
App 20030036239 - Lim, Jae-soon ; et al. | 2003-02-20 |
Semiconductor device and method for manufacturing the same
App 20020195683 - Kim, Yeong-kwan ; et al. | 2002-12-26 |
Methods of manufacturing integrated circuit capacitors having hemispherical grain electrodes
Grant 6,448,146 - Lee , et al. September 10, 2 | 2002-09-10 |
Methods of manufacturing integrated circuit capacitors having hemispherical grain electrodes
App 20020068412 - Lee, Seung-Hwan ; et al. | 2002-06-06 |
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