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Patent applications and USPTO patent grants for Lim; Hongtaek.The latest application filed is for "edge ring, substrate processing apparatus having the same and method of manufacturing semiconductor device using the apparatus".
Patent | Date |
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Edge Ring, Substrate Processing Apparatus Having The Same And Method Of Manufacturing Semiconductor Device Using The Apparatus App 20210202217 - Lim; Hongtaek ;   et al. | 2021-07-01 |
Vacuum Chuck, Substrate Processing Apparatus Including The Same And Related Method Of Manufacture App 20210074574 - Ji; Byounghoon ;   et al. | 2021-03-11 |
Gas mixer and semiconductor device fabricating apparatuses including the same Grant 10,468,234 - Lim , et al. No | 2019-11-05 |
Gas Mixer And Semiconductor Device Fabricating Apparatuses Including The Same App 20170084471 - LIM; Hongtaek ;   et al. | 2017-03-23 |
Semiconductor Processing Apparatus Having Gas Spray Unit App 20160194756 - LIM; Hongtaek ;   et al. | 2016-07-07 |
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