Lim; Hong Joo
Patent Applications and Registrations
Patent applications and USPTO patent grants for Lim; Hong Joo.The latest application filed is for "shower head and method of fabricating the same".
- Lim; Hong Joo - Pyungtaek KR
- Lim; Hong Joo - Pyungtaek-city KR
- Lim, Hong Joo - Kyungki-do KR
- Lim, Hong-Joo - Suwon-si KR
| Patent | Date |
|---|---|
| Method of depositing thin film using hafnium compound Grant 7,163,719 - Park , et al. January 16, 2 | 2007-01-16 |
| Shower head and method of fabricating the same App 20060201428 - Park; Young Hoon ; et al. | 2006-09-14 |
| Apparatus for depositing thin film on wafer App 20060096534 - Lim; Hong Joo ; et al. | 2006-05-11 |
| Apparatus and method for depositing thin film on wafer using remote plasma App 20050223982 - Park, Young Hoon ; et al. | 2005-10-13 |
| Reactor for thin film deposition and method for depositing thin film on wafer using the reactor App 20050158469 - Park, Young Hoon ; et al. | 2005-07-21 |
| Thin film deposition reactor Grant 6,884,297 - Park , et al. April 26, 2 | 2005-04-26 |
| Method of depositing thin film on wafer App 20050003088 - Park, Young Hoon ; et al. | 2005-01-06 |
| Method of cleaning a deposition chamber and apparatus for depositing a metal on a substrate App 20040222188 - Kim, Woo-Seok ; et al. | 2004-11-11 |
| Thin film deposition reactor App 20040187779 - Park, Young Hoon ; et al. | 2004-09-30 |
| Thin film deposition reactor App 20040187780 - Park, Young Hoon ; et al. | 2004-09-30 |
| Reactor for thin film deposition and method for depositing thin film on wafer using the reactor App 20040191413 - Park, Young Hoon ; et al. | 2004-09-30 |
| Method of depositing ALD thin films on wafer App 20040180553 - Park, Young Hoon ; et al. | 2004-09-16 |
| Reaction chamber for depositing thin film App 20040149212 - Cho, Byung Chul ; et al. | 2004-08-05 |
| Method of depositing thin film using hafnium compound App 20040105935 - Park, Young Hoon ; et al. | 2004-06-03 |
| Method of depositing thin film using aluminum oxide App 20040101622 - Park, Young Hoon ; et al. | 2004-05-27 |
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