| Patent | Date |
|---|
Thermal Atomic Layer Etch With Rapid Temperature Cycling
App 20220293431 - Panagopoulos; Theodoros ; et al. | 2022-09-15 |
Thermal atomic layer etch with rapid temperature cycling
Grant 11,380,556 - Panagopoulos , et al. July 5, 2 | 2022-07-05 |
Turbomolecular Pump And Cathode Assembly For Etching Reactor
App 20220186734 - Lill; Thorsten ; et al. | 2022-06-16 |
High Density, Controlled Integrated Circuits Factory
App 20220171370 - LILL; Thorsten ; et al. | 2022-06-02 |
Plasma Etch Tool For High Aspect Ratio Etching
App 20220165546 - Lill; Thorsten ; et al. | 2022-05-26 |
Ion Beam Etching With Sidewall Cleaning
App 20220131071 - Lill; Thorsten ; et al. | 2022-04-28 |
Conformal Damage-free Encapsulation Of Chalcogenide Materials
App 20220115592 - Sims; James Samuel ; et al. | 2022-04-14 |
Ion beam etching utilizing cryogenic wafer temperatures
Grant 11,289,306 - Lill , et al. March 29, 2 | 2022-03-29 |
Resistive Random Access Memory With Preformed Filaments
App 20220069218 - YOON; Hyungsuk ; et al. | 2022-03-03 |
Conformal damage-free encapsulation of chalcogenide materials
Grant 11,239,420 - Sims , et al. February 1, 2 | 2022-02-01 |
Self-aligned Vertical Integration Of Three-terminal Memory Devices
App 20210391355 - LILL; Thorsten ; et al. | 2021-12-16 |
Internal plasma grid for semiconductor fabrication
Grant 11,171,021 - Singh , et al. November 9, 2 | 2021-11-09 |
Electron Excitation Atomic Layer Etch
App 20210280433 - Berry, III; Ivan L. ; et al. | 2021-09-09 |
Ion injector and lens system for ion beam milling
Grant 11,062,920 - Berry, III , et al. July 13, 2 | 2021-07-13 |
Method and apparatus for determining process rate
Grant 11,056,322 - Kabouzi , et al. July 6, 2 | 2021-07-06 |
Ion beam etch without need for wafer tilt or rotation
Grant 10,998,167 - Berry, III , et al. May 4, 2 | 2021-05-04 |
Thermal Atomic Layer Etch With Rapid Temperature Cycling
App 20210104414 - Panagopoulos; Theo ; et al. | 2021-04-08 |
Ion beam etch without need for wafer tilt or rotation
Grant 10,825,652 - Berry, III , et al. November 3, 2 | 2020-11-03 |
Active showerhead
Grant 10,804,079 - Gregor , et al. October 13, 2 | 2020-10-13 |
Atomic Layer Etching Methods And Apparatus
App 20200312670 - Smith; David ; et al. | 2020-10-01 |
Atomic layer etching using a combination of plasma and vapor treatments
Grant 10,784,118 - Fischer , et al. Sept | 2020-09-22 |
Cobalt etch back
Grant 10,784,086 - Yang , et al. Sept | 2020-09-22 |
Dry plasma etch method to pattern MRAM stack
Grant 10,749,103 - Tan , et al. A | 2020-08-18 |
Atomic layer etching 3D structures: Si and SiGe and Ge smoothness on horizontal and vertical surfaces
Grant 10,727,073 - Tan , et al. | 2020-07-28 |
Atomic layer etching methods and apparatus
Grant 10,692,724 - Smith , et al. | 2020-06-23 |
Integrating Atomic Scale Processes: Ald (atomic Layer Deposition) And Ale (atomic Layer Etch)
App 20200161139 - Kanarik; Keren Jacobs ; et al. | 2020-05-21 |
Differentially pumped reactive gas injector
Grant 10,580,628 - Berry, III , et al. | 2020-03-03 |
Conformal Damage-free Encapsulation Of Chalcogenide Materials
App 20200066987 - Sims; James Samuel ; et al. | 2020-02-27 |
Control of directionality in atomic layer etching
Grant 10,559,475 - Fischer , et al. Feb | 2020-02-11 |
Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)
Grant 10,515,816 - Kanarik , et al. Dec | 2019-12-24 |
Active Showerhead
App 20190371573 - Gregor; Mariusch ; et al. | 2019-12-05 |
Component of a plasma processing apparatus having a protective in situ formed layer on a plasma exposed surface
Grant 10,497,544 - Singh , et al. De | 2019-12-03 |
Use of ion beam etching to generate gate-all-around structure
Grant 10,483,085 - Berry, III , et al. Nov | 2019-11-19 |
Predicting Etch Characteristics In Thermal Etching And Atomic Layer Etching
App 20190340316 - Lill; Thorsten ; et al. | 2019-11-07 |
Dry Plasma Etch Method To Pattern Mram Stack
App 20190312194 - Tan; Samantha ; et al. | 2019-10-10 |
Controlling ion energy within a plasma chamber
Grant 10,424,461 - Lill , et al. Sept | 2019-09-24 |
Active showerhead
Grant 10,403,476 - Gregor , et al. Sep | 2019-09-03 |
Dry plasma etch method to pattern MRAM stack
Grant 10,374,144 - Tan , et al. | 2019-08-06 |
Ion Beam Etch Without Need For Wafer Tilt Or Rotation
App 20190237298 - Berry, III; Ivan L. ; et al. | 2019-08-01 |
Ceramic article with reduced surface defect density
Grant 10,336,656 - Duan , et al. | 2019-07-02 |
Atomic Layer Etching Using A Combination Of Plasma And Vapor Treatments
App 20190198345 - Fischer; Andreas ; et al. | 2019-06-27 |
Ale smoothness: in and outside semiconductor industry
Grant 10,304,659 - Kanarik , et al. | 2019-05-28 |
Control Of Directionality In Atomic Layer Etching
App 20190157105 - Fischer; Andreas ; et al. | 2019-05-23 |
Integrating Atomic Scale Processes: Ald (atomic Layer Deposition) And Ale (atomic Layer Etch)
App 20190139778 - Kanarik; Keren Jacobs ; et al. | 2019-05-09 |
Atomic layer etching of AL.sub.2O.sub.3 using a combination of plasma and vapor treatments
Grant 10,256,108 - Fischer , et al. | 2019-04-09 |
Controlling Ion Energy Within A Plasma Chamber
App 20190103253 - Lill; Thorsten ; et al. | 2019-04-04 |
Wet-dry integrated wafer processing system
Grant 10,249,521 - Lill , et al. | 2019-04-02 |
High aspect ratio etch of oxide metal oxide metal stack
Grant 10,242,883 - Guha , et al. | 2019-03-26 |
Control of directionality in atomic layer etching
Grant 10,229,837 - Fischer , et al. | 2019-03-12 |
Internal plasma grid for semiconductor fabrication
Grant 10,224,221 - Singh , et al. | 2019-03-05 |
Integrating atomic scale processes: ALD (atomic layer deposition) and ale (atomic layer etch)
Grant 10,186,426 - Kanarik , et al. Ja | 2019-01-22 |
High Aspect Ratio Etch Of Oxide Metal Oxide Metal Stack
App 20180374712 - GUHA; Joydeep ; et al. | 2018-12-27 |
Control Of Directionality In Atomic Layer Etching
App 20180366343 - Fischer; Andreas ; et al. | 2018-12-20 |
Controlling ion energy within a plasma chamber
Grant 10,141,163 - Lill , et al. Nov | 2018-11-27 |
Atomic layer etching of tungsten and other metals
Grant 10,096,487 - Yang , et al. October 9, 2 | 2018-10-09 |
Control Of Directionality In Atomic Layer Etching
App 20180247832 - Fischer; Andreas ; et al. | 2018-08-30 |
Systems And Methods For Patterning Of High Density Standalone Mram Devices
App 20180233662 - Berry, III; Ivan L. ; et al. | 2018-08-16 |
Ale Smoothness: In And Outside Semiconductor Industry
App 20180233325 - Kanarik; Keren Jacobs ; et al. | 2018-08-16 |
Chamber For Patterning Non-volatile Metals
App 20180204738 - Shen; Meihua ; et al. | 2018-07-19 |
Atomic Layer Etching Methods And Apparatus
App 20180182634 - Smith; David ; et al. | 2018-06-28 |
Ion Injector And Lens System For Ion Beam Milling
App 20180166304 - Berry, III; Ivan L. ; et al. | 2018-06-14 |
ALE smoothness: in and outside semiconductor industry
Grant 9,984,858 - Kanarik , et al. May 29, 2 | 2018-05-29 |
Active Showerhead
App 20180130640 - Gregor; Mariusch ; et al. | 2018-05-10 |
Chamber for patterning non-volatile metals
Grant 9,953,843 - Shen , et al. April 24, 2 | 2018-04-24 |
Cobalt Etch Back
App 20180102236 - Yang; Jialing ; et al. | 2018-04-12 |
Ion injector and lens system for ion beam milling
Grant 9,916,993 - Berry, III , et al. March 13, 2 | 2018-03-13 |
Differentially Pumped Reactive Gas Injector
App 20180047548 - Berry, III; Ivan L. ; et al. | 2018-02-15 |
Integrating Atomic Scale Processes: Ald (atomic Layer Deposition) And Ale (atomic Layer Etch)
App 20180033635 - Kanarik; Keren Jacobs ; et al. | 2018-02-01 |
Dry Plasma Etch Method To Pattern Mram Stack
App 20180019387 - Tan; Samantha ; et al. | 2018-01-18 |
Cobalt etch back
Grant 9,870,899 - Yang , et al. January 16, 2 | 2018-01-16 |
Ion Beam Etching Utilizing Cryogenic Wafer Temperatures
App 20170372911 - Lill; Thorsten ; et al. | 2017-12-28 |
Differentially pumped reactive gas injector
Grant 9,837,254 - Berry, III , et al. December 5, 2 | 2017-12-05 |
Method And Apparatus For Determining Process Rate
App 20170338160 - Kabouzi; Yassine ; et al. | 2017-11-23 |
Equipment front end module for transferring wafers and method of transferring wafers
Grant 9,818,633 - Lill , et al. November 14, 2 | 2017-11-14 |
Dry plasma etch method to pattern MRAM stack
Grant 9,806,252 - Tan , et al. October 31, 2 | 2017-10-31 |
Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)
Grant 9,805,941 - Kanarik , et al. October 31, 2 | 2017-10-31 |
Ion beam etching utilizing cryogenic wafer temperatures
Grant 9,779,955 - Lill , et al. October 3, 2 | 2017-10-03 |
Wet-dry Integrated Wafer Processing System
App 20170271180 - LILL; Thorsten ; et al. | 2017-09-21 |
Atomic Layer Etching Of Al203 Using A Combination Of Plasma And Vapor Treatments
App 20170256416 - Fischer; Andreas ; et al. | 2017-09-07 |
Ion Beam Etching Utilizing Cryogenic Wafer Temperatures
App 20170250087 - Lill; Thorsten ; et al. | 2017-08-31 |
Method and apparatus for determining process rate
Grant 9,735,069 - Kabouzi , et al. August 15, 2 | 2017-08-15 |
Chamber For Patterning Non-volatile Metals
App 20170229317 - Shen; Meihua ; et al. | 2017-08-10 |
Atomic Layer Etching 3d Structures: Si And Sige And Ge Smoothness On Horizontal And Vertical Surfaces
App 20170229314 - Tan; Samantha ; et al. | 2017-08-10 |
Adjustment Of Vuv Emission Of A Plasma Via Collisional Resonant Energy Transfer To An Energy Absorber Gas
App 20170170036 - Fischer; Andreas ; et al. | 2017-06-15 |
High aspect ratio etch with combination mask
Grant 9,659,783 - Guha , et al. May 23, 2 | 2017-05-23 |
Integrating Atomic Scale Processes: Ald (atomic Layer Deposition) And Ale (atomic Layer Etch)
App 20170117159 - Kanarik; Keren Jacobs ; et al. | 2017-04-27 |
Dielectric repair for emerging memory devices
Grant 9,627,608 - Draeger , et al. April 18, 2 | 2017-04-18 |
Adjustment of VUV emission of a plasma via collisional resonant energy transfer to an energy absorber gas
Grant 9,609,730 - Fischer , et al. March 28, 2 | 2017-03-28 |
Method And Apparatus For Determining Process Rate
App 20170084503 - Kabouzi; Yassine ; et al. | 2017-03-23 |
Residue free oxide etch
Grant 9,595,452 - Hsu , et al. March 14, 2 | 2017-03-14 |
Ale Smoothness: In And Outside Semiconductor Industry
App 20170069462 - Kanarik; Keren Jacobs ; et al. | 2017-03-09 |
Use Of Ion Beam Etching To Generate Gate-all-around Structure
App 20170062181 - Berry, III; Ivan L. ; et al. | 2017-03-02 |
Method for forming spacers for a transistor gate
Grant 9,583,339 - Posseme , et al. February 28, 2 | 2017-02-28 |
Atomic Layer Etching Of Tungsten And Other Metals
App 20170053810 - Yang; Wenbing ; et al. | 2017-02-23 |
Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)
Grant 9,576,811 - Kanarik , et al. February 21, 2 | 2017-02-21 |
Method to etch copper barrier film
Grant 9,570,320 - Shen , et al. February 14, 2 | 2017-02-14 |
Method for integrating germanides in high performance integrated circuits
Grant 9,553,031 - Besser , et al. January 24, 2 | 2017-01-24 |
Use of ion beam etching to generate gate-all-around structure
Grant 9,536,748 - Berry, III , et al. January 3, 2 | 2017-01-03 |
Controlling Ion Energy Within A Plasma Chamber
App 20160379804 - Lill; Thorsten ; et al. | 2016-12-29 |
Component Of A Plasma Processing Apparatus Having A Protective In Situ Formed Layer On A Plasma Exposed Surface
App 20160365228 - Singh; Harmeet ; et al. | 2016-12-15 |
Residue Free Oxide Etch
App 20160351418 - HSU; Chih-Hsun ; et al. | 2016-12-01 |
Cobalt Etch Back
App 20160314985 - Yang; Jialing ; et al. | 2016-10-27 |
Ion Injector And Lens System For Ion Beam Milling
App 20160307781 - Berry, III; Ivan L. ; et al. | 2016-10-20 |
Dry Plasma Etch Method To Pattern Mram Stack
App 20160308112 - Tan; Samantha ; et al. | 2016-10-20 |
Method For Forming Spacers For A Transistor Gate
App 20160300709 - POSSEME; Nicolas ; et al. | 2016-10-13 |
Controlling ion energy within a plasma chamber
Grant 9,460,894 - Lill , et al. October 4, 2 | 2016-10-04 |
Component of a plasma processing apparatus having a protective in situ formed layer on a plasma exposed surface
Grant 9,449,797 - Singh , et al. September 20, 2 | 2016-09-20 |
Isotropic atomic layer etch for silicon and germanium oxides
Grant 9,431,268 - Lill , et al. August 30, 2 | 2016-08-30 |
Ion injector and lens system for ion beam milling
Grant 9,406,535 - Berry, III , et al. August 2, 2 | 2016-08-02 |
Internal Plasma Grid For Semiconductor Fabrication
App 20160203990 - Singh; Harmeet ; et al. | 2016-07-14 |
Integrating Atomic Scale Processes: Ald (atomic Layer Deposition) And Ale (atomic Layer Etch)
App 20160203995 - Kanarik; Keren Jacobs ; et al. | 2016-07-14 |
Method to etch non-volatile metal materials
Grant 9,391,267 - Shen , et al. July 12, 2 | 2016-07-12 |
Isotropic Atomic Layer Etch For Silicon And Germanium Oxides
App 20160196984 - Lill; Thorsten ; et al. | 2016-07-07 |
Internal Plasma Grid For Semiconductor Fabrication
App 20160181130 - Singh; Harmeet ; et al. | 2016-06-23 |
Internal Plasma Grid For Semiconductor Fabrication
App 20160141188 - Singh; Harmeet ; et al. | 2016-05-19 |
Adjustment Of Vuv Emission Of A Plasma Via Collisional Resonant Energy Transfer To An Energy Absorber Gas
App 20160135274 - Fischer; Andreas ; et al. | 2016-05-12 |
Sulfur doped carbon hard masks
Grant 9,320,387 - Reddy , et al. April 26, 2 | 2016-04-26 |
Use Of Ion Beam Etching To Generate Gate-all-around Structure
App 20160111294 - Berry, III; Ivan L. ; et al. | 2016-04-21 |
Equipment Front End Module For Transferring Wafers And Method Of Transferring Wafers
App 20160111309 - Lill; Thorsten ; et al. | 2016-04-21 |
Novel Method To Etch Copper Barrier Film
App 20160104630 - SHEN; Meihua ; et al. | 2016-04-14 |
Movable Gas Nozzle In Drying Module
App 20160086864 - Fischer; Andreas ; et al. | 2016-03-24 |
Dielectric Repair For Emerging Memory Devices
App 20160079521 - Draeger; Nerissa ; et al. | 2016-03-17 |
Ion Beam Etch Without Need For Wafer Tilt Or Rotation
App 20160064232 - Berry, III; Ivan L. ; et al. | 2016-03-03 |
Ion Injector And Lens System For Ion Beam Milling
App 20160064260 - Berry, III; Ivan L. ; et al. | 2016-03-03 |
Differentially Pumped Reactive Gas Injector
App 20160049281 - Berry, III; Ivan L. ; et al. | 2016-02-18 |
Methods of forming silicon nitride spacers
Grant 9,257,293 - Posseme , et al. February 9, 2 | 2016-02-09 |
Method to etch non-volatile metal materials
Grant 9,257,638 - Tan , et al. February 9, 2 | 2016-02-09 |
Internal plasma grid for semiconductor fabrication
Grant 9,245,761 - Singh , et al. January 26, 2 | 2016-01-26 |
Method To Etch Non-volatile Metal Materials
App 20150340603 - SHEN; Meihua ; et al. | 2015-11-26 |
Method To Etch Non-volatile Metal Materials
App 20150280113 - TAN; Samantha S.H. ; et al. | 2015-10-01 |
Method To Etch Non-volatile Metal Materials
App 20150280114 - SHEN; Meihua ; et al. | 2015-10-01 |
Method to etch non-volatile metal materials
Grant 9,130,158 - Shen , et al. September 8, 2 | 2015-09-08 |
Ceramic Article With Reduced Surface Defect Density
App 20150218057 - Duan; Ren-Guan ; et al. | 2015-08-06 |
High Aspect Ratio Etch With Combination Mask
App 20150200106 - GUHA; Joydeep ; et al. | 2015-07-16 |
Ceramic article with reduced surface defect density and process for producing a ceramic article
Grant 9,034,199 - Duan , et al. May 19, 2 | 2015-05-19 |
High aspect ratio etch with combination mask
Grant 9,018,103 - Guha , et al. April 28, 2 | 2015-04-28 |
Sulfur Doped Carbon Hard Masks
App 20150093915 - Reddy; Sirish K. ; et al. | 2015-04-02 |
High Aspect Ratio Etch With Combination Mask
App 20150087154 - GUHA; Joydeep ; et al. | 2015-03-26 |
Controlling Ion Energy Within A Plasma Chamber
App 20150002018 - Lill; Thorsten ; et al. | 2015-01-01 |
Component Of A Plasma Processing Apparatus Having A Protective In Situ Formed Layer On A Plasma Exposed Surface
App 20140335698 - Singh; Harmeet ; et al. | 2014-11-13 |
Internal Plasma Grid For Semiconductor Fabrication
App 20140302681 - Paterson; Alex ; et al. | 2014-10-09 |
Internal Plasma Grid For Semiconductor Fabrication
App 20140302680 - Singh; Harmeet ; et al. | 2014-10-09 |
Methods Of Forming Silicon Nitride Spacers
App 20140273292 - POSSEME; NICOLAS ; et al. | 2014-09-18 |
Pulsed plasma with low wafer temperature for ultra thin layer etches
Grant 8,709,953 - Lill , et al. April 29, 2 | 2014-04-29 |
Ceramic Article With Reduced Surface Defect Density And Process For Producing A Ceramic Article
App 20130216783 - Duan; Ren-Guan ; et al. | 2013-08-22 |
Pulsed Plasma With Low Wafer Temperature For Ultra Thin Layer Etches
App 20130109190 - LILL; Thorsten ; et al. | 2013-05-02 |
Integrated method for removal of halogen residues from etched substrates in a processing system
Grant 7,846,845 - Bahng , et al. December 7, 2 | 2010-12-07 |
Etch pattern definition using a CVD organic layer as an anti-reflection coating and hardmask
App 20080197109 - Mui; David S. ; et al. | 2008-08-21 |
Integrated Method For Removal Of Halogen Residues From Etched Substrates In A Processing System
App 20080099040 - Bahng; Kenneth J. ; et al. | 2008-05-01 |
Methodology for in-situ and real-time chamber condition monitoring and process recovery during plasma processing
Grant 7,067,432 - Xu , et al. June 27, 2 | 2006-06-27 |
Novel methodology for in-situ and real-time chamber condition monitoring and process recovery during plasma processing
App 20040263827 - Xu, Songlin ; et al. | 2004-12-30 |
Method of micromachining a multi-part cavity
Grant 6,827,869 - Podlesnik , et al. December 7, 2 | 2004-12-07 |
Methods of forming polymer films and of using such polymer films to form structures on substrates
App 20040157466 - Xu, Songlin ; et al. | 2004-08-12 |
Methods of using polymer films to form micro-structures
App 20040157457 - Xu, Songlin ; et al. | 2004-08-12 |
Apparatus for plasma etching at a constant etch rate
Grant 6,660,127 - Nallan , et al. December 9, 2 | 2003-12-09 |
Channelled chamber surface for a semiconductor substrate processing chamber
Grant 6,656,283 - Lill December 2, 2 | 2003-12-02 |
Method and apparatus for monitoring and controlling wafer fabrication process
Grant 6,632,321 - Lill , et al. October 14, 2 | 2003-10-14 |
Method for in situ removal of a dielectric antireflective coating during a gate etch process
Grant 6,613,682 - Jain , et al. September 2, 2 | 2003-09-02 |
Method And Apparatus For Monitoring And Controlling Wafer Fabrication Process
App 20030029834 - LILL, THORSTEN ; et al. | 2003-02-13 |
Plasma reactor with dry clean apparatus and method
Grant 6,518,190 - Lill , et al. February 11, 2 | 2003-02-11 |
Method of micromachining a multi-part cavity
App 20020185469 - Podlesnik, Dragan ; et al. | 2002-12-12 |
Plasma etching at a constant etch rate
App 20020137352 - Nallan, Padmapani ; et al. | 2002-09-26 |
Etch pattern definition using a CVD organic layer as an anti-reflection coating and hardmask
App 20020086547 - Mui, David S. ; et al. | 2002-07-04 |
Method for controlling the shape of the etch front in the etching of polysilicon
Grant 6,284,665 - Lill , et al. September 4, 2 | 2001-09-04 |
Plasma density and etch rate enhancing semiconductor processing chamber
Grant 6,228,208 - Lill , et al. May 8, 2 | 2001-05-08 |
Process for control of the shape of the etch front in the etching of polysilicon
Grant 6,074,954 - Lill , et al. June 13, 2 | 2000-06-13 |
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