| Patent | Date |
|---|
Electrostatic filter providing reduced particle generation
Grant 11,437,215 - Likhanskii , et al. September 6, 2 | 2022-09-06 |
Shaped electrode
Grant D956,005 - Lindberg , et al. June 28, 2 | 2022-06-28 |
Electrodynamic Mass Analysis With Rf Biased Ion Source
App 20220139691 - Likhanskii; Alexandre ; et al. | 2022-05-05 |
Ion Source With Single-slot Tubular Cathode
App 20210383995 - Koo; Bon-Woong ; et al. | 2021-12-09 |
Ion source with single-slot tubular cathode
Grant 11,127,557 - Koo , et al. September 21, 2 | 2021-09-21 |
Ion Source With Single-slot Tubular Cathode
App 20210287872 - Koo; Bon-Woong ; et al. | 2021-09-16 |
Electrostatic Filter Providing Reduced Particle Generation
App 20210183609 - Likhanskii; Alexandre ; et al. | 2021-06-17 |
In-situ plasma cleaning of process chamber components
Grant 11,037,758 - Anglin , et al. June 15, 2 | 2021-06-15 |
Apparatus And Method For Controlling Ion Beam Using Electostatic Filter
App 20210159043 - Likhanskii; Alexandre ; et al. | 2021-05-27 |
High-current ion implanter and method for controlling ion beam using high-current ion implanter
Grant 11,011,343 - Likhanskii , et al. May 18, 2 | 2021-05-18 |
Ion Source With Biased Extraction Plate
App 20210134569 - Radovanov; Svetlana B. ; et al. | 2021-05-06 |
Electrostatic Filter With Shaped Electrodes
App 20210090845 - Lindberg; Robert C. ; et al. | 2021-03-25 |
Apparatus For Directional Processing
App 20210066023 - Likhanskii; Alexandre | 2021-03-04 |
Apparatus and method for controlling ion beam using electrostatic filter
Grant 10,937,624 - Likhanskii , et al. March 2, 2 | 2021-03-02 |
Ion source with biased extraction plate
Grant 10,923,306 - Radovanov , et al. February 16, 2 | 2021-02-16 |
High-current Ion Implanter And Method For Controlling Ion Beam Using High-current Ion Implanter
App 20210020399 - Likhanskii; Alexandre ; et al. | 2021-01-21 |
In-situ Plasma Cleaning Of Process Chamber Components
App 20210013001 - Anglin; Kevin ; et al. | 2021-01-14 |
Electrostatic filter and ion implanter having asymmetric electrostatic configuration
Grant 10,886,098 - Likhanskii , et al. January 5, 2 | 2021-01-05 |
Electostatic filter and method for controlling ion beam properties using electrostatic filter
Grant 10,804,068 - Likhanskii , et al. October 13, 2 | 2020-10-13 |
Electostatic filter and method for controlling ion beam using electostatic filter
Grant 10,790,116 - Likhanskii , et al. September 29, 2 | 2020-09-29 |
Ion Source With Biased Extraction Plate
App 20200294750 - Radovanov; Svetlana B. ; et al. | 2020-09-17 |
Apparatus, System And Techniques For Mass Analyzed Ion Beam
App 20200294755 - Sinclair; Frank ; et al. | 2020-09-17 |
Apparatus, system and techniques for mass analyzed ion beam
Grant 10,763,072 - Sinclair , et al. Sep | 2020-09-01 |
Extreme Edge Uniformity Control
App 20200243308 - Likhanskii; Alexandre ; et al. | 2020-07-30 |
Conductive beam optics for reducing particles in ion implanter
Grant 10,714,301 - Chang , et al. | 2020-07-14 |
Extreme edge uniformity control
Grant 10,665,433 - Likhanskii , et al. | 2020-05-26 |
Apparatus and method for controlling ion beam properties using electrostatic filter
Grant 10,665,415 - Likhanskii , et al. | 2020-05-26 |
Electostatic Filter And Method For Controlling Ion Beam Using Electostatic Filter
App 20200161089 - Likhanskii; Alexandre ; et al. | 2020-05-21 |
Apparatus And Method For Controlling Ion Beam Using Electostatic Filter
App 20200161078 - Likhanskii; Alexandre ; et al. | 2020-05-21 |
Electrostatic Filter And Ion Implanter Having Asymmetric Electrostatic Configuration
App 20200161077 - Likhanskii; Alexandre ; et al. | 2020-05-21 |
Electostatic Filter And Method For Controlling Ion Beam Properties Using Electrostatic Filter
App 20200161076 - Likhanskii; Alexandre ; et al. | 2020-05-21 |
Apparatus And Method For Controlling Ion Beam Properties Using Electrostatic Filter
App 20200144017 - Likhanskii; Alexandre ; et al. | 2020-05-07 |
In-situ Plasma Cleaning Of Process Chamber Components
App 20200126757 - Anglin; Kevin ; et al. | 2020-04-23 |
In-situ plasma cleaning of process chamber components
Grant 10,522,330 - Anglin , et al. Dec | 2019-12-31 |
Conductive beam optic containing internal heating element
Grant 10,504,682 - Chang , et al. Dec | 2019-12-10 |
RF clean system for electrostatic elements
Grant 10,410,844 - Anglin , et al. Sept | 2019-09-10 |
Conductive Beam Optic Containing Internal Heating Element
App 20190259560 - Chang; Shengwu ; et al. | 2019-08-22 |
High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture
Grant 10,290,462 - Koo , et al. | 2019-05-14 |
Radio frequency extraction system for charge neutralized ion beam
Grant 10,224,181 - Biloiu , et al. | 2019-03-05 |
Electrodynamic mass analysis
Grant 10,192,727 - Sinclair , et al. Ja | 2019-01-29 |
Electrodynamic Mass Analysis
App 20180286653 - Sinclair; Frank ; et al. | 2018-10-04 |
Apparatus and method for improved ion beam current
Grant 10,074,514 - Chang , et al. September 11, 2 | 2018-09-11 |
Ion mass separation using RF extraction
Grant 10,068,758 - Likhanskii September 4, 2 | 2018-09-04 |
Ion Mass Separation Using RF Extraction
App 20180218894 - Likhanskii; Alexandre | 2018-08-02 |
High Brightness Ion Beam Extraction
App 20180166250 - Koo; Bon-Woong ; et al. | 2018-06-14 |
Rf Clean System For Electrostatic Elements
App 20180166261 - Anglin; Kevin ; et al. | 2018-06-14 |
Apparatus and method for multilayer deposition
Grant 9,988,711 - Likhanskii , et al. June 5, 2 | 2018-06-05 |
Extreme Edge Uniformity Control
App 20180082824 - Likhanskii; Alexandre ; et al. | 2018-03-22 |
High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture
Grant 9,922,795 - Koo , et al. March 20, 2 | 2018-03-20 |
Radio Frequency Extraction System For Charge Neutralized Ion Beam
App 20170309453 - Biloiu; Costel ; et al. | 2017-10-26 |
Apparatus and method for in-situ cleaning in ion beam apparatus
Grant 9,761,410 - Likhanskii , et al. September 12, 2 | 2017-09-12 |
Apparatus And Method For In-situ Cleaning In Ion Beam Apparatus
App 20170221678 - Likhanskii; Alexandre ; et al. | 2017-08-03 |
Controlling contamination particle trajectory from a beam-line electrostatic element
Grant 9,721,750 - Lee , et al. August 1, 2 | 2017-08-01 |
Apparatus And Techniques For Time Modulated Extraction Of An Ion Beam
App 20170178866 - Radovanov; Svetlana B. ; et al. | 2017-06-22 |
Apparatus and method for contamination control in ion beam apparatus
Grant 9,685,298 - Likhanskii , et al. June 20, 2 | 2017-06-20 |
Uniformity control using adjustable internal antennas
Grant 9,613,777 - Likhanskii , et al. April 4, 2 | 2017-04-04 |
In-situ Plasma Cleaning Of Process Chamber Electrostatic Elements Having Varied Geometries
App 20170092473 - Lee; William Davis ; et al. | 2017-03-30 |
High Brightness Ion Beam Extraction
App 20170032927 - Koo; Bon-Woong ; et al. | 2017-02-02 |
Controlling Contamination Particle Trajectory From A Beam-line Electrostatic Element
App 20170032924 - Lee; William Davis ; et al. | 2017-02-02 |
In-situ Plasma Cleaning Of Process Chamber Components
App 20160365225 - Anglin; Kevin ; et al. | 2016-12-15 |
Ion beam uniformity control
Grant 9,520,259 - Likhanskii , et al. December 13, 2 | 2016-12-13 |
Apparatus And Method For Multilayer Deposition
App 20160333464 - Likhanskii; Alexandre ; et al. | 2016-11-17 |
Multi-aperture extraction system for angled ion beam
Grant 9,478,399 - Likhanskii , et al. October 25, 2 | 2016-10-25 |
Multi-aperture Extraction System For Angled Ion Beam
App 20160284520 - Likhanskii; Alexandre ; et al. | 2016-09-29 |
Ion Beam Uniformity Control
App 20160111241 - Likhanskii; Alexandre ; et al. | 2016-04-21 |
Uniformity Control using Adjustable Internal Antennas
App 20160079042 - Likhanskii; Alexandre ; et al. | 2016-03-17 |
Ion beam uniformity control
Grant 9,230,773 - Likhanskii , et al. January 5, 2 | 2016-01-05 |
Systems and methods for controlling flows with electrical pulses
Grant 7,744,039 - Miles , et al. June 29, 2 | 2010-06-29 |
Systems and methods for controlling flows with electrical pulses
App 20080023589 - Miles; Richard B. ; et al. | 2008-01-31 |
| 