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Patent applications and USPTO patent grants for Liesener; Jan.The latest application filed is for "interferometric encoder systems".
Patent | Date |
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Interferometric encoder systems having at least partially overlapping diffracted beams Grant 10,066,974 - Liesener September 4, 2 | 2018-09-04 |
Interferometric encoders using spectral analysis Grant 9,891,078 - Deck , et al. February 13, 2 | 2018-02-13 |
Measuring topography of aspheric and other non-flat surfaces Grant 9,798,130 - Dresel , et al. October 24, 2 | 2017-10-24 |
Double pass interferometric encoder system Grant 9,746,348 - de Groot , et al. August 29, 2 | 2017-08-29 |
Interferometer with real-time fringe-free imaging Grant 9,719,777 - Colonna de Lega , et al. August 1, 2 | 2017-08-01 |
Interferometric Encoder Systems App 20160102999 - Liesener; Jan | 2016-04-14 |
Interferometric Encoders Using Spectral Analysis App 20160011016 - Deck; Leslie L. ;   et al. | 2016-01-14 |
Compact encoder head for interferometric encoder system Grant 9,201,313 - Liesener December 1, 2 | 2015-12-01 |
Double Pass Interferometric Encoder System App 20150292913 - de Groot; Peter J. ;   et al. | 2015-10-15 |
Position monitoring system with reduced noise Grant 9,115,975 - Liesener , et al. August 25, 2 | 2015-08-25 |
Measuring Topography of Aspheric and Other Non-Flat Surfaces App 20150192769 - Dresel; Thomas ;   et al. | 2015-07-09 |
Double pass interferometric encoder system Grant 9,025,161 - de Groot , et al. May 5, 2 | 2015-05-05 |
Low coherence interferometry with scan error correction Grant 8,902,431 - Liesener , et al. December 2, 2 | 2014-12-02 |
Interferometric methods for metrology of surfaces, films and underresolved structures Grant 8,854,628 - Colonna de Lega , et al. October 7, 2 | 2014-10-07 |
Position Monitoring System With Reduced Noise App 20140098375 - Liesener; Jan ;   et al. | 2014-04-10 |
Low Coherence Interferometry With Scan Error Correction App 20130155413 - Liesener; Jan ;   et al. | 2013-06-20 |
Measurement of changes in surfaces of objects Grant 8,456,644 - Evans , et al. June 4, 2 | 2013-06-04 |
Compact Encoder Head For Interferometric Encoder System App 20130114062 - Liesener; Jan | 2013-05-09 |
Double Pass Interferometric Encoder System App 20130114061 - de Groot; Peter ;   et al. | 2013-05-09 |
Fiber-based interferometer system for monitoring an imaging interferometer Grant 8,379,218 - Deck , et al. February 19, 2 | 2013-02-19 |
Interferometric Metrology Of Surfaces, Films And Underresolved Structures App 20120224183 - Fay; Martin ;   et al. | 2012-09-06 |
Interferometer for overlay measurements Grant 8,248,617 - De Groot , et al. August 21, 2 | 2012-08-21 |
Interferometer for determining overlay errors Grant 8,189,202 - Liesener , et al. May 29, 2 | 2012-05-29 |
Data Interpolation Methods For Metrology Of Surfaces, Films And Underresolved Structures App 20120089365 - Fay; Martin ;   et al. | 2012-04-12 |
Interferometric Methods For Metrology Of Surfaces, Films And Underresolved Structures App 20120069326 - Colonna de Lega; Xavier M. ;   et al. | 2012-03-22 |
Interferometric systems and methods featuring spectral analysis of unevenly sampled data Grant 8,120,781 - Liesener , et al. February 21, 2 | 2012-02-21 |
Scan error correction in low coherence scanning interferometry Grant 8,004,688 - Davidson , et al. August 23, 2 | 2011-08-23 |
Compound reference interferometer Grant 7,978,338 - De Groot , et al. July 12, 2 | 2011-07-12 |
Measurement of Changes in Surfaces of Objects App 20110051147 - Evans; Christopher J. ;   et al. | 2011-03-03 |
Interferometer For Determining Overlay Errors App 20110032535 - Liesener; Jan ;   et al. | 2011-02-10 |
Interference objective for annular test surfaces Grant 7,751,064 - Liesener , et al. July 6, 2 | 2010-07-06 |
Scan Error Correction In Low Coherence Scanning Interferometry App 20100128280 - Davidson; Mark ;   et al. | 2010-05-27 |
Compound Reference Interferometer App 20100128276 - De Groot; Peter ;   et al. | 2010-05-27 |
Interferometric Systems And Methods Featuring Spectral Analysis Of Unevenly Sampled Data App 20100128283 - Liesener; Jan ;   et al. | 2010-05-27 |
Fiber-based Interferometer System For Monitoring An Imaging Interferometer App 20100128278 - Deck; Leslie L. ;   et al. | 2010-05-27 |
Interferometer For Overlay Measurements App 20090262362 - de Groot; Peter ;   et al. | 2009-10-22 |
Interference Objective For Annular Test Surfaces App 20090185195 - Liesener; Jan ;   et al. | 2009-07-23 |
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