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Patent applications and USPTO patent grants for Lichtenthaeler; Joerg.The latest application filed is for "method for producing an illumination system for an euv projection exposure system, and illumination system".
Patent | Date |
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Method for producing an illumination system for an EUV projection exposure system, and illumination system Grant 11,048,172 - Baier , et al. June 29, 2 | 2021-06-29 |
Method For Producing An Illumination System For An Euv Projection Exposure System, And Illumination System App 20200110340 - Baier; Juergen ;   et al. | 2020-04-09 |
Method for producing an illumination system for an EUV projection exposure system, and illumination system Grant 10,514,608 - Baier , et al. Dec | 2019-12-24 |
Method For Producing An Illumination System For An Euv Projection Exposure System, And Illumination System App 20180373158 - Baier; Juergen ;   et al. | 2018-12-27 |
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