Liao; Chi-Hung
Patent Applications and Registrations
Patent applications and USPTO patent grants for Liao; Chi-Hung.The latest application filed is for "method and apparatus for improving critical dimension variation".
Company Profile
60.76.105
- Liao; Chi-Hung - New Taipei TW
- LIAO; Chi-Hung - Sanchong TW
- Liao; Chi-Hung - Hsinchu TW
- Liao; Chi-Hung - New Taipei City TW
- Liao; Chi-Hung - Taipei County TW
- LIAO; Chi-Hung - Sanchong City TW
- Liao; Chi-Hung - Taipei City TW
- Liao; Chi-Hung - Taipei TW
- Liao; Chi-Hung - Tainan TW
- Liao; Chi-Hung - Taichung TW
- - Sanchong City TW
- Liao; Chi-Hung - Taichung City TW
- Liao; Chi-Hung - Taoyuan County TW
- Liao; Chi-Hung - Longtan Township Taoyuan County TW
- Liao; Chi-Hung - Tainan City TW
- Liao; Chi-Hung - Changlong TW
- Liao, Chi-Hung - Changlong City TW
Patent Activity
| Patent | Date |
|---|---|
| Mask for lithography process and method for manufacturing the same Grant 11,448,955 - Liao , et al. September 20, 2 | 2022-09-20 |
| Method And Apparatus For Improving Critical Dimension Variation App 20220283508 - LIN; Ming-Hsun ; et al. | 2022-09-08 |
| Radiation source supply system for lithographic tools Grant 11,435,669 - Liao , et al. September 6, 2 | 2022-09-06 |
| Substrate measuring device and a method of using the same Grant 11,409,200 - Wu , et al. August 9, 2 | 2022-08-09 |
| Substrate measuring device and a method of using the same Grant 11,409,201 - Wu , et al. August 9, 2 | 2022-08-09 |
| System and method for correcting non-ideal wafer topography Grant 11,367,644 - Lin , et al. June 21, 2 | 2022-06-21 |
| System And Method For Thermal Management Of Reticle In Semiconductor Manufacturing App 20220155697 - Yang; Yueh-Lin ; et al. | 2022-05-19 |
| Method And Apparatus For Controlling Droplet In Extreme Ultraviolet Light Source App 20220155690 - LIAO; Chi-Hung ; et al. | 2022-05-19 |
| Wafer table with dynamic support pins Grant 11,302,566 - Liao , et al. April 12, 2 | 2022-04-12 |
| System and method for lens heating control Grant 11,287,751 - Liao , et al. March 29, 2 | 2022-03-29 |
| Particle removal from wafer table and photomask Grant 11,269,261 - Wu , et al. March 8, 2 | 2022-03-08 |
| Apparatus and method for removing particles in semiconductor manufacturing Grant 11,256,181 - Yang , et al. February 22, 2 | 2022-02-22 |
| System and method for thermal management of reticle in semiconductor manufacturing Grant 11,243,478 - Yang , et al. February 8, 2 | 2022-02-08 |
| System And Method For Lens Heating Control App 20220035119 - LIAO; Chi-Hung ; et al. | 2022-02-03 |
| Method and apparatus for controlling droplet in extreme ultraviolet light source Grant 11,237,483 - Liao , et al. February 1, 2 | 2022-02-01 |
| Method of operating semiconductor apparatus and semiconductor apparatus Grant 11,229,111 - Shih , et al. January 18, 2 | 2022-01-18 |
| Lens control for lithography tools Grant 11,221,563 - Yang , et al. January 11, 2 | 2022-01-11 |
| Wafer table with dynamic support pins Grant 11,217,475 - Liao , et al. January 4, 2 | 2022-01-04 |
| Droplet Splash Control For Extreme Ultraviolet Photolithography App 20210389675 - SHIH; Po-Ming ; et al. | 2021-12-16 |
| Method And Apparatus For Controlling Droplet In Extreme Ultraviolet Light Source App 20210389680 - LIAO; Chi-Hung ; et al. | 2021-12-16 |
| Photomask Having Recessed Region App 20210382387 - CHEN; Yu-Yu ; et al. | 2021-12-09 |
| Photolithography Method and Photolithography System App 20210372946 - Liao; Chi-Hung ; et al. | 2021-12-02 |
| Photolithography apparatus and method for handling wafer Grant 11,187,997 - Shih , et al. November 30, 2 | 2021-11-30 |
| Substrate Measuring Device And A Method Of Using The Same App 20210341842 - WU; Min-Cheng ; et al. | 2021-11-04 |
| Substrate Measuring Device And A Method Of Using The Same App 20210341841 - WU; Min-Cheng ; et al. | 2021-11-04 |
| Substrate Table With Vacuum Channels Grid App 20210343575 - WU; Min-Cheng ; et al. | 2021-11-04 |
| Euv Photomask And Related Methods App 20210335599 - LIAO; Chi-Hung ; et al. | 2021-10-28 |
| Temperature Controlling Apparatus App 20210333714 - Liao; Chi-Hung ; et al. | 2021-10-28 |
| Cleaning Tool App 20210327743 - YANG; Yueh-Lin ; et al. | 2021-10-21 |
| Mask and method for forming the same Grant 11,137,675 - Liao , et al. October 5, 2 | 2021-10-05 |
| Method for providing deionized water with dynamic electrical resistivity Grant 11,130,107 - Liao , et al. September 28, 2 | 2021-09-28 |
| Method Of Fabricating Reticle App 20210263425 - CHUNG; Hsueh-Yi ; et al. | 2021-08-26 |
| Photolithography method and photolithography system Grant 11,099,139 - Liao , et al. August 24, 2 | 2021-08-24 |
| Photomask having recessed region Grant 11,099,478 - Chen , et al. August 24, 2 | 2021-08-24 |
| Substrate measuring device and a method of using the same Grant 11,092,892 - Wu , et al. August 17, 2 | 2021-08-17 |
| Radiation Source Supply System For Lithographic Tools App 20210240085 - LIAO; Chi-Hung ; et al. | 2021-08-05 |
| Substrate table with vacuum channels grid Grant 11,081,383 - Wu , et al. August 3, 2 | 2021-08-03 |
| Temperature controlling apparatus Grant 11,067,891 - Liao , et al. July 20, 2 | 2021-07-20 |
| Reticle Cleaning System App 20210216010 - CHENG; Wei-Chang ; et al. | 2021-07-15 |
| Cleaning Method And Apparatus App 20210217613 - WU; Min-Cheng ; et al. | 2021-07-15 |
| Apparatus And Methods For Exhaust Cleaning App 20210205861 - CHENG; Wei Chang ; et al. | 2021-07-08 |
| Tool and method for cleaning electrostatic chuck Grant 11,056,371 - Yang , et al. July 6, 2 | 2021-07-06 |
| Dispensing Nozzle Design and Dispensing Method Thereof App 20210200095 - Cheng; Wei Chang ; et al. | 2021-07-01 |
| Drainage for temperature and humidity controlling system Grant 11,035,619 - Cheng , et al. June 15, 2 | 2021-06-15 |
| Exhaust system and method of using Grant 11,022,018 - Cheng , et al. June 1, 2 | 2021-06-01 |
| Method for exposing wafer Grant 11,016,390 - Liao , et al. May 25, 2 | 2021-05-25 |
| Method of fabricating reticle Grant 11,003,091 - Chung , et al. May 11, 2 | 2021-05-11 |
| Radiation source supply system for lithographic tools Grant 11,003,087 - Liao , et al. May 11, 2 | 2021-05-11 |
| Apparatus and methods for exhaust cleaning Grant 10,987,706 - Cheng , et al. April 27, 2 | 2021-04-27 |
| Cleaning method and apparatus Grant 10,971,352 - Wu , et al. April 6, 2 | 2021-04-06 |
| Method Of Performing A Substrate Detection Process App 20210098273 - WU; Min-Cheng ; et al. | 2021-04-01 |
| Reticle cleaning system and method for using the same Grant 10,955,741 - Cheng , et al. March 23, 2 | 2021-03-23 |
| Dispensing nozzle design and dispensing method thereof Grant 10,948,824 - Cheng , et al. March 16, 2 | 2021-03-16 |
| Method Of Operating Semiconductor Apparatus And Semiconductor Apparatus App 20210076479 - SHIH; Po-Ming ; et al. | 2021-03-11 |
| Apparatus And Method For Removing Particles In Semiconductor Manufacturing App 20210033988 - Yang; Yueh-Lin ; et al. | 2021-02-04 |
| Lens Control For Lithography Tools App 20210033984 - YANG; Yueh Lin ; et al. | 2021-02-04 |
| Wafer Table with Dynamic Support Pins App 20210035848 - Liao; Chi-Hung ; et al. | 2021-02-04 |
| System And Method For Thermal Management Of Reticle In Semiconductor Manufacturing App 20210033987 - Yang; Yueh-Lin ; et al. | 2021-02-04 |
| Method Of Operating Drippage Prevention System App 20210016316 - WANG; Chien-Hung ; et al. | 2021-01-21 |
| Method For Exposing Wafer App 20200409268 - LIAO; Chi-Hung ; et al. | 2020-12-31 |
| Method for handling mask and lithography apparatus Grant 10,877,382 - Liao , et al. December 29, 2 | 2020-12-29 |
| Conductive fill Grant 10,879,114 - Wu , et al. December 29, 2 | 2020-12-29 |
| System And Method For Correcting Non-ideal Wafer Topography App 20200402828 - Lin; Cheng-Mu ; et al. | 2020-12-24 |
| Photolithography Apparatus And Method For Handling Wafer App 20200401049 - SHIH; Po-Ming ; et al. | 2020-12-24 |
| Conductive interconnect structures in integrated circuits Grant 10,872,815 - Wu , et al. December 22, 2 | 2020-12-22 |
| Substrate detecting system in a substrate storage container Grant 10,867,824 - Wu , et al. December 15, 2 | 2020-12-15 |
| Method of operating semiconductor apparatus and semiconductor apparatus Grant 10,849,214 - Shih , et al. November 24, 2 | 2020-11-24 |
| Lens control for lithography tools Grant 10,845,717 - Yang , et al. November 24, 2 | 2020-11-24 |
| Wafer table with dynamic support pins Grant 10,811,300 - Liao , et al. October 20, 2 | 2020-10-20 |
| Drippage prevention system and method of operating same Grant 10,792,697 - Wang , et al. October 6, 2 | 2020-10-06 |
| Particle Removal From Wafer Table And Photomask App 20200301292 - WU; Min-Cheng ; et al. | 2020-09-24 |
| Photolithography Method and Photolithography System App 20200292470 - Liao; Chi-Hung ; et al. | 2020-09-17 |
| Lithography system and method for exposing wafer Grant 10,775,700 - Liao , et al. Sept | 2020-09-15 |
| Lithography apparatus and method using the same Grant 10,775,706 - Liao , et al. September 15, 2 | 2020-09-15 |
| Power circuit, gate driver and related operation control method for multi-source display system Grant 10,777,121 - Liao , et al. Sept | 2020-09-15 |
| System and method for correcting non-ideal wafer topography Grant 10,770,327 - Lin , et al. Sep | 2020-09-08 |
| Photolithography apparatus and method and method for handling wafer Grant 10,768,534 - Shih , et al. Sep | 2020-09-08 |
| Wafer Table With Dynamic Support Pins App 20200273741 - Liao; Chi-Hung ; et al. | 2020-08-27 |
| Temperature Controlling Apparatus App 20200264510 - Liao; Chi-Hung ; et al. | 2020-08-20 |
| Conductive Interconnect Structures in Integrated Circuits App 20200258777 - A1 | 2020-08-13 |
| Injection molding method and mold mechanism Grant 10,710,287 - Tsai , et al. | 2020-07-14 |
| Lens Control For Lithography Tools App 20200209764 - YANG; Yueh Lin ; et al. | 2020-07-02 |
| Apparatus And Methods For Exhaust Cleaning App 20200197987 - CHENG; Wei Chang ; et al. | 2020-06-25 |
| Particle removal from wafer table and photomask Grant 10,678,146 - Wu , et al. | 2020-06-09 |
| Method for forming photoresist layer Grant 10,678,133 - Liao , et al. | 2020-06-09 |
| Photolithography method and photolithography system Grant 10,670,540 - Liao , et al. | 2020-06-02 |
| Method Of Fabricating Reticle App 20200150546 - CHUNG; Hsueh-Yi ; et al. | 2020-05-14 |
| Wafer table with dynamic support pins Grant 10,651,075 - Liao , et al. | 2020-05-12 |
| Conductive interconnect structures in integrated circuits Grant 10,636,702 - Wu , et al. | 2020-04-28 |
| Wafer Table with Dynamic Support Pins App 20200126839 - Liao; Chi-Hung ; et al. | 2020-04-23 |
| Lens control for lithography tools Grant 10,627,727 - Yang , et al. | 2020-04-21 |
| Radiation Source Supply System For Lithographic Tools App 20200117094 - Liao; Chi-Hung ; et al. | 2020-04-16 |
| Method For Forming Photoresist Layer App 20200117090 - Liao; Chi-Hung ; et al. | 2020-04-16 |
| Apparatus and methods for exhaust cleaning Grant 10,618,085 - Cheng , et al. | 2020-04-14 |
| Semiconductor apparatus and method of operating the same Grant 10,613,444 - Liao , et al. | 2020-04-07 |
| Mask For Lithography Process And Method For Manufacturing The Same App 20200103744 - LIAO; Chi-Hung ; et al. | 2020-04-02 |
| Lithography Apparatus And Method Using The Same App 20200103765 - LIAO; Chi-Hung ; et al. | 2020-04-02 |
| Conductive Interconnect Structures in Integrated Circuits App 20200105593 - Wu; Jung-Tang ; et al. | 2020-04-02 |
| Exhaust System And Method Of Using App 20200080463 - CHENG; Wei Chang ; et al. | 2020-03-12 |
| Semiconductor Apparatus And Method Of Operating The Same App 20200073248 - LIAO; Chi-Hung ; et al. | 2020-03-05 |
| Method For Providing Deionized Water With Dynamic Electrical Resistivity App 20200061559 - LIAO; Chi-Hung ; et al. | 2020-02-27 |
| Tool And Method For Cleaning Electrostatic Chuck App 20200058536 - YANG; Yueh-Lin ; et al. | 2020-02-20 |
| Reticle Cleaning System And Method For Using The Same App 20200057367 - CHENG; Wei-Chang ; et al. | 2020-02-20 |
| Method For Handling Mask And Lithography Apparatus App 20200057385 - LIAO; Ju-Wei ; et al. | 2020-02-20 |
| Photomask Having Recessed Region App 20200057366 - CHEN; Yu-Yu ; et al. | 2020-02-20 |
| Lithography System And Method For Exposing Wafer App 20200057372 - LIAO; Chi-Hung ; et al. | 2020-02-20 |
| Mask And Method For Forming The Same App 20200057365 - LIAO; Chi-Hung ; et al. | 2020-02-20 |
| Lithography System And Operation Method Thereof App 20200057364 - LIAO; Chi-Hung ; et al. | 2020-02-20 |
| Photolithography Apparatus And Method And Method For Handling Wafer App 20200057378 - SHIH; Po-Ming ; et al. | 2020-02-20 |
| Chemical Mechanical Polishing Method And Apparatus App 20200055160 - CHENG; Wei-Chang ; et al. | 2020-02-20 |
| Substrate Measuring Device And A Method Of Using The Same App 20200033730A1 - | 2020-01-30 |
| Particle Removal From Wafer Table And Photomask App 20200019072 - WU; Min-Cheng ; et al. | 2020-01-16 |
| Cleaning Method And Apparatus App 20200020521 - WU; Min-Cheng ; et al. | 2020-01-16 |
| Method of fabricating reticle Grant 10,534,272 - Chung , et al. Ja | 2020-01-14 |
| Dispensing Nozzle Design and Dispensing Method Thereof App 20200004153 - Cheng; Wei Chang ; et al. | 2020-01-02 |
| Photolithography Method and Photolithography System App 20200003701 - Liao; Chi-Hung ; et al. | 2020-01-02 |
| Wafer table with dynamic support pins Grant 10,522,385 - Liao , et al. Dec | 2019-12-31 |
| Method Of Operating Semiconductor Apparatus And Semiconductor Apparatus App 20190394865 - SHIH; Po-Ming ; et al. | 2019-12-26 |
| Radiation source supply system for lithographic tools Grant 10,514,607 - Liao , et al. Dec | 2019-12-24 |
| Lens Control For Lithography Tools App 20190384183 - YANG; Yueh Lin ; et al. | 2019-12-19 |
| Temperature controlling apparatus and method for forming coating layer Grant 10,509,321 - Liao , et al. Dec | 2019-12-17 |
| Substrate Detecting System In A Substrate Storage Container App 20190371638 - WU; Min-Cheng ; et al. | 2019-12-05 |
| Exhaust system and method of using Grant 10,473,021 - Cheng , et al. Nov | 2019-11-12 |
| System and method for providing deionized water with dynamic electrical resistivity Grant 10,464,032 - Liao , et al. No | 2019-11-05 |
| Temperature Controlling Apparatus And Method For Forming Coating Layer App 20190235384 - Liao; Chi-Hung ; et al. | 2019-08-01 |
| Substrate Table With Vacuum Channels Grid App 20190164803 - WU; Min-Cheng ; et al. | 2019-05-30 |
| Wafer Table with Dynamic Support Pins App 20190096735 - Liao; Chi-Hung ; et al. | 2019-03-28 |
| Wafer Table with Dynamic Support Pins App 20190096734 - Liao; Chi-Hung ; et al. | 2019-03-28 |
| System And Method For Correcting Non-ideal Wafer Topography App 20190035664 - Lin; Cheng-Mu ; et al. | 2019-01-31 |
| Substrate Support Apparatus And Method App 20190027392 - YANG; Yueh Lin ; et al. | 2019-01-24 |
| Method Of Fabricating Reticle App 20190004436 - CHUNG; Hsueh-Yi ; et al. | 2019-01-03 |
| Apparatus And Methods For Exhaust Cleaning App 20180345334 - Cheng; Wei Chang ; et al. | 2018-12-06 |
| Drippage Prevention System And Method Of Operating Same App 20180333738 - WANG; Chien-Hung ; et al. | 2018-11-22 |
| System And Method For Providing Deionized Water With Dynamic Electrical Resistivity App 20180304215 - LIAO; Chi-Hung ; et al. | 2018-10-25 |
| Exposure method of wafer substrate, manufacturing method of semiconductor device, and exposure tool Grant 10,073,354 - Chung , et al. September 11, 2 | 2018-09-11 |
| Drainage for Temperature Humidity Controlling System App 20180164839 - Cheng; Wei-Chang ; et al. | 2018-06-14 |
| Injection Molding Method And Mold Mechanism App 20180147760 - Tsai; Ray-Long ; et al. | 2018-05-31 |
| Exhaust System And Method Of Using App 20180149067 - CHENG; Wei Chang ; et al. | 2018-05-31 |
| System and method for defect analysis of a substrate Grant 9,734,572 - Tien , et al. August 15, 2 | 2017-08-15 |
| Method for preparing granulated inorganic adsorbent for radionuclides Grant 9,480,965 - Chuang , et al. November 1, 2 | 2016-11-01 |
| Method for granulation of absorbent and adsorbent granules prepared by the same Grant 9,409,147 - Chiang , et al. August 9, 2 | 2016-08-09 |
| Exposure Method Of Wafer Substrate, Manufacturing Method Of Semiconductor Device, And Exposure Tool App 20160124323 - CHUNG; Hsueh-Yi ; et al. | 2016-05-05 |
| Injection Molding Method And Mold Mechanism App 20160107347 - TSAI; Ray-Long ; et al. | 2016-04-21 |
| Method For Preparing Granulated Inorganic Adsorbent For Radionuclides App 20160067672 - CHUANG; LI-CHING ; et al. | 2016-03-10 |
| Method For Granulation Of Absorbent And Adsorbent Granules Prepared By The Same App 20150238932 - CHIANG; SHENG-WEI ; et al. | 2015-08-27 |
| System And Method For Defect Analysis Of A Substrate App 20150146968 - Tien; Yao-Wei ; et al. | 2015-05-28 |
| System and method for defect analysis of a substrate Grant 8,965,102 - Tien , et al. February 24, 2 | 2015-02-24 |
| Solar Cell Module App 20140332055 - Lin; Hui-Hsiung ; et al. | 2014-11-13 |
| Light mixing module Grant 8,870,431 - Lin , et al. October 28, 2 | 2014-10-28 |
| System And Method For Defect Analysis Of A Substrate App 20140133736 - Tien; Yan-Wei ; et al. | 2014-05-15 |
| Light Deflection Film App 20140049988 - Lin; Hui-Hsiung ; et al. | 2014-02-20 |
| Light uniformization structure and light emitting module Grant 8,545,062 - Lin , et al. October 1, 2 | 2013-10-01 |
| Solar Cell Module App 20130160817 - Lin; Hui-Hsiung ; et al. | 2013-06-27 |
| Light Mixing Module App 20120170282 - Lin; Hui-Hsiung ; et al. | 2012-07-05 |
| Color dividing optical device and image apparatus with the application Grant 8,189,260 - Lin , et al. May 29, 2 | 2012-05-29 |
| Phase shift photomask performance assurance method Grant 8,048,589 - Dai , et al. November 1, 2 | 2011-11-01 |
| System and method for photolithography in semiconductor manufacturing Grant 7,968,258 - Su , et al. June 28, 2 | 2011-06-28 |
| Light Uniformization Structure And Light Emitting Module App 20110134648 - Lin; Hui Hsiung ; et al. | 2011-06-09 |
| Method for preparing radioactive-substance adsorbent depositing on a carriable structure App 20110130274 - Wang; Shih-Han ; et al. | 2011-06-02 |
| Composite Optical Film And Flat Light Source Module App 20100232137 - Liao; Chi-Hung ; et al. | 2010-09-16 |
| Color Dividing Optical Device And Image Apparatus With The Application App 20100165464 - Lin; Hui-Hsiung ; et al. | 2010-07-01 |
| Vermiculite supported catalyst for CO preferential oxidation and the process of preparing the same Grant 7,541,311 - Chen , et al. June 2, 2 | 2009-06-02 |
| Vermiculite supported catalyst for CO preferential oxidation and the process of preparing the same App 20090062116 - CHEN; CHAO-YUH ; et al. | 2009-03-05 |
| Method to simplify twin stage scanner OVL machine matching Grant 7,333,173 - Chiang , et al. February 19, 2 | 2008-02-19 |
| Method to predict and identify defocus wafers Grant 7,301,604 - Lin , et al. November 27, 2 | 2007-11-27 |
| Organic Electro-luminescent Device App 20070046179 - Chang; Chan-Ching ; et al. | 2007-03-01 |
| Organic electro-luminescent device and material of hole-transport layer App 20070048547 - Chang; Chan-Ching ; et al. | 2007-03-01 |
| Phase shift photomask performance assurance method App 20070026320 - Dai; Yi-Ming ; et al. | 2007-02-01 |
| System and method for photolithography in semiconductor manufacturing App 20060257765 - Su; Wei-Yu ; et al. | 2006-11-16 |
| Method for reducing mask precipitation defects App 20060201848 - Lin; Ting-Yu ; et al. | 2006-09-14 |
| Apparatus and method for fabricating three-dimensional nano/micro structures App 20060158708 - Hocheng; Hong ; et al. | 2006-07-20 |
| Apparatus and method for fabricating nano/micro structure App 20060121641 - Hocheng; Hong ; et al. | 2006-06-08 |
| Method and apparatus for reducing spin-induced wafer charging App 20060000109 - Lin; Hua-Tai ; et al. | 2006-01-05 |
| Method of wafer height mapping Grant 6,975,407 - Wang , et al. December 13, 2 | 2005-12-13 |
| Method Of Wafer Height Mapping App 20050259272 - Wang, Chun-Sheng ; et al. | 2005-11-24 |
| Wafer aligner with WEE (water edge exposure) function App 20050248754 - Wang, Chun-Sheng ; et al. | 2005-11-10 |
| Novel method to simplify twin stage scanner OVL machine matching App 20050219484 - Chiang, S. J. ; et al. | 2005-10-06 |
| Method and system for reducing and monitoring precipitated defects on masking reticles App 20050191563 - Dai, Yi-Ming ; et al. | 2005-09-01 |
| Method to predict and identify defocus wafers App 20050185170 - Lin, Chun-Hung ; et al. | 2005-08-25 |
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