loadpatents
Patent applications and USPTO patent grants for Li; Wei-Min.The latest application filed is for "enhanced thin film deposition".
Patent | Date |
---|---|
Substrate loading in an ALD reactor Grant 11,280,001 - Kilpi , et al. March 22, 2 | 2022-03-22 |
Enhanced thin film deposition Grant 10,964,534 - Rahtu , et al. March 30, 2 | 2021-03-30 |
ALD method and apparatus Grant 10,619,241 - Malinen , et al. | 2020-04-14 |
Etch resistant alumina based coatings Grant 10,510,551 - Rantala , et al. Dec | 2019-12-17 |
Deposition reactor with plasma source Grant 10,494,718 - Kilpi , et al. De | 2019-12-03 |
Enhanced Thin Film Deposition App 20190267231 - Rahtu; Antti ;   et al. | 2019-08-29 |
Enhanced thin film deposition Grant 10,297,444 - Rahtu , et al. | 2019-05-21 |
Substrate Loading In An Ald Reactor App 20190048465 - Kilpi; Vaino ;   et al. | 2019-02-14 |
Substrate loading in an ALD reactor Grant 10,161,038 - Kilpi , et al. Dec | 2018-12-25 |
Optical imaging lens with a fixing structure Grant 9,989,725 - Fu , et al. June 5, 2 | 2018-06-05 |
Enhanced Thin Film Deposition App 20180130666 - Rahtu; Antti ;   et al. | 2018-05-10 |
Atomic Layer Deposition with Plasma Source App 20180099304 - Kilpi; Vaino ;   et al. | 2018-04-12 |
Atomic layer deposition with plasma source Grant 9,868,131 - Kilpi , et al. January 16, 2 | 2018-01-16 |
Ald Method And Apparatus App 20170342560 - MALINEN; Timo ;   et al. | 2017-11-30 |
Enhanced thin film deposition Grant 9,831,094 - Rahtu , et al. November 28, 2 | 2017-11-28 |
Etch Resistant Alumina Based Coatings App 20170200615 - Rantala; Juha T. ;   et al. | 2017-07-13 |
Atomic layer deposition of metal carbide films using aluminum hydrocarbon compounds Grant 9,631,272 - Li , et al. April 25, 2 | 2017-04-25 |
Atomic Layer Deposition Of Germanium Or Germanium Oxide App 20170069490 - LI; Wei-Min | 2017-03-09 |
Etch resistant alumina based coatings Grant 9,564,339 - Rantala , et al. February 7, 2 | 2017-02-07 |
Optical Imaging Lens With A Fixing Structure App 20170003472 - Fu; Wei-Wei ;   et al. | 2017-01-05 |
Enhanced Thin Film Deposition App 20160118262 - Rahtu; Antti ;   et al. | 2016-04-28 |
Atomic Layer Deposition with Plasma Source App 20150322569 - Kilpi; Vaino ;   et al. | 2015-11-12 |
Substrate Loading In An Ald Reactor App 20150299859 - KILPI; Vaino ;   et al. | 2015-10-22 |
Enhanced thin film deposition Grant 9,127,351 - Rahtu , et al. September 8, 2 | 2015-09-08 |
Atomic layer deposition with plasma source Grant 9,095,869 - Kilpi , et al. August 4, 2 | 2015-08-04 |
Enhanced thin film deposition Grant 8,993,055 - Rahtu , et al. March 31, 2 | 2015-03-31 |
Atomic Layer Deposition Of Metal Carbide Films Using Aluminum Hydrocarbon Compounds App 20140127405 - Li; Dong ;   et al. | 2014-05-08 |
Deposition Reactor With Plasma Source App 20140087093 - Kilpi; Vaino ;   et al. | 2014-03-27 |
Method and resulting capacitor structure for liquid crystal on silicon display devices Grant 8,681,283 - Li , et al. March 25, 2 | 2014-03-25 |
Atomic Layer Deposition with Plasma Source App 20140024223 - Kilpi; Vaino ;   et al. | 2014-01-23 |
Enhanced Thin Film Deposition App 20130183445 - Rahtu; Antti ;   et al. | 2013-07-18 |
Etch Resistant Alumina Based Coatings App 20130143408 - Rantala; Juha T ;   et al. | 2013-06-06 |
Method and structure for top metal formation of liquid crystal on silicon devices Grant 8,339,553 - Huang , et al. December 25, 2 | 2012-12-25 |
Method and system for assisting driver Grant 8,320,628 - Cheng , et al. November 27, 2 | 2012-11-27 |
Method And Structure For Top Metal Formation Of Liquid Crystal On Silicon Devices App 20120092604 - HUANG; HERB ;   et al. | 2012-04-19 |
Method And Resulting Capacitor Structure For Liquid Crystal On Silicon Display Devices App 20120081649 - Li; Wei Min ;   et al. | 2012-04-05 |
Thin Films App 20110256718 - Haukka; Suvi P. ;   et al. | 2011-10-20 |
Thin films Grant 7,981,791 - Haukka , et al. July 19, 2 | 2011-07-19 |
Method And Structure For Electro-plating Aluminum Species For Top Metal Formation Of Liquid Crystal On Silicon Displays App 20110109856 - HUANG; HERB ;   et al. | 2011-05-12 |
Method And System For Assisting Driver App 20110103650 - CHENG; KUO-HSIANG ;   et al. | 2011-05-05 |
Method and resulting capacitor structure for liquid crystal on silicon display devices Grant 7,936,406 - Huang , et al. May 3, 2 | 2011-05-03 |
Parking guidance device and method thereof Grant 7,920,070 - Chen , et al. April 5, 2 | 2011-04-05 |
Method And Resulting Capacitor Structure For Liquid Crystal On Silicon Display Devices App 20100283926 - Huang; Herb ;   et al. | 2010-11-11 |
Portable telematics device Grant 7,778,774 - Li , et al. August 17, 2 | 2010-08-17 |
Low resistivity metal carbonitride thin film deposition by atomic layer deposition Grant 7,638,170 - Li December 29, 2 | 2009-12-29 |
Atomic Layer Deposition Of Metal Carbide Films Using Aluminum Hydrocarbon Compounds App 20090315093 - LI; Dong ;   et al. | 2009-12-24 |
Parking Guidance Device And Method Thereof App 20090167564 - LONG-TAI; CHEN ;   et al. | 2009-07-02 |
Thin Films App 20090068832 - Haukka; Suvi P. ;   et al. | 2009-03-12 |
Low Resistivity Metal Carbonitride Thin Film Deposition By Atomic Layer Deposition App 20080317955 - Li; Wei-Min | 2008-12-25 |
Thin films Grant 7,419,903 - Haukka , et al. September 2, 2 | 2008-09-02 |
Metal nitride carbide deposition by ALD Grant 7,410,666 - Elers , et al. August 12, 2 | 2008-08-12 |
Portable telematics device App 20070150191 - Li; Wei-Min ;   et al. | 2007-06-28 |
Enhanced thin film deposition App 20070148350 - Rahtu; Antti ;   et al. | 2007-06-28 |
Metal nitride carbide deposition by ALD App 20060078679 - Elers; Kai ;   et al. | 2006-04-13 |
Methods of metallization for microelectronic devices utilizing metal oxide App 20060019493 - Li; Wei Min | 2006-01-26 |
Metal nitride deposition by ALD with reduction pulse Grant 6,986,914 - Elers , et al. January 17, 2 | 2006-01-17 |
Atomic layer deposition methods for forming a multi-layer adhesion-barrier layer for integrated circuits Grant 6,955,986 - Li October 18, 2 | 2005-10-18 |
Thin films App 20050181555 - Haukka, Suvi P. ;   et al. | 2005-08-18 |
Atomic layer deposition reactor App 20050092249 - Kilpela, Olli ;   et al. | 2005-05-05 |
Atomic layer deposition reactor Grant 6,820,570 - Kilpela , et al. November 23, 2 | 2004-11-23 |
Method of producing adhesion-barrier layer for integrated circuits App 20040192021 - Li, Wei-Min | 2004-09-30 |
Metal nitride deposition by ALD with reduction pulse App 20030082296 - Elers, Kai ;   et al. | 2003-05-01 |
Atomic layer deposition reactor App 20030075273 - Kilpela, Olli ;   et al. | 2003-04-24 |
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