Patent | Date |
---|
Self aligned via fuse Grant 10,186,482 - Bao , et al. Ja | 2019-01-22 |
Metal lines having etch-bias independent height Grant 10,049,926 - Bao , et al. August 14, 2 | 2018-08-14 |
Bridging local semiconductor interconnects Grant 10,032,794 - Li , et al. July 24, 2 | 2018-07-24 |
High density capacitor structure and method Grant 9,960,226 - Li , et al. May 1, 2 | 2018-05-01 |
Bridging Local Semiconductor Interconnects App 20180047755 - Li; Wai-Kin ;   et al. | 2018-02-15 |
Bridging local semiconductor interconnects Grant 9,859,303 - Li , et al. January 2, 2 | 2018-01-02 |
High Density Capacitor Structure And Method App 20170323937 - Li; Wai-Kin ;   et al. | 2017-11-09 |
Physical unclonable interconnect function array Grant 9,768,110 - Feng , et al. September 19, 2 | 2017-09-19 |
High density capacitor structure and method Grant 9,755,013 - Li , et al. September 5, 2 | 2017-09-05 |
Integration process to form microelectronic or micromechanical structures Grant 9,755,016 - Choi , et al. September 5, 2 | 2017-09-05 |
On-chip semiconductor device having enhanced variability Grant 9,691,718 - Li , et al. June 27, 2 | 2017-06-27 |
On-chip finFET structures to implement physical unclonable function for security application Grant 9,666,582 - Li , et al. May 30, 2 | 2017-05-30 |
Patterning scheme to minimize dry/wets strip induced device degradation Grant 9,627,272 - Dong , et al. April 18, 2 | 2017-04-18 |
Patterning Scheme To Minimize Dry/wets Strip Induced Device Degradation App 20170062281 - DONG; Huihang ;   et al. | 2017-03-02 |
Inducing device variation for security applications Grant 9,576,914 - Li , et al. February 21, 2 | 2017-02-21 |
Bridging Local Semiconductor Interconnects App 20170012061 - Li; Wai-Kin ;   et al. | 2017-01-12 |
Bridging local semiconductor interconnects Grant 9,515,148 - Li , et al. December 6, 2 | 2016-12-06 |
Inducing Device Variation For Security Applications App 20160329287 - Li; Wai-Kin ;   et al. | 2016-11-10 |
Novel Integration Process To Form Microelectronic Or Micromechanical Structures App 20160322458 - Choi; Samuel S. ;   et al. | 2016-11-03 |
High Density Capacitor Structure And Method App 20160315138 - Li; Wai-Kin ;   et al. | 2016-10-27 |
Patterning process for Fin implantation Grant 9,472,463 - Dong , et al. October 18, 2 | 2016-10-18 |
Method of forming semiconductor structures with contact holes Grant 9,449,822 - Li , et al. September 20, 2 | 2016-09-20 |
Patterning process for fin implantation Grant 9,443,770 - Dong , et al. September 13, 2 | 2016-09-13 |
Metal Lines Having Etch-bias Independent Height App 20160247716 - Bao; Junjing ;   et al. | 2016-08-25 |
On-chip Semiconductor Device Having Enhanced Variability App 20160247770 - Li; Wai-Kin ;   et al. | 2016-08-25 |
Physical unclonable interconnect function array Grant 9,391,014 - Feng , et al. July 12, 2 | 2016-07-12 |
On-chip semiconductor device having enhanced variability Grant 9,391,030 - Li , et al. July 12, 2 | 2016-07-12 |
Physical Unclonable Interconnect Function Array App 20160190005 - Feng; Kai D. ;   et al. | 2016-06-30 |
Method of forming microelectronic or micromechanical structures Grant 9,337,261 - Choi , et al. May 10, 2 | 2016-05-10 |
Metal lines having etch-bias independent height Grant 9,337,082 - Bao , et al. May 10, 2 | 2016-05-10 |
Method for fabricating a physical unclonable interconnect function array Grant 9,331,012 - Feng , et al. May 3, 2 | 2016-05-03 |
Method to mitigate resist pattern critical dimension variation in a double-exposure process Grant 9,316,916 - Chen , et al. April 19, 2 | 2016-04-19 |
Self Aligned Via Fuse App 20160104677 - Bao; Junjing ;   et al. | 2016-04-14 |
Processing of integrated circuit for metal gate replacement Grant 9,312,366 - Dong , et al. April 12, 2 | 2016-04-12 |
Block patterning process for post fin Grant 9,312,191 - Li April 12, 2 | 2016-04-12 |
Photoresist Collapse Method For Forming A Physical Unclonable Function App 20160071742 - Feng; Kai D. ;   et al. | 2016-03-10 |
Embedded on-chip security Grant 9,281,236 - Feng , et al. March 8, 2 | 2016-03-08 |
Block Patterning Process For Post Fin App 20160049339 - Li; Wai-kin | 2016-02-18 |
Self-aligned via fuse Grant 9,240,376 - Bao , et al. January 19, 2 | 2016-01-19 |
Dynamic alignment by electrical potential and flow control to single-wall carbon nanotube field effect transistors Grant 9,236,575 - Li , et al. January 12, 2 | 2016-01-12 |
Patterning Process For Fin Implantation App 20150371904 - Dong; Huihang ;   et al. | 2015-12-24 |
Physical Unclonable Interconnect Function Array App 20150348899 - Feng; Kai D. ;   et al. | 2015-12-03 |
Patterning Process For Fin Implantation App 20150340292 - Dong; Huihang ;   et al. | 2015-11-26 |
Photoresist collapse method for forming a physical unclonable function Grant 9,190,360 - Feng , et al. November 17, 2 | 2015-11-17 |
On-chip structure for security application Grant 9,189,654 - Feng , et al. November 17, 2 | 2015-11-17 |
Semiconductor device including enhanced variability Grant 9,166,588 - Feng , et al. October 20, 2 | 2015-10-20 |
Embedded On-chip Security App 20150255326 - Feng; Kai D. ;   et al. | 2015-09-10 |
Novel Integration Process To Form Microelectronic Or Micromechanical Structures App 20150243732 - Choi; Samuel S. ;   et al. | 2015-08-27 |
Embedded on-chip security Grant 9,117,824 - Feng , et al. August 25, 2 | 2015-08-25 |
Lateral-dimension-reducing Metallic Hard Mask Etch App 20150235951 - Choi; Samuel S. ;   et al. | 2015-08-20 |
Photoresist Collapse Method For Forming A Physical Unclonable Function App 20150235964 - Feng; Kai D. ;   et al. | 2015-08-20 |
Electronic Fuse With Resistive Heater App 20150228578 - Bao; Junjing ;   et al. | 2015-08-13 |
Via-fuse with low dielectric constant Grant 9,105,638 - Bao , et al. August 11, 2 | 2015-08-11 |
Profile control in interconnect structures Grant 9,105,641 - Chen , et al. August 11, 2 | 2015-08-11 |
Electronic fuse with resistive heater Grant 9,093,452 - Bao , et al. July 28, 2 | 2015-07-28 |
Metallic mask patterning process for minimizing collateral etch of an underlayer Grant 9,093,387 - Allen , et al. July 28, 2 | 2015-07-28 |
Semiconductor Device Including Enhanced Variability App 20150207505 - Feng; Kai D. ;   et al. | 2015-07-23 |
Metallic Mask Patterning Process For Minimizing Collateral Etch Of An Underlayer App 20150194320 - ALLEN; SCOTT D. ;   et al. | 2015-07-09 |
Method for adjusting target layout based on intensity of background light in etch mask layer Grant 9,064,085 - Chang , et al. June 23, 2 | 2015-06-23 |
Electronic fuse having a damaged region Grant 9,059,170 - Bao , et al. June 16, 2 | 2015-06-16 |
Lateral-dimension-reducing metallic hard mask etch Grant 9,059,250 - Choi , et al. June 16, 2 | 2015-06-16 |
Random local metal cap layer formation for improved integrated circuit reliability Grant 9,054,108 - Filippi , et al. June 9, 2 | 2015-06-09 |
On-chip Structure For Security Application App 20150154421 - Feng; Kai Di ;   et al. | 2015-06-04 |
Method for monitoring focus on an integrated wafer Grant 9,046,788 - Gabor , et al. June 2, 2 | 2015-06-02 |
Via-fuse With Low Dielectric Constant App 20150130018 - Bao; Junjing ;   et al. | 2015-05-14 |
Bridging Local Semiconductor Interconnects App 20150129961 - Li; Wai-Kin ;   et al. | 2015-05-14 |
Embedded On-chip Security App 20150084193 - Feng; Kai D. ;   et al. | 2015-03-26 |
Self-aligned Via Fuse App 20150048479 - Bao; Junjing ;   et al. | 2015-02-19 |
Profile Control In Interconnect Structures App 20150035154 - Chen; Shyng-Tsong ;   et al. | 2015-02-05 |
Random Local Metal Cap Layer Formation For Improved Integrated Circuit Reliability App 20150028484 - Filippi; Ronald G. ;   et al. | 2015-01-29 |
Method Of Forming A Semiconductor Circuit App 20150007119 - Chang; Sang Yil ;   et al. | 2015-01-01 |
Random local metal cap layer formation for improved integrated circuit reliability Grant 8,906,799 - Filippi , et al. December 9, 2 | 2014-12-09 |
Methods of manufacturing semiconductor devices and optical proximity correction Grant 8,877,650 - Park , et al. November 4, 2 | 2014-11-04 |
Method for designing optical lithography masks for directed self-assembly Grant 8,856,693 - Cheng , et al. October 7, 2 | 2014-10-07 |
Method for generating post-OPC layout in consideration of top loss of etch mask layer Grant 8,856,695 - Chang , et al. October 7, 2 | 2014-10-07 |
Photoresist composition containing a protected hydroxyl group for negative development and pattern forming method using thereof Grant 8,846,295 - Chen , et al. September 30, 2 | 2014-09-30 |
Method For Generating Post-opc Layout In Consideration Of Top Loss Of Etch Mask Layer App 20140282297 - CHANG; SANG YIL ;   et al. | 2014-09-18 |
Method of fabricating a profile control in interconnect structures Grant 8,835,305 - Yang , et al. September 16, 2 | 2014-09-16 |
Electronic Fuse With Resistive Heater App 20140252538 - Bao; Junjing ;   et al. | 2014-09-11 |
Gate conductor with a diffusion barrier Grant 8,809,915 - Li , et al. August 19, 2 | 2014-08-19 |
Electronic Fuse Having A Damaged Region App 20140217612 - Bao; Junjing ;   et al. | 2014-08-07 |
Near-infrared Absorbing Film Compositions App 20140210034 - Huang; Wu-Song ;   et al. | 2014-07-31 |
Metal Lines Having Etch-bias Independent Height App 20140203447 - Bao; Junjing ;   et al. | 2014-07-24 |
Near-infrared absorbing film compositions Grant 8,772,376 - Huang , et al. July 8, 2 | 2014-07-08 |
Circuit structure with low dielectric constant regions Grant 8,772,941 - Clevenger , et al. July 8, 2 | 2014-07-08 |
System Involving Electrically Reprogrammable Fuses App 20140177373 - Chanda; Kaushik ;   et al. | 2014-06-26 |
Near-infrared absorptive layer-forming composition and multilayer film comprising near-infrared absorptive layer Grant 8,722,307 - Tachibana , et al. May 13, 2 | 2014-05-13 |
Methods and systems involving electrically reprogrammable fuses Grant 8,716,071 - Chanda , et al. May 6, 2 | 2014-05-06 |
Structure and method of reducing electromigration cracking and extrusion effects in semiconductor devices Grant 8,716,101 - Chandra , et al. May 6, 2 | 2014-05-06 |
Photoresist Composition Containing A Protected Hydroxyl Group For Negative Development And Pattern Forming Method Using Thereof App 20140072915 - Chen; Kuang-Jung ;   et al. | 2014-03-13 |
Profile Control In Interconnect Structures App 20140035142 - Yang; Chih-Chao ;   et al. | 2014-02-06 |
Forming sub-lithographic patterns using double exposure Grant 8,609,327 - Chen , et al. December 17, 2 | 2013-12-17 |
Near-infrared absorbing film compositions Grant 8,586,283 - Glodde , et al. November 19, 2 | 2013-11-19 |
Photoresist Composition Containing A Protected Hydroxyl Group For Negative Development And Pattern Forming Method Using Thereof App 20130288178 - Chen; Kuang-Jung ;   et al. | 2013-10-31 |
Methods and systems involving electrically reprogrammable fuses Grant 8,535,991 - Chanda , et al. September 17, 2 | 2013-09-17 |
Physical Unclonable Interconnect Function Array App 20130233608 - Feng; Kai D. ;   et al. | 2013-09-12 |
Gate conductor with a diffusion barrier App 20130228900 - Li; Wai-Kin ;   et al. | 2013-09-05 |
Lateral-Dimension-Reducing Metallic Hard Mask Etch App 20130214391 - Choi; Samuel S. ;   et al. | 2013-08-22 |
Electrical fuses and resistors having sublithographic dimensions Grant 8,513,769 - Black , et al. August 20, 2 | 2013-08-20 |
Method of forming a pattern of an array of shapes including a blocked region Grant 8,492,079 - Chen , et al. July 23, 2 | 2013-07-23 |
Methods And Systems Involving Electrically Reprogrammable Fuses App 20130176805 - Chanda; Kaushik ;   et al. | 2013-07-11 |
Gate conductor with a diffusion barrier Grant 8,476,674 - Li , et al. July 2, 2 | 2013-07-02 |
Photoresist Composition For Negative Development And Pattern Forming Method Using Thereof App 20130164680 - Chen; Kuang-Jung ;   et al. | 2013-06-27 |
Near-infrared Absorbing Film Composition For Lithographic Application App 20130157463 - Goldfarb; Dario L. ;   et al. | 2013-06-20 |
Directed self-assembly of block copolymers using segmented prepatterns Grant 8,398,868 - Cheng , et al. March 19, 2 | 2013-03-19 |
Photoresist compositions and methods for shrinking a photoresist critical dimension Grant 8,394,573 - Huang , et al. March 12, 2 | 2013-03-12 |
Integration process to improve focus leveling within a lot process variation Grant 8,395,228 - Li , et al. March 12, 2 | 2013-03-12 |
Method for reducing tip-to-tip spacing between lines Grant 8,361,704 - Colburn , et al. January 29, 2 | 2013-01-29 |
Structure of power grid for semiconductor devices and method of making the same Grant 8,349,723 - Filippi , et al. January 8, 2 | 2013-01-08 |
Near-Infrared Absorbing Film Compositions App 20130001484 - Glodde; Martin ;   et al. | 2013-01-03 |
Method For Designing Optical Lithography Masks For Directed Self-assembly App 20120331428 - Cheng; Joy ;   et al. | 2012-12-27 |
Method for designing optical lithography masks for directed self-assembly Grant 8,336,003 - Cheng , et al. December 18, 2 | 2012-12-18 |
Stray light feedback for dose control in semiconductor lithography systems Grant 8,330,937 - Marokkey , et al. December 11, 2 | 2012-12-11 |
Near-infrared Absorptive Layer-forming Composition And Multilayer Film Comprising Near-infrared Absorptive Layer App 20120301828 - TACHIBANA; Seiichiro ;   et al. | 2012-11-29 |
Structure of metal e-fuse Grant 8,299,567 - Wang , et al. October 30, 2 | 2012-10-30 |
Semiconductor structure and method of manufacturing same Grant 8,298,912 - Li , et al. October 30, 2 | 2012-10-30 |
Near-infrared absorbing film compositions Grant 8,293,451 - Glodde , et al. October 23, 2 | 2012-10-23 |
Structure And Method Of Reducing Electromigration Cracking And Extrusion Effects In Semiconductor Devices App 20120264295 - Chandra; Kaushik ;   et al. | 2012-10-18 |
Method for reducing side lobe printing using a barrier layer Grant 8,268,542 - Chen , et al. September 18, 2 | 2012-09-18 |
Methods of Manufacturing Semiconductor Devices and Optical Proximity Correction App 20120228743 - Park; O Seo ;   et al. | 2012-09-13 |
Method for removing threshold voltage adjusting layer with external acid diffusion process Grant 8,227,307 - Chen , et al. July 24, 2 | 2012-07-24 |
Photolithography focus improvement by reduction of autofocus radiation transmission into substrate Grant 8,227,180 - Brunner , et al. July 24, 2 | 2012-07-24 |
Multi-exposure Lithography Employing Differentially Sensitive Photoresist Layers App 20120156450 - Huang; Wu-Song ;   et al. | 2012-06-21 |
Methods of manufacturing semiconductor devices and optical proximity correction Grant 8,187,974 - Park , et al. May 29, 2 | 2012-05-29 |
Photoresist Composition For Negative Development And Pattern Forming Method Using Thereof App 20120122031 - Chen; Kuang-Jung ;   et al. | 2012-05-17 |
Novel Integration Process to Improve Focus Leveling Within a Lot Process Variation App 20120112302 - Li; Wai-Kin ;   et al. | 2012-05-10 |
Structure Of Power Grid For Semiconductor Devices And Method Of Making The Same App 20120100712 - Filippi; Ronald ;   et al. | 2012-04-26 |
Structure of power grid for semiconductor devices and method of making the same Grant 8,164,190 - Filippi , et al. April 24, 2 | 2012-04-24 |
Method for selectively adjusting local resist pattern dimension with chemical treatment Grant 8,163,466 - Chen , et al. April 24, 2 | 2012-04-24 |
Multi-exposure lithography employing differentially sensitive photoresist layers Grant 8,158,014 - Huang , et al. April 17, 2 | 2012-04-17 |
Photoresist Compositions And Methods For Shrinking A Photoresist Critical Dimension App 20120070787 - Huang; Wu-Song ;   et al. | 2012-03-22 |
Method of forming sub-lithographic features using directed self-assembly of polymers Grant 8,114,306 - Cheng , et al. February 14, 2 | 2012-02-14 |
Method Of Forming Semiconductor Structures With Contact Holes App 20120028476 - Li; Wai-Kin ;   et al. | 2012-02-02 |
Patterning method using a combination of photolithography and copolymer self-assemblying lithography techniques Grant 8,083,958 - Li , et al. December 27, 2 | 2011-12-27 |
Near-infrared Absorptive Layer-forming Composition And Multilayer Film App 20110262863 - TACHIBANA; Seiichiro ;   et al. | 2011-10-27 |
Near-infrared Absorptive Layer-forming Composition And Multilayer Film App 20110262862 - OHASHI; Masaki ;   et al. | 2011-10-27 |
Photolithography Focus Improvement By Reduction Of Autofocus Radiation Transmission Into Substrate App 20110256486 - Brunner; Timothy A. ;   et al. | 2011-10-20 |
Method For Designing Optical Lithography Masks For Directed Self-assembly App 20110209106 - Cheng; Joy ;   et al. | 2011-08-25 |
Semiconductor Structure And Method Of Manufacturing Same App 20110183491 - LI; Wai-Kin ;   et al. | 2011-07-28 |
Gate Conductor Structure App 20110156282 - Li; Wai-Kin ;   et al. | 2011-06-30 |
Semiconductor structure and method of manufacturing same Grant 7,960,036 - Li , et al. June 14, 2 | 2011-06-14 |
Sub-lithographic dimensioned air gap formation and related structure Grant 7,943,480 - Edelstein , et al. May 17, 2 | 2011-05-17 |
Gate conductor structure Grant 7,943,452 - Li , et al. May 17, 2 | 2011-05-17 |
Variable fill and cheese for mitigation of BEOL topography Grant 7,926,006 - Bailey , et al. April 12, 2 | 2011-04-12 |
Near-Infrared Absorbing Film Compositions App 20110042653 - Glodde; Martin ;   et al. | 2011-02-24 |
Near-Infrared Absorbing Film Compositions App 20110042771 - Huang; Wu-Song ;   et al. | 2011-02-24 |
Method and structure for relieving transistor performance degradation due to shallow trench isolation induced stress Grant 7,871,895 - Divakaruni , et al. January 18, 2 | 2011-01-18 |
Fully and uniformly silicided gate structure and method for forming same Grant 7,863,186 - Li , et al. January 4, 2 | 2011-01-04 |
Structure Of Power Grid For Semiconductor Devices And Method Of Making The Same App 20100327445 - Filippi; Ronald ;   et al. | 2010-12-30 |
Method For Removing Threshold Voltage Adjusting Layer With External Acid Diffusion Process App 20100330810 - Chen; Kuang-Jung ;   et al. | 2010-12-30 |
Method of forming sub-lithographic features using directed self-assembly of polymers App 20100297847 - Cheng; Joy ;   et al. | 2010-11-25 |
Directed self-assembly of block copolymers using segmented prepatterns App 20100294740 - Cheng; Joy ;   et al. | 2010-11-25 |
Photoresist compositions and method for multiple exposures with multiple layer resist systems Grant 7,838,200 - Chen , et al. November 23, 2 | 2010-11-23 |
Photoresist compositions and method for multiple exposures with multiple layer resist systems Grant 7,838,198 - Chen , et al. November 23, 2 | 2010-11-23 |
Electrical Fuses And Resistors Having Sublithographic Dimensions App 20100283121 - Black; Charles T. ;   et al. | 2010-11-11 |
Electrical fuse having a cavity thereupon Grant 7,825,490 - Kim , et al. November 2, 2 | 2010-11-02 |
Method Of Forming A Pattern Of An Array Of Shapes Including A Blocked Region App 20100272967 - Chen; Chia-Chen ;   et al. | 2010-10-28 |
Method To Mitigate Resist Pattern Critical Dimension Variation In A Double-exposure Process App 20100255428 - CHEN; KUANG-JUNG ;   et al. | 2010-10-07 |
Photoresist Compositions And Process For Multiple Exposures With Multiple Layer Photoresist Systems App 20100248147 - Chen; Kuang-Jung ;   et al. | 2010-09-30 |
Photoresist compositions and process for multiple exposures with multiple layer photoresist systems Grant 7,803,521 - Chen , et al. September 28, 2 | 2010-09-28 |
Structure and method to use low k stress liner to reduce parasitic capacitance Grant 7,790,540 - Yang , et al. September 7, 2 | 2010-09-07 |
Electrical fuse having sublithographic cavities thereupon Grant 7,785,937 - Kim , et al. August 31, 2 | 2010-08-31 |
Sub-lithographic gate length transistor using self-assembling polymers Grant 7,786,527 - Yang , et al. August 31, 2 | 2010-08-31 |
Utilizing inverse reactive ion etching lag in double patterning contact formation Grant 7,786,017 - Morgenfeld , et al. August 31, 2 | 2010-08-31 |
Method For Selectively Adjusting Local Resist Pattern Dimension With Chemical Treatment App 20100209853 - Chen; Kuang-Jung ;   et al. | 2010-08-19 |
Non-planar fuse structure including angular bend Grant 7,777,297 - Yang , et al. August 17, 2 | 2010-08-17 |
Sub-lithographic interconnect patterning using self-assembling polymers Grant 7,767,099 - Li , et al. August 3, 2 | 2010-08-03 |
Method For Reducing Tip-to-tip Spacing Between Lines App 20100178615 - COLBURN; MATTHEW E. ;   et al. | 2010-07-15 |
Electrical fuses and resistors having sublithographic dimensions Grant 7,741,721 - Black , et al. June 22, 2 | 2010-06-22 |
Methods and Systems Involving Electrically Reprogrammable Fuses App 20100118636 - Chanda; Kaushik ;   et al. | 2010-05-13 |
Dual damascene metal interconnect structure having a self-aligned via Grant 7,696,085 - Li , et al. April 13, 2 | 2010-04-13 |
Microelectronic circuit structure with layered low dielectric constant regions Grant 7,692,308 - Clevenger , et al. April 6, 2 | 2010-04-06 |
Contact aperture and contact via with stepped sidewall and methods for fabrication thereof Grant 7,687,395 - Yang , et al. March 30, 2 | 2010-03-30 |
Electrical fuse having sublithographic cavities thereupon Grant 7,675,137 - Kim , et al. March 9, 2 | 2010-03-09 |
Empty vias for electromigration during electronic-fuse re-programming Grant 7,671,444 - Wang , et al. March 2, 2 | 2010-03-02 |
Electrical Fuse Having Sublithographic Cavities Thereupon App 20100005649 - Kim; Deok-kee ;   et al. | 2010-01-14 |
Forming Sub-lithographic Patterns Using Double Exposure App 20100009298 - Chen; Kuang-Jung ;   et al. | 2010-01-14 |
Multi-exposure Lithography Employing Differentially Sensitive Photoresist Layers App 20090311491 - Huang; Wu-Song ;   et al. | 2009-12-17 |
Methods of Fabricating Transistors and Structures Thereof App 20090294807 - Yan; Jiang ;   et al. | 2009-12-03 |
Stray Light Feedback for Dose Control in Semiconductor Lithography Systems App 20090284726 - Marokkey; Sajan ;   et al. | 2009-11-19 |
Method For Monitoring Focus On An Integrated Wafer App 20090284722 - Gabor; Allen H. ;   et al. | 2009-11-19 |
Sub-lithographic feature patterning using self-aligned self-assembly polymers Grant 7,605,081 - Yang , et al. October 20, 2 | 2009-10-20 |
Sub-lithographic local interconnects, and methods for forming same Grant 7,592,247 - Yang , et al. September 22, 2 | 2009-09-22 |
Stray light feedback for dose control in semiconductor lithography systems Grant 7,583,362 - Marokkey , et al. September 1, 2 | 2009-09-01 |
Dual Damascene Metal Interconnect Structure Having A Self-aligned Via App 20090206489 - Li; Wai-kin ;   et al. | 2009-08-20 |
Method And Structure For Relieving Transistor Performance Degradation Due To Shallow Trench Isolation Induced Stress App 20090206442 - Divakaruni; Ramachandra ;   et al. | 2009-08-20 |
Photolithography Focus Improvement By Reduction Of Autofocus Radiation Transmission Into Substrate App 20090208865 - Brunner; Timothy A. ;   et al. | 2009-08-20 |
Structure And Method Of Forming Transitional Contacts Between Wide And Thin Beol Wirings App 20090200674 - Yang; Haining ;   et al. | 2009-08-13 |
Sub-lithographic Dimensioned Air Gap Formation And Related Structure App 20090200636 - Edelstein; Daniel C. ;   et al. | 2009-08-13 |
Si-containing polymers for nano-pattern device fabrication Grant 7,560,222 - Chen , et al. July 14, 2 | 2009-07-14 |
Sub-lithographic nano interconnect structures, and method for forming same Grant 7,553,760 - Yang , et al. June 30, 2 | 2009-06-30 |
Methods of Manufacturing Semiconductor Devices and Optical Proximity Correction App 20090160027 - Park; O Seo ;   et al. | 2009-06-25 |
Photoresist Compositions And Method For Multiple Exposures With Multiple Layer Resist Systems App 20090155715 - Chen; Kuang-Jung ;   et al. | 2009-06-18 |
Photoresist Compositions And Method For Multiple Exposures With Multiple Layer Resist Systems App 20090155718 - Chen; Kuang-Jung ;   et al. | 2009-06-18 |
Patterning Method Using A Combination Of Photolithography And Copolymer Self-assemblying Lithography Techniques App 20090148795 - Li; Wai-Kin ;   et al. | 2009-06-11 |
Thermal energy removal structure and method Grant 7,545,034 - Kim , et al. June 9, 2 | 2009-06-09 |
Method and structure for ultra narrow crack stop for multilevel semiconductor device Grant 7,544,602 - Clevenger , et al. June 9, 2 | 2009-06-09 |
Method For Reducing Side Lobe Printing Using A Barrier Layer App 20090142704 - Chen; Kuang-Jung ;   et al. | 2009-06-04 |
Method of forming film stack having under layer for preventing pinhole defects Grant 7,541,065 - Brodsky , et al. June 2, 2 | 2009-06-02 |
Photoresist Compositions And Process For Multiple Exposures With Multiple Layer Photoresist Systems App 20090130590 - Chen; Kuang-Jung ;   et al. | 2009-05-21 |
Fully And Uniformly Silicided Gate Structure And Method For Forming Same App 20090090986 - Li; Wai-Kin ;   et al. | 2009-04-09 |
Ribs for line collapse prevention in damascene structures Grant 7,514,356 - Marokkey , et al. April 7, 2 | 2009-04-07 |
Method for fabricating shallow trench isolation structures using diblock copolymer patterning Grant 7,514,339 - Yang , et al. April 7, 2 | 2009-04-07 |
Semiconductor Fuse Structure And Method App 20090085151 - Kim; Deok-kee ;   et al. | 2009-04-02 |
Microelectronic Circuit Structure With Layered Low Dielectric Constant Regions App 20090072410 - Clevenger; Lawrence A. ;   et al. | 2009-03-19 |
Method of formation of a damascene structure utilizing a protective film Grant 7,501,353 - Li , et al. March 10, 2 | 2009-03-10 |
Methods And Systems Involving Electrically Reprogrammable Fuses App 20090045484 - Chanda; Kaushik ;   et al. | 2009-02-19 |
Semiconductor Structure And Method Of Manufacturing Same App 20090035588 - Li; Wai-Kin ;   et al. | 2009-02-05 |
Electrical Fuses And Resistors Having Sublithographic Dimensions App 20090032959 - Black; Charles T. ;   et al. | 2009-02-05 |
Microelectronic circuit structure with layered low dielectric constant regions and method of forming same Grant 7,485,567 - Clevenger , et al. February 3, 2 | 2009-02-03 |
Electrical Fuse Having Sublithographic Cavities Thereupon App 20090026574 - Kim; Deok-kee ;   et al. | 2009-01-29 |
Fully and uniformly silicided gate structure and method for forming same Grant 7,482,270 - Li , et al. January 27, 2 | 2009-01-27 |
Electrical Fuse Having A Cavity Thereupon App 20090021338 - Kim; Deok-kee ;   et al. | 2009-01-22 |
Circuit Structure with Low Dielectric Constant Regions App 20090008791 - Clevenger; Lawrence A. ;   et al. | 2009-01-08 |
Film stack having under layer for preventing pinhole defects Grant 7,473,461 - Brodsky , et al. January 6, 2 | 2009-01-06 |
Methods Of Patterning Self-assembly Nano-structure And Forming Porous Dielectric App 20090001045 - Chen; Kuang-Jung ;   et al. | 2009-01-01 |
Empty Vias For Electromigration During Electronic-fuse Re-programming App 20080315353 - Wang; Ping-Chuan ;   et al. | 2008-12-25 |
Thermally Conductive Electrical Structure and Method App 20080316709 - Kim; Deok-kee ;   et al. | 2008-12-25 |
Electrical Fuse With Sublithographic Dimension App 20080308900 - Kim; Deok-kee ;   et al. | 2008-12-18 |
Structure And Method Of Reducing Electromigration Cracking And Extrusion Effects In Semiconductor Devices App 20080303164 - Chandra; Kaushik ;   et al. | 2008-12-11 |
Circuit structure with low dielectric constant regions and method of forming same Grant 7,439,172 - Clevenger , et al. October 21, 2 | 2008-10-21 |
Strained MOSFETs on separated silicon layers Grant 7,436,030 - Yang , et al. October 14, 2 | 2008-10-14 |
Method And Structure For Ultra Narrow Crack Stop For Multilevel Semiconductor Device App 20080237868 - Clevenger; Lawrence A. ;   et al. | 2008-10-02 |
Non-planar Fuse Structure Including Angular Bend And Method For Fabrication Thereof App 20080237786 - Yang; Haining S. ;   et al. | 2008-10-02 |
Integrated Circuit System With Carbon Enhancement App 20080230907 - Liu; Wuping ;   et al. | 2008-09-25 |
Variable Fill And Cheese For Mitigation Of Beol Topography App 20080203589 - Bailey; Todd C. ;   et al. | 2008-08-28 |
Sub-lithographic Gate Length Transistor Using Self-assembling Polymers App 20080179667 - Yang; Haining S. ;   et al. | 2008-07-31 |
Sub-lithographic Interconnect Patterning Using Self-assembling Polymers App 20080182402 - Li; Wai-Kin ;   et al. | 2008-07-31 |
Circuit Structure with Low Dielectric Constant Regions and Method of Forming Same App 20080171432 - Clevenger; Lawrence A. ;   et al. | 2008-07-17 |
Method For Fabricating Shallow Trench Isolation Structures Using Diblock Copolymer Patterning App 20080164558 - Yang; Haining ;   et al. | 2008-07-10 |
Method Of Formation Of A Damascene Structure Utilizing A Protective Film App 20080153296 - Li; Wai-Kin ;   et al. | 2008-06-26 |
Gate Conductor Structure App 20080135987 - Li; Wai-Kin ;   et al. | 2008-06-12 |
Sub-lithographic gate length transistor using self-assembling polymers Grant 7,384,852 - Yang , et al. June 10, 2 | 2008-06-10 |
Fully And Uniformly Silicided Gate Structure And Method For Forming Same App 20080132070 - Li; Wai-Kin ;   et al. | 2008-06-05 |
Contact Aperture And Contact Via With Stepped Sidewall And Methods For Fabrication Thereof App 20080122110 - Yang; Haining ;   et al. | 2008-05-29 |
Si-CONTAINING POLYMERS FOR NANO-PATTERN DEVICE FABRICATION App 20080102401 - Chen; Kuang-Jung ;   et al. | 2008-05-01 |
Sub-lithographic Gate Length Transistor Using Self-assembling Polymers App 20080099845 - Yang; Haining ;   et al. | 2008-05-01 |
Sub-lithographic Nano Interconnect Structures, And Method For Forming Same App 20080093743 - Yang; Haining ;   et al. | 2008-04-24 |
Method Of Patterning Contact Holes App 20080085598 - Li; Wai-Kin ;   et al. | 2008-04-10 |
Sub-lithographic Local Interconnects, And Methods For Forming Same App 20080083991 - Yang; Haining ;   et al. | 2008-04-10 |
STRUCTURE AND METHOD TO USE LOW k STRESS LINER TO REDUCE PARASITIC CAPACITANCE App 20080048271 - Yang; Haining ;   et al. | 2008-02-28 |
Strained Mosfets On Separated Silicon Layers App 20080036012 - Yang; Haining ;   et al. | 2008-02-14 |
Method Of Formation Of A Damascene Structure App 20080020327 - Yang; Chih-Chao ;   et al. | 2008-01-24 |
Cmos Devices Comprising A Continuous Stressor Layer With Regions Of Opposite Stresses, And Methods Of Fabricating The Same App 20070296027 - Yang; Haining ;   et al. | 2007-12-27 |
Sub-lithographic Feature Patterning Using Self-aligned Self-assembly Polymers App 20070293041 - Yang; Haining ;   et al. | 2007-12-20 |
Bottom Anti-reflective Coating App 20070275330 - Bailey; Todd C. ;   et al. | 2007-11-29 |
Film stack having under layer for preventing pinhole defects App 20070259162 - Brodsky; Colin J. ;   et al. | 2007-11-08 |
Method of forming film stack having under layer for preventing pinhole defects App 20070243333 - Brodsky; Colin J. ;   et al. | 2007-10-18 |
Film stack having under layer for preventing pinhole defects Grant 7,267,863 - Brodsky , et al. September 11, 2 | 2007-09-11 |
Methods Of Preventing Defects In Antireflective Coatings App 20070178404 - Brodsky; Colin J. ;   et al. | 2007-08-02 |
After deposition method of thinning film to reduce pinhole defects App 20070037325 - Li; Wai-Kin ;   et al. | 2007-02-15 |
After deposition method of thinning film to reduce pinhole defects Grant 7,132,316 - Li , et al. November 7, 2 | 2006-11-07 |
Ribs for line collapse prevention in damascene structures App 20060199369 - Marokkey; Sajan ;   et al. | 2006-09-07 |
Apparatus and method to improve resist line roughness in semiconductor wafer processing App 20060110685 - Li; Wai-kin ;   et al. | 2006-05-25 |
Stray light feedback for dose control in semiconductor lithography systems App 20060110666 - Marokkey; Sajan ;   et al. | 2006-05-25 |
Apparatus and method to improve resist line roughness in semiconductor wafer processing Grant 7,018,779 - Li , et al. March 28, 2 | 2006-03-28 |
Film stack having under layer for preventing pinhole defects App 20060003153 - Brodsky; Colin J. ;   et al. | 2006-01-05 |
Suppressing lithography at a wafer edge Grant 6,960,532 - Chen , et al. November 1, 2 | 2005-11-01 |
Method of patterning damascene structure in integrated circuit design Grant 6,949,459 - Li , et al. September 27, 2 | 2005-09-27 |
Suppressing lithography at a wafer edge App 20040171267 - Chen, Linda ;   et al. | 2004-09-02 |
Apparatus and method to improve resist line roughness in semiconductor wafer processing App 20040131979 - Li, Wai-kin ;   et al. | 2004-07-08 |