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Polishing composition and method utilizing abrasive particles treated with an aminosilane Grant 11,034,862 - Grumbine , et al. June 15, 2 | 2021-06-15 |
Polishing Composition And Method Utilizing Abrasive Particles Treated With An Aminosilane App 20200056069 - Grumbine; Steven ;   et al. | 2020-02-20 |
Polishing composition and method utilizing abrasive particles treated with an aminosilane Grant 10,508,219 - Grumbine , et al. Dec | 2019-12-17 |
CMP porous pad with particles in a polymeric matrix Grant 9,951,054 - Li , et al. April 24, 2 | 2018-04-24 |
Polishing composition and method utilizing abrasive particles treated with an aminosilane Grant 9,617,450 - Grumbine , et al. April 11, 2 | 2017-04-11 |
Polishing Composition And Method Utilizing Abrasive Particles Treated With An Aminosilane App 20170051181 - GRUMBINE; Steven ;   et al. | 2017-02-23 |
Polishing composition and method utilizing abrasive particles treated with an aminosilane Grant 9,028,572 - Grumbine , et al. May 12, 2 | 2015-05-12 |
Metal cations for initiating polishing Grant 8,637,404 - Carter , et al. January 28, 2 | 2014-01-28 |
Halide anions for metal removal rate control Grant 8,591,763 - Li November 26, 2 | 2013-11-26 |
Iodate-containing chemical-mechanical polishing compositions and methods Grant 8,551,202 - Li , et al. October 8, 2 | 2013-10-08 |
Compositions for CMP of semiconductor materials Grant 8,529,680 - De Rege Thesauro , et al. September 10, 2 | 2013-09-10 |
Barrier slurry for low-k dielectrics Grant 8,252,687 - Li , et al. August 28, 2 | 2012-08-28 |
Tantalum CMP compositions and methods Grant 7,998,228 - Li August 16, 2 | 2011-08-16 |
Metal Cations For Initiating Polishing App 20110065364 - CARTER; Phillip W. ;   et al. | 2011-03-17 |
Compositions For Cmp Of Semiconductor Materials App 20100314576 - THESAURO; Francesco DE REGE ;   et al. | 2010-12-16 |
Cmp Porous Pad With Particles In A Polymeric Matrix App 20100273399 - Li; Shoutian ;   et al. | 2010-10-28 |
Halide anions for metal removal rate control Grant 7,820,067 - Li October 26, 2 | 2010-10-26 |
Compositions and methods for CMP of semiconductor materials Grant 7,803,203 - De Rege Thesauro , et al. September 28, 2 | 2010-09-28 |
Barrier slurry for low-k dielectrics App 20100075502 - Li; Shoutian ;   et al. | 2010-03-25 |
Compositions And Methods For Ruthenium And Tantalum Barrier Cmp App 20090124173 - Li; Shoutian | 2009-05-14 |
Polishing Composition And Method Utilizing Abrasive Particles Treated With An Aminosilane App 20090081927 - Grumbine; Steven ;   et al. | 2009-03-26 |
Halide Anions For Metal Removal Rate Control App 20080096390 - Li; Shoutian | 2008-04-24 |
Tantalum CMP compositions and methods App 20080016784 - Li; Shoutian | 2008-01-24 |
CMP method for copper-containing substrates App 20070249167 - Zhang; Jian ;   et al. | 2007-10-25 |
Iodate-containing chemical-mechanical polishing compositions and methods App 20070224919 - Li; Shoutian ;   et al. | 2007-09-27 |
Halide anions for metal removal rate control App 20070224822 - Li; Shoutian | 2007-09-27 |
Compositions And Methods For Cmp Of Semiconductor Materials App 20070181535 - De Rege Thesauro; Francesco ;   et al. | 2007-08-09 |
Metal cations for initiating polishing App 20070068087 - Carter; Phillip W. ;   et al. | 2007-03-29 |
Alkyl-substituted aryl polyalkoxylates and their use in fuels App 20030131527 - Colucci, William J. ;   et al. | 2003-07-17 |
(Meth) acrylate copolymer pour point depressants Grant 6,255,261 - Liesen , et al. July 3, 2 | 2001-07-03 |