Patent | Date |
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Method for generating high order harmonic frequencies and MEMS resonator Grant 11,398,808 - Li , et al. July 26, 2 | 2022-07-26 |
Acceleration sensing structure and accelerometer Grant 11,287,440 - Li , et al. March 29, 2 | 2022-03-29 |
Acceleration Sensing Structure And Accelerometer App 20210263067 - LI; Sheng-Shian ;   et al. | 2021-08-26 |
Method For Generating High Order Harmonic Frequencies And Mems Resonator App 20200382097 - LI; Sheng-Shian ;   et al. | 2020-12-03 |
Thermal-piezoresistive oscillator-based aerosol sensor and aerosol sensing method Grant 10,705,053 - Li , et al. | 2020-07-07 |
Resonator and resonator array Grant 10,511,280 - Li , et al. Dec | 2019-12-17 |
Thermal-piezoresistive Oscillator-based Aerosol Sensor And Aerosol Sensing Method App 20190227034 - LI; Sheng-Shian ;   et al. | 2019-07-25 |
Resonator And Resonator Array App 20190229701 - LI; Sheng-Shian ;   et al. | 2019-07-25 |
Active type temperature compensation resonator structure Grant 9,899,987 - Li , et al. February 20, 2 | 2018-02-20 |
Cmos-mems Resonant Transducer And Method For Fabricating The Same App 20170217764 - LI; SHENG-SHIAN ;   et al. | 2017-08-03 |
MEMS resonator active temperature compensation method and thermally-actuated MEMS resonator Grant 9,630,830 - Li , et al. April 25, 2 | 2017-04-25 |
Ultra low power thermally-actuated oscillator and driving circuit thereof Grant 9,621,105 - Li , et al. April 11, 2 | 2017-04-11 |
Ultra Low Power Thermally-actuated Oscillator And Driving Circuit Thereof App 20160336941 - LI; Sheng-Shian ;   et al. | 2016-11-17 |
Method for manufacturing a vibrating MEMS circuit Grant 9,369,105 - Li , et al. June 14, 2 | 2016-06-14 |
Active Type Temperature Compensation Resonator Structure App 20150326199 - Li; Sheng-Shian ;   et al. | 2015-11-12 |
Micromechanical resonator oscillator structure and driving method thereof Grant 9,024,708 - Li , et al. May 5, 2 | 2015-05-05 |
Mems Resonator Active Temperature Compensation Method And Thermally-actuated Mems Resonator App 20140339953 - LI; Sheng-Shian ;   et al. | 2014-11-20 |
MEMS resonator, manufacturing method thereof, and signal processing method using MEMS resonator Grant 8,854,149 - Li , et al. October 7, 2 | 2014-10-07 |
Micromechanical Resonator Oscillator Structure And Driving Method Thereof App 20140002200 - LI; Sheng-Shian ;   et al. | 2014-01-02 |
Mems Resonator, Manufactoring Method Thereof, And Signal Processing Method Using Mems Resonator App 20140002201 - LI; Sheng-Shian ;   et al. | 2014-01-02 |
Planarized Sacrificial Layer For Mems Fabrication App 20130020279 - Lee; Seungbae ;   et al. | 2013-01-24 |
Planarized sacrificial layer for MEMS fabrication Grant 8,278,802 - Lee , et al. October 2, 2 | 2012-10-02 |
MEMS vibrating structure using a single-crystal piezoelectric thin-film layer having domain inversions Grant 8,035,280 - Li , et al. October 11, 2 | 2011-10-11 |
Mems Vibrating Structure Using A Single-crystal Piezoelectric Thin-film Layer Having Domain Inversions App 20110148252 - Li; Sheng-Shian ;   et al. | 2011-06-23 |
MEMS vibrating structure using a single-crystal piezoelectric thin-film layer having domain inversions Grant 7,898,158 - Li , et al. March 1, 2 | 2011-03-01 |
MEMS vibrating structure using a single-crystal piezoelectric thin film layer Grant 7,586,239 - Li , et al. September 8, 2 | 2009-09-08 |
Micromechanical structures having a capacitive transducer gap filled with a dielectric and method of making same Grant 7,551,043 - Nguyen , et al. June 23, 2 | 2009-06-23 |
High-Q micromechanical resonator devices and filters utilizing same Grant 7,295,088 - Nguyen , et al. November 13, 2 | 2007-11-13 |
Micromechanical structures having a capacitive transducer gap filled with a dielectric and method of making same App 20070046398 - Nguyen; Clark T.-C. ;   et al. | 2007-03-01 |
High-Q micromechanical resonator devices and filters utilizing same App 20050206479 - Nguyen, Clark T.C. ;   et al. | 2005-09-22 |