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Process To Reduce Plasma Induced Damage
App 20220293793 - LI; Jianheng ; et al. | 2022-09-15 |
Process to reduce plasma induced damage
Grant 11,380,801 - Li , et al. July 5, 2 | 2022-07-05 |
Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features
App 20220157601 - Li; Jianheng ; et al. | 2022-05-19 |
Halidosilane Compounds And Compositions And Processes For Depositing Silicon-containing Films Using Same
App 20220154331 - LEI; XINJIAN ; et al. | 2022-05-19 |
Processes for depositing silicon-containing films using halidosilane compounds
Grant 11,268,190 - Lei , et al. March 8, 2 | 2022-03-08 |
Precursors and flowable CVD methods for making low-k films to fill surface features
Grant 11,270,880 - Li , et al. March 8, 2 | 2022-03-08 |
Methods for Depositing a Conformal Metal or Metalloid Silicon Nitride Film and Resultant Films
App 20210388489 - Lei; Xinjian ; et al. | 2021-12-16 |
Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films
Grant 11,142,658 - Spence , et al. October 12, 2 | 2021-10-12 |
Methods for depositing a conformal metal or metalloid silicon nitride film and resultant films
Grant 11,104,990 - Lei , et al. August 31, 2 | 2021-08-31 |
Precursors and flowable CVD methods for making low-K films to fill surface features
Grant 11,017,998 - Li , et al. May 25, 2 | 2021-05-25 |
Compositions And Methods Using Same For Deposition Of Silicon-containing Film
App 20210140040 - LI; JIANHENG ; et al. | 2021-05-13 |
Method and precursors for manufacturing 3D devices
Grant 10,985,013 - Li , et al. April 20, 2 | 2021-04-20 |
Chamber liner
Grant 10,923,327 - Li , et al. February 16, 2 | 2021-02-16 |
Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features
App 20210043446 - Li; Jianheng ; et al. | 2021-02-11 |
Process To Reduce Plasma Induced Damage
App 20200395485 - Li; Jianheng ; et al. | 2020-12-17 |
Process to reduce plasma induced damage
Grant 10,804,408 - Li , et al. October 13, 2 | 2020-10-13 |
Methods for improved silicon nitride passivation films
Grant 10,748,759 - Li , et al. A | 2020-08-18 |
Methods For Improved Silicon Nitride Passivation Films
App 20200227249 - LI; Jianheng ; et al. | 2020-07-16 |
Heat Conductive Spacer For Plasma Processing Chamber
App 20200098549 - PARK; Beom Soo ; et al. | 2020-03-26 |
Precursors And Flowable CVD Methods For Making Low-K Films To Fill Surface Features
App 20200058496 - Li; Jianheng ; et al. | 2020-02-20 |
Chamber Liner
App 20200043706 - LI; Jianheng ; et al. | 2020-02-06 |
Halidosilane Compounds And Compositions And Processes For Depositing Silicon-containing Films Using Same
App 20200032389 - Lei; Xinjian ; et al. | 2020-01-30 |
Siloxane Compositions and Methods for Using the Compositions to Deposit Silicon Containing Films
App 20190382886 - Li; Jianheng ; et al. | 2019-12-19 |
Bisaminoalkoxysilane Compounds And Methods For Using Same To Deposit Silicon-Containing Films
App 20190359637 - Spence; Daniel P. ; et al. | 2019-11-28 |
Precursors and flowable CVD methods for making low-K films to fill surface features
Grant 10,468,244 - Li , et al. No | 2019-11-05 |
Method and Precursors for Manufacturing 3D Devices
App 20190304775 - Li; Jianheng ; et al. | 2019-10-03 |
Compositions And Methods Using Same For Deposition Of Silicon-containing Film
App 20190292658 - Li; Jianheng ; et al. | 2019-09-26 |
Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films
Grant 10,421,766 - Spence , et al. Sept | 2019-09-24 |
Alkyl-alkoxysilacyclic compounds
Grant 10,395,920 - Vrtis , et al. A | 2019-08-27 |
Method and precursors for manufacturing 3D devices
Grant 10,354,860 - Li , et al. July 16, 2 | 2019-07-16 |
Barrier materials for display devices
Grant 10,319,862 - Ridgeway , et al. | 2019-06-11 |
Process To Reduce Plasma Induced Damage
App 20190115475 - LI; Jianheng ; et al. | 2019-04-18 |
Compositions And Methods Using Same For Deposition Of Silicon-containing Film
App 20190055645 - Li; Jianheng ; et al. | 2019-02-21 |
Compositions and methods using same for carbon doped silicon containing films
Grant 10,145,008 - Chandra , et al. De | 2018-12-04 |
Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features
App 20180315598 - Li; Jianheng ; et al. | 2018-11-01 |
Compositions and methods using same for deposition of silicon-containing film
Grant 10,106,890 - Li , et al. October 23, 2 | 2018-10-23 |
Method and Composition for Providing Pore Sealing Layer on Porous Low Dielectric Constant Films
App 20180277360 - Li; Jianheng ; et al. | 2018-09-27 |
Methods For Depositing A Conformal Metal Or Metalloid Silicon Nitride Film And Resultant Films
App 20180245215 - Lei; Xinjian ; et al. | 2018-08-30 |
Alkyl-Alkoxysilacyclic Compounds And Methods For Depositing Films Using Same
App 20180233355 - Vrtis; Raymond Nicholas ; et al. | 2018-08-16 |
Alkyl-alkoxysilacyclic compounds
Grant 9,922,818 - Vrtis , et al. March 20, 2 | 2018-03-20 |
Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features
App 20180061636 - Li; Jianheng ; et al. | 2018-03-01 |
Compositions And Methods Using Same For Carbon Doped Silicon Containing Films
App 20180023192 - Chandra; Haripin ; et al. | 2018-01-25 |
Compositions And Methods Using Same For Deposition Of Silicon-containing Film
App 20170335449 - LI; Jianheng ; et al. | 2017-11-23 |
Bisaminoalkoxysilane Compounds And Methods For Using Same To Deposit Silicon-containing Films
App 20160237100 - Spence; Daniel P. ; et al. | 2016-08-18 |
Method And Precursors For Manufacturing 3d Devices
App 20160225616 - Li; Jianheng ; et al. | 2016-08-04 |
Method And Composition For Providing Pore Sealing Layer On Porous Low Dielectric Constant Films
App 20160049293 - Li; Jianheng ; et al. | 2016-02-18 |
Alkyl-Alkoxysilacyclic Compounds and Methods for Depositing Films Using Same
App 20150364321 - Vrtis; Raymond Nicholas ; et al. | 2015-12-17 |
Barrier Materials For Display Devices
App 20150021599 - Ridgeway; Robert Gordon ; et al. | 2015-01-22 |
Liquid Composite High-intensity Sweetener And Preparation Method Thereof
App 20140308422 - CHEN; Ziang ; et al. | 2014-10-16 |
Non-oxygen Containing Silicon-based Films And Methods Of Forming The Same
App 20140030448 - Bowen; Heather Regina ; et al. | 2014-01-30 |
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