Patent | Date |
---|
Planarization process Grant 10,068,803 - Zhu , et al. September 4, 2 | 2018-09-04 |
Method for manufacturing fin structure Grant 9,691,624 - Zhu , et al. June 27, 2 | 2017-06-27 |
Semiconductor Device And Method For Manufacturing The Same App 20160293695 - Xu; Jing ;   et al. | 2016-10-06 |
Method for manufacturing fin structure Grant 9,419,112 - Zhu , et al. August 16, 2 | 2016-08-16 |
Method for manufacturing dummy gate in gate-last process and dummy gate in gate-last process Grant 9,419,095 - Li , et al. August 16, 2 | 2016-08-16 |
Planarization process Grant 9,406,549 - Zhu , et al. August 2, 2 | 2016-08-02 |
Method for making HKMG dummy gate structure with amorphous/ONO masking structure and procedure Grant 9,331,172 - Li , et al. May 3, 2 | 2016-05-03 |
Semiconductor device and method for manufacturing the same Grant 9,306,003 - Xu , et al. April 5, 2 | 2016-04-05 |
Semiconductor Device And Method For Manufacturing The Same App 20160020274 - Xu; Jing ;   et al. | 2016-01-21 |
Method for manufacturing dummy gate in gate-last process and dummy gate in gate-last process Grant 9,202,890 - Li , et al. December 1, 2 | 2015-12-01 |
Planarization Process App 20150325452 - ZHU; Huilong ;   et al. | 2015-11-12 |
Method For Manufacturing Fin Structure App 20150303274 - ZHU; Huilong ;   et al. | 2015-10-22 |
Method For Manufacturing Fin Structure App 20150294879 - Zhu; Huilong ;   et al. | 2015-10-15 |
Planarization Process App 20150262883 - Zhu; Huilong ;   et al. | 2015-09-17 |
Method for manufacturing dummy gate in gate-last process and dummy gate in gate-last process Grant 9,111,863 - Li , et al. August 18, 2 | 2015-08-18 |
Method For Manufacturing Semiconductor Device App 20150214332 - Li; Chunlong ;   et al. | 2015-07-30 |
Method for Manufacturing Dummy Gate in Gate-Last Process and Dummy Gate in Gate-Last Process App 20150035087 - Li; Chunlong ;   et al. | 2015-02-05 |
Heating method for maintaining a stable thermal budget Grant 8,926,321 - Li January 6, 2 | 2015-01-06 |
Method for Manufacturing Dummy Gate in Gate-Last Process and Dummy Gate in Gate-Last Process App 20140332958 - Li; Chunlong ;   et al. | 2014-11-13 |
Method for Manufacturing Dummy Gate in Gate-Last Process and Dummy Gate in Gate-Last Process App 20140273426 - Li; Chunlong ;   et al. | 2014-09-18 |
Wafer transfer apparatus and wafer transfer method Grant 8,834,155 - Li , et al. September 16, 2 | 2014-09-16 |
Semiconductor device and method of manufacturing the same Grant 8,779,475 - Wang , et al. July 15, 2 | 2014-07-15 |
Method for manufacturing a semiconductor device Grant 8,703,567 - Wang , et al. April 22, 2 | 2014-04-22 |
Semiconductor Device And Method Of Manufacturing The Same App 20130105859 - Wang; Guilei ;   et al. | 2013-05-02 |
Semiconductor Device And Method Of Manufacturing The Same App 20120319215 - Wang; Guilei ;   et al. | 2012-12-20 |
Thermal oxidation system and method for preventing water from accumulation App 20120269710 - Li; Chunlong | 2012-10-25 |
Heating Method For Maintaining A Stable Thermal Budget App 20120270165 - Li; Chunlong | 2012-10-25 |
Wafer Transfer Apparatus And Wafer Transfer Method App 20120247723 - Li; Chunlong ;   et al. | 2012-10-04 |
Semiconductor Fabrication Method App 20120252225 - Li; Chunlong ;   et al. | 2012-10-04 |
Method for manufacturing semiconductor device Grant 8,247,278 - Zhu , et al. August 21, 2 | 2012-08-21 |
Method For Manufacturing Semiconductor Device App 20120171833 - Zhu; Huilong ;   et al. | 2012-07-05 |
Method and System for Furnace Cleaning App 20080314418 - Zhao; Xing ;   et al. | 2008-12-25 |