Lew; Jen Sern

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lew; Jen Sern.The latest application filed is for "method and apparatus for backside cleaning of substrates".

Company Profile

3.9.9

Lew; Jen Sern - Singapore SG

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity Grant 11,111,583 - Thirunavukarasu , et al. September 7, 2	2021-09-07
Sealing structure for workpiece to substrate bonding in a processing chamber Grant 10,978,334 - Toh , et al. April 13, 2	2021-04-13
Substrate carrier for active/passive bonding and de-bonding of a substrate Grant 10,607,870 - Lew , et al.	2020-03-31
Method and apparatus for backside cleaning of substrates Grant 10,549,324 - Thirunavukarasu , et al. Fe	2020-02-04
Method And Apparatus For Backside Cleaning Of Substrates App 20180257116 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al.	2018-09-13
Method and apparatus for backside cleaning of substrates Grant 9,993,853 - Thirunavukarasu , et al. June 12, 2	2018-06-12
Substrate Carrier System Utilizing Electrostatic Chucking To Accommodate Substrate Size Heterogeneity App 20180112310 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al.	2018-04-26
Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity Grant 9,845,533 - Thirunavukarasu , et al. December 19, 2	2017-12-19
Methods and apparatus for correcting substrate deformity Grant 9,818,624 - Lew , et al. November 14, 2	2017-11-14
Electrostatic carrier for handling substrates for processing Grant 9,740,111 - Sundarrajan , et al. August 22, 2	2017-08-22
Substrate Carrier For Active/passive Bonding And De-bonding Of A Substrate App 20170103908 - LEW; JEN SERN ; et al.	2017-04-13
Methods And Apparatus For Correcting Substrate Deformity App 20160322234 - LEW; Jen Sern ; et al.	2016-11-03
Self-cleaning Substrate Contact Surfaces App 20160236245 - LEW; JEN SERN ; et al.	2016-08-18
Method And Apparatus For Backside Cleaning Of Substrates App 20160151808 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al.	2016-06-02
Substrate Carrier System Utilizing Electrostatic Chucking To Accommodate Substrate Size Heterogeneity App 20160133782 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al.	2016-05-12
Electrostatic Carrier For Handling Substrates For Processing App 20150331337 - Sundarrajan; Arvind ; et al.	2015-11-19

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