Levy; Ady

Patent Applications and Registrations

Patent applications and USPTO patent grants for Levy; Ady.The latest application filed is for "process-induced displacement characterization during semiconductor production".

Company Profile

6.88.85

Levy; Ady - San Jose CA
Levy; Ady - Sunnyvale CA
Levy, Ady - Sunnivale CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
System and method for tilt calculation based on overlay metrology measurements Grant 11,360,398 - Volkovich , et al. June 14, 2	2022-06-14
Process-Induced Displacement Characterization During Semiconductor Production App 20220005714 - Vukkadala; Pradeep ; et al.	2022-01-06
Process-induced displacement characterization during semiconductor production Grant 11,164,768 - Vukkadala , et al. November 2, 2	2021-11-02
System And Method For Tilt Calculation Based On Overlay Metrology Measurements App 20210149313 - Volkovich; Roie ; et al.	2021-05-20
System and method for process-induced distortion prediction during wafer deposition Grant 10,475,712 - Levy , et al. Nov	2019-11-12
System and method for field-by-field overlay process control using measured and estimated field parameters Grant 10,466,596 - Pierson , et al. No	2019-11-05
Process-Induced Displacement Characterization During Semiconductor Production App 20190333794 - Vukkadala; Pradeep ; et al.	2019-10-31
Apparatus and methods for detecting overlay errors using scatterometry Grant 10,451,412 - Adel , et al. Oc	2019-10-22
Overlay control with non-zero offset prediction Grant 10,409,171 - Adel , et al. Sept	2019-09-10
Process-sensitive metrology systems and methods Grant 10,216,096 - Lee , et al. Feb	2019-02-26
Overlay Control with Non-Zero Offset Prediction App 20180253017 - Adel; Michael E. ; et al.	2018-09-06
Model-based hot spot monitoring Grant 10,030,965 - Pandev , et al. July 24, 2	2018-07-24
Method and system for determining in-plane distortions in a substrate Grant 10,024,654 - Smith , et al. July 17, 2	2018-07-17
System and Method for Process-Induced Distortion Prediction During Wafer Deposition App 20180096906 - Levy; Ady ; et al.	2018-04-05
Feed forward of metrology data in a metrology system Grant 9,903,711 - Levy , et al. February 27, 2	2018-02-27
On-device metrology Grant 9,875,946 - Shchegrov , et al. January 23, 2	2018-01-23
Small-angle scattering X-ray metrology systems and methods Grant 9,846,132 - Bakeman , et al. December 19, 2	2017-12-19
Apparatus for measuring overlay errors Grant 9,702,693 - Ghinovker , et al. July 11, 2	2017-07-11
Method and system for universal target based inspection and metrology Grant 9,576,861 - Park , et al. February 21, 2	2017-02-21
Process-Sensitive Metrology Systems and Methods App 20170045826 - Lee; Myungjun ; et al.	2017-02-16
Model-Based Hot Spot Monitoring App 20160327605 - Pandev; Stilian Ivanov ; et al.	2016-11-10
Apparatus For Measuring Overlay Errors App 20160313116 - Ghinovker; Mark ; et al.	2016-10-27
Method and System for Determining In-Plane Distortions in a Substrate App 20160290789 - Smith; Mark D. ; et al.	2016-10-06
Feed Forward of Metrology Data in a Metrology System App 20160290796 - Levy; Ady ; et al.	2016-10-06
Acquisition of information for a construction site Grant 9,222,771 - Rosengaus , et al. December 29, 2	2015-12-29
System and Method for Field-By-Field Overlay Process Control Using Measured and Estimated Field Parameters App 20150241790 - Pierson; Bill ; et al.	2015-08-27
Small-angle Scattering X-ray Metrology Systems And Methods App 20150110249 - Bakeman; Michael S. ; et al.	2015-04-23
On-device Metrology App 20140316730 - Shchegrov; Andrei V. ; et al.	2014-10-23
Method and System for Universal Target Based Inspection and Metrology App 20140199791 - Park; Allen ; et al.	2014-07-17
Solar metrology methods and apparatus Grant 8,604,447 - Young , et al. December 10, 2	2013-12-10
Methods and Systems for Determining a Critical Dimension and Overlay of a Specimen App 20130314710 - Levy; Ady ; et al.	2013-11-28
Methods and systems for determining a critical dimension and overlay of a specimen Grant 8,502,979 - Levy , et al. August 6, 2	2013-08-06
LED solar illuminator Grant 8,436,554 - Zhao , et al. May 7, 2	2013-05-07
Acquisition of Information for a Construction Site App 20130096873 - Rosengaus; Eliezer ; et al.	2013-04-18
Measuring sheet resistance and other properties of a semiconductor Grant 8,415,961 - Zhao , et al. April 9, 2	2013-04-09
Solar Metrology Methods And Apparatus App 20130048873 - Young; Scott ; et al.	2013-02-28
Methods And Systems For Determining A Critical Dimension And Overlay Of A Specimen App 20130039460 - Levy; Ady ; et al.	2013-02-14
Overlay marks, methods of overlay mark design and methods of overlay measurements Grant 8,330,281 - Ghinovker , et al. December 11, 2	2012-12-11
Systems and Methods for Determining One or More Characteristics of a Specimen Using Radiation in the Terahertz Range App 20120281275 - Levy; Ady ; et al.	2012-11-08
LED Solar Illuminator App 20120256559 - Zhao; Guoheng ; et al.	2012-10-11
Methods and systems for determining a critical dimension and overlay of a specimen Grant 8,179,530 - Levy , et al. May 15, 2	2012-05-15
Priori crack detection in solar photovoltaic wafers by detecting bending at edges of wafers Grant 8,023,110 - Ngai , et al. September 20, 2	2011-09-20
Detecting and repairing defects of photovoltaic devices Grant 7,989,729 - Zhao , et al. August 2, 2	2011-08-02
Measurement and control of strained devices Grant 7,951,672 - Wack , et al. May 31, 2	2011-05-31
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,933,016 - Mieher , et al. April 26, 2	2011-04-26
Measurement and control of strained devices App 20110027919 - Wack; Daniel C. ; et al.	2011-02-03
Overlay marks and methods of manufacturing such marks Grant 7,879,627 - Ghinovker , et al. February 1, 2	2011-02-01
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,876,440 - Mieher , et al. January 25, 2	2011-01-25
Measurement and control of strained devices Grant 7,838,309 - Wack , et al. November 23, 2	2010-11-23
Methods And Systems For Controlling Variation In Dimensions Of Patterned Features Across A Wafer App 20100279213 - Levy; Ady ; et al.	2010-11-04
Parametric profiling using optical spectroscopic systems Grant 7,826,071 - Shchegrov , et al. November 2, 2	2010-11-02
Methods And Systems For Determining A Critical Dimension And Overlay Of A Specimen App 20100271621 - Levy; Ady ; et al.	2010-10-28
Systems And Methods For Determining One Or More Characteristics Of A Specimen Using Radiation In The Terahertz Range App 20100235114 - Levy; Ady ; et al.	2010-09-16
Methods and systems for lithography process control Grant 7,767,956 - Lakkapragada , et al. August 3, 2	2010-08-03
Methods and systems for determining a critical dimension and overlay of a specimen Grant 7,751,046 - Levy , et al. July 6, 2	2010-07-06
Segmented optical and electrical testing for photovoltaic devices Grant 7,733,111 - Zhao , et al. June 8, 2	2010-06-08
Defect detection using time delay lock-in thermography (LIT) and dark field LIT Grant 7,709,794 - Zhao , et al. May 4, 2	2010-05-04
Apparatus And Methods For Detecting Overlay Errors Using Scatterometry App 20100091284 - Mieher; Walter D. ; et al.	2010-04-15
Defect Detection Using Time Delay Lock-in Thermography (lit) And Dark Field Lit App 20100073665 - Zhao; Guoheng ; et al.	2010-03-25
Defect Detection and Response App 20100074515 - Zhao; Guoheng ; et al.	2010-03-25
Test structures and methods for monitoring or controlling a semiconductor fabrication process Grant 7,678,516 - Monahan , et al. March 16, 2	2010-03-16
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,663,753 - Mieher , et al. February 16, 2	2010-02-16
Method for determining lithographic focus and exposure Grant 7,656,512 - Mieher , et al. February 2, 2	2010-02-02
Overlay Marks, Methods Of Overlay Mark Design And Methods Of Overlay Measurements App 20090291513 - Ghinovker; Mark ; et al.	2009-11-26
Apparatus And Methods For Detecting Overlay Errors Using Scatterometry App 20090284744 - Mieher; Walter D. ; et al.	2009-11-19
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,564,557 - Mieher , et al. July 21, 2	2009-07-21
Parametric Profiling Using Optical Spectroscopic Systems App 20090135416 - Shchegrov; Andrei V. ; et al.	2009-05-28
Methods And Systems For Lithography Process Control App 20090079974 - Lakkapragada; Suresh ; et al.	2009-03-26
Methods and systems for lithography process control Grant 7,462,814 - Lakkapragada , et al. December 9, 2	2008-12-09
Methods and systems for determining a presence of macro and micro defects on a specimen Grant 7,460,981 - Bultman , et al. December 2, 2	2008-12-02
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,433,040 - Mieher , et al. October 7, 2	2008-10-07
Method For Determining Lithographic Focus And Exposure App 20080192221 - Mieher; Walter ; et al.	2008-08-14
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,385,699 - Mieher , et al. June 10, 2	2008-06-10
Method for determining lithographic focus and exposure Grant 7,382,447 - Mieher , et al. June 3, 2	2008-06-03
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,379,183 - Mieher , et al. May 27, 2	2008-05-27
Apparatus And Methods For Detecting Overlay Errors Using Scatterometry App 20080094630 - Mieher; Walter D. ; et al.	2008-04-24
Methods and systems for determining a property of a specimen prior to, during, or subsequent to lithography Grant 7,349,090 - Wack , et al. March 25, 2	2008-03-25
Apparatus And Methods For Detecting Overlay Errors Using Scatterometry App 20080049226 - Mieher; Walter D. ; et al.	2008-02-28
Apparatus And Methods For Detecting Overlay Errors Using Scatterometry App 20080024766 - Mieher; Walter D. ; et al.	2008-01-31
Overlay Marks, Methods Of Overlay Mark Design And Methods Of Overlay Measurements App 20080023855 - Ghinovker; Mark ; et al.	2008-01-31
Overlay marks, methods of overlay mark design and methods of overlay measurements Grant 7,317,824 - Ghinovker , et al. January 8, 2	2008-01-08
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,317,531 - Mieher , et al. January 8, 2	2008-01-08
Systems and methods for modifying a reticle's optical properties Grant 7,303,842 - Watson , et al. December 4, 2	2007-12-04
Method for determining and correcting reticle variations Grant 7,300,725 - Watson , et al. November 27, 2	2007-11-27
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,301,634 - Mieher , et al. November 27, 2	2007-11-27
Method for monitoring a reticle Grant 7,300,729 - Watson , et al. November 27, 2	2007-11-27
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,298,481 - Mieher , et al. November 20, 2	2007-11-20
Systems and methods for mitigating variances on a patterned wafer using a prediction model Grant 7,297,453 - Watson , et al. November 20, 2	2007-11-20
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,289,213 - Mieher , et al. October 30, 2	2007-10-30
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,280,212 - Mieher , et al. October 9, 2	2007-10-09
Parametric profiling using optical spectroscopic systems Grant 7,280,230 - Shchegrov , et al. October 9, 2	2007-10-09
Overlay marks, methods of overlay mark design and methods of overlay measurements Grant 7,274,814 - Ghinovker , et al. September 25, 2	2007-09-25
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,242,477 - Mieher , et al. July 10, 2	2007-07-10
Portable scanning electron microscope App 20070145267 - Adler; David L. ; et al.	2007-06-28
Focus masking structures, focus patterns and measurements thereof App 20070108368 - Mieher; Walter Dean ; et al.	2007-05-17
Methods and systems for determining a thin film characteristic and an electrical property of a specimen Grant 7,196,782 - Fielden , et al. March 27, 2	2007-03-27
Overlay marks, methods of overlay mark design and methods of overlay measurements Grant 7,181,057 - Adel , et al. February 20, 2	2007-02-20
Focus masking structures, focus patterns and measurements thereof Grant 7,175,945 - Mieher , et al. February 13, 2	2007-02-13
Methods and systems for determining a composition and a thickness of a specimen Grant 7,139,083 - Fielden , et al. November 21, 2	2006-11-21
Methods and systems for determining an adhesion characteristic and a thickness of a specimen Grant 7,130,029 - Wack , et al. October 31, 2	2006-10-31
Systems and methods for mitigating variances on a patterned wafer using a prediction model App 20060240336 - Watson; Sterling G. ; et al.	2006-10-26
Systems and methods for modifying a reticle's optical properties App 20060234139 - Watson; Sterling G. ; et al.	2006-10-19
Method for determining and correcting reticle variations App 20060234145 - Watson; Sterling G. ; et al.	2006-10-19
Method for monitoring a reticle App 20060234144 - Watson; Sterling G. ; et al.	2006-10-19
Overlay marks, methods of overlay mark design and methods of overlay measurements App 20060204073 - Ghinovker; Mark ; et al.	2006-09-14
Methods and systems for determining a presence of defects and a thin film characteristic of a specimen Grant 7,106,425 - Bultman , et al. September 12, 2	2006-09-12
Overlay marks, methods of overlay mark design and methods of overlay measurements App 20060177120 - Ghinovker; Mark ; et al.	2006-08-10
Methods and systems for controlling variation in dimensions of patterned features across a wafer App 20060141376 - Levy; Ady ; et al.	2006-06-29
Methods and systems for lithography process control App 20060138366 - Lakkapragada; Suresh ; et al.	2006-06-29
Overlay marks, methods of overlay mark design and methods of overlay measurements Grant 7,068,833 - Ghinovker , et al. June 27, 2	2006-06-27
Methods and systems for determining a presence of macro and micro defects on a specimen App 20060072807 - Bultman; Gary ; et al.	2006-04-06
Methods and systems for determining overlay and flatness of a specimen Grant 7,006,235 - Levy , et al. February 28, 2	2006-02-28
Test structures and methods for monitoring or controlling a semiconductor fabrication process App 20060024850 - Monahan; Kevin ; et al.	2006-02-02
Methods and systems for lithography process control Grant 6,987,572 - Lakkapragada , et al. January 17, 2	2006-01-17
Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimen Grant 6,950,196 - Fielden , et al. September 27, 2	2005-09-27
Focus masking structures, focus patterns and measurements thereof App 20050208391 - Mieher, Walter Dean ; et al.	2005-09-22
Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition process Grant 6,946,394 - Fielden , et al. September 20, 2	2005-09-20
Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen Grant 6,919,957 - Nikoonahad , et al. July 19, 2	2005-07-19
Methods and systems for determining flatness, a presence of defects, and a thin film characteristic of a specimen Grant 6,917,419 - Fielden , et al. July 12, 2	2005-07-12
Methods and systems for determining a property of a specimen prior to, during, or subsequent to an etch process Grant 6,917,433 - Levy , et al. July 12, 2	2005-07-12
Methods and systems for determining a critical dimension and overlay of a specimen Grant 6,891,627 - Levy , et al. May 10, 2	2005-05-10
Methods and systems for determining an implant characteristic and a presence of defects on a specimen Grant 6,891,610 - Nikoonahad , et al. May 10, 2	2005-05-10
Focus masking structures, focus patterns and measurements thereof Grant 6,884,552 - Mieher , et al. April 26, 2	2005-04-26
Apparatus and methods for detecting overlay errors using scatterometry App 20040257571 - Mieher, Walter D. ; et al.	2004-12-23
Methods and systems for determining a presence of macro and micro defects on a specimen Grant 6,829,559 - Bultman , et al. December 7, 2	2004-12-07
Methods and systems for determining a critical dimension and overlay of a specimen App 20040235205 - Levy, Ady ; et al.	2004-11-25
Apparatus and methods for detecting overlay errors using scatterometry App 20040233439 - Mieher, Walter D. ; et al.	2004-11-25
Apparatus and methods for detecting overlay errors using scatterometry App 20040233443 - Mieher, Walter D. ; et al.	2004-11-25
Apparatus and methods for detecting overlay errors using scatterometry App 20040233441 - Mieher, Walter D. ; et al.	2004-11-25
Apparatus and methods for detecting overlay errors using scatterometry App 20040233444 - Mieher, Walter D. ; et al.	2004-11-25
Apparatus and methods for detecting overlay errors using scatterometry App 20040233442 - Mieher, Walter D. ; et al.	2004-11-25
Apparatus and methods for detecting overlay errors using scatterometry App 20040233440 - Mieher, Walter D. ; et al.	2004-11-25
Methods and systems for determining a presence of macro defects and overlay of a specimen Grant 6,818,459 - Wack , et al. November 16, 2	2004-11-16
Methods and systems for determining a characteristic of a specimen prior to, during, or subsequent to ion implantation Grant 6,812,045 - Nikoonahad , et al. November 2, 2	2004-11-02
Methods and systems for determining at least one characteristic of defects on at least two sides of a specimen Grant 6,806,951 - Wack , et al. October 19, 2	2004-10-19
Apparatus and method for detecting overlay errors using scatterometry App 20040169861 - Mieher, Walter D. ; et al.	2004-09-02
Methods and systems for determining a critical dimension an a presence of defects on a specimen Grant 6,782,337 - Wack , et al. August 24, 2	2004-08-24
Methods and systems for determining a presence of macro defects and overlay of a specimen App 20040115843 - Wack, Dan ; et al.	2004-06-17
Methods and systems for determining a presence of macro and micro defects on a specimen App 20040092045 - Bultman, Gary ; et al.	2004-05-13
Parametric profiling using optical spectroscopic systems App 20040070772 - Shchegrov, Andrei V. ; et al.	2004-04-15
Methods and systems for determining a critical dimension and a thin film characteristic of a specimen App 20040073398 - Nikoonahad, Mehrdad ; et al.	2004-04-15
Methods and systems for determining at least four properties of a specimen Grant 6,694,284 - Nikoonahad , et al. February 17, 2	2004-02-17
Methods and systems for lithography process control Grant 6,689,519 - Brown , et al. February 10, 2	2004-02-10
Methods and systems for lithography process control App 20040005507 - Lakkapragada, Suresh ; et al.	2004-01-08
Methods and systems for determining a presence of macro defects and overlay of a specimen Grant 6,673,637 - Wack , et al. January 6, 2	2004-01-06
Methods and systems for determining a critical dimension and a thin film characteristic of a specimen Grant 6,633,831 - Nikoonahad , et al. October 14, 2	2003-10-14
Methods and systems for lithography process control App 20030148198 - Lakkapragada, Suresh ; et al.	2003-08-07
Focus masking structures, focus patterns and measurements thereof App 20030095267 - Mieher, Walter Dean ; et al.	2003-05-22
Method for determining lithographic focus and exposure App 20030048458 - Mieher, Walter ; et al.	2003-03-13
Methods and systems for determining overlay and flatness of a specimen App 20030011786 - Levy, Ady ; et al.	2003-01-16
Methods and systems for determining a characteristic of micro defects on a specimen App 20020190207 - Levy, Ady ; et al.	2002-12-19
Methods and systems for determining a property of a specimen prior to, during, or subsequent to an etch process App 20020188417 - Levy, Ady ; et al.	2002-12-12
Methods and systems for determining a thin film characteristic and an electrical property of a specimen App 20020179864 - Fielden, John ; et al.	2002-12-05
Methods and systems for determining flatness, a presence of defects, and a thin film characteristic of a specimen App 20020179867 - Fielden, John ; et al.	2002-12-05
Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen App 20020180986 - Nikoonahad, Mehrdad ; et al.	2002-12-05
Methods and systems for determining an adhesion characteristic and a thickness of a specimen App 20020180961 - Wack, Dan ; et al.	2002-12-05
Methods and systems for determining a presence of macro defects and overlay of a specimen App 20020182760 - Wack, Dan ; et al.	2002-12-05
Methods and systems for determining at least one characteristic of defects on at least two sides of a specimen App 20020180985 - Wack, Dan ; et al.	2002-12-05
Overlay alignment measurement mark Grant 6,486,954 - Mieher , et al. November 26, 2	2002-11-26
Methods and systems for determining a critical dimension and a thin film characteristic of a specimen App 20020107660 - Nikoonahad, Mehrdad ; et al.	2002-08-08
Methods and systems for determining a property of a specimen prior to, during, or subsequent to lithography App 20020106848 - Wack, Dan ; et al.	2002-08-08
Methods and systems for determining a critical dimension and a presence of defects on a specimen App 20020107650 - Wack, Dan ; et al.	2002-08-08
Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition process App 20020102749 - Fielden, John ; et al.	2002-08-01
Methods and systems for determining a composition and a thickness of a specimen App 20020103564 - Fielden, John ; et al.	2002-08-01
Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimen App 20020097406 - Fielden, John ; et al.	2002-07-25
Methods and systems for determining an implant characterstic and a presence of defects on a specimen App 20020093648 - Nikoonahad, Mehrdad ; et al.	2002-07-18
Methods and systems for lithography process control App 20020072001 - Brown, Kyle A. ; et al.	2002-06-13