| Patent | Date |
|---|
Puncture resistant electrostatic chuck
Grant 5,986,875 - Donde , et al. November 16, 1 | 1999-11-16 |
Method of making electrostatic chuck with conformal insulator film
Grant 5,753,132 - Shamouilian , et al. May 19, 1 | 1998-05-19 |
Electrostatic chuck with conformal insulator film
Grant 5,745,331 - Shamouilian , et al. April 28, 1 | 1998-04-28 |
Puncture resistant electrostatic chuck
Grant 5,729,423 - Donde , et al. March 17, 1 | 1998-03-17 |
Self-cleaning polymer-free top electrode for parallel electrode etch operation
Grant 5,585,012 - Wu , et al. December 17, 1 | 1996-12-17 |
Method of determining a dechucking voltage which nullifies a residual electrostatic force between an electrostatic chuck and a wafer
Grant 5,491,603 - Birang , et al. February 13, 1 | 1996-02-13 |
Multiple insulating layer for two-level interconnected metallization in semiconductor integrated circuit structures
Grant 4,985,373 - Levinstein , et al. January 15, 1 | 1991-01-15 |
Method for making integrated semiconductor circuit structure with formation of Ti or Ta silicide
Grant RE32,207 - Levinstein , et al. July 15, 1 | 1986-07-15 |
Method of fabricating VLSI CMOS devices having complementary threshold voltages
Grant 4,555,842 - Levinstein , et al. December 3, 1 | 1985-12-03 |
Boron nitride X-ray masks with controlled stress
Grant 4,522,842 - Levinstein , et al. June 11, 1 | 1985-06-11 |
Apparatus and method for plasma-assisted etching of wafers
Grant 4,427,516 - Levinstein , et al. January 24, 1 | 1984-01-24 |
Apparatus and method for plasma-assisted etching of wafers
Grant 4,419,201 - Levinstein , et al. December 6, 1 | 1983-12-06 |
Cobalt silicide metallization for semiconductor integrated circuits
Grant 4,378,628 - Levinstein , et al. April 5, 1 | 1983-04-05 |
Method for patterning films using reactive ion etching thereof
Grant 4,343,677 - Kinsbron , et al. August 10, 1 | 1982-08-10 |
Method for making integrated semiconductor circuit structure with formation of Ti or Ta silicide
Grant 4,332,839 - Levinstein , et al. June 1, 1 | 1982-06-01 |
Reducing charging effects in charged-particle-beam lithography
Grant 4,323,638 - Adams , et al. April 6, 1 | 1982-04-06 |
Integrated semiconductor circuit structure and method for making it
Grant 4,276,557 - Levinstein , et al. June 30, 1 | 1981-06-30 |
Device fabrication by plasma etching
Grant 4,256,534 - Levinstein , et al. March 17, 1 | 1981-03-17 |
Mask structure for x-ray lithography
Grant 4,253,029 - Lepselter , et al. February 24, 1 | 1981-02-24 |
Device fabrication by plasma etching
Grant 4,208,241 - Harshbarger , et al. June 17, 1 | 1980-06-17 |
Radial flow reactor including glow discharge limitting shield
Grant RE30,244 - Alexander, Jr. , et al. April 1, 1 | 1980-04-01 |
Hydrogen annealing process for stabilizing metal-oxide-semiconductor structures
Grant 4,151,007 - Levinstein , et al. April 24, 1 | 1979-04-24 |
Method of limiting stacking faults in oxidized silicon wafers
Grant 4,149,905 - Levinstein , et al. April 17, 1 | 1979-04-17 |
Passivation of metallized semiconductor substrates
Grant 4,134,125 - Adams , et al. January 9, 1 | 1979-01-09 |
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