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name:-0.032592058181763
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Levasier; Leon Martin Patent Filings

Levasier; Leon Martin

Patent Applications and Registrations

Patent applications and USPTO patent grants for Levasier; Leon Martin.The latest application filed is for "methods & apparatus for monitoring a lithographic manufacturing process".

Company Profile
2.30.29
  • Levasier; Leon Martin - Hedel NL
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Methods and apparatus for monitoring a lithographic manufacturing process
Grant 11,422,476 - Schmitt-Weaver , et al. August 23, 2
2022-08-23
Lithographic apparatus
Grant 10,935,895 - Koevoets , et al. March 2, 2
2021-03-02
Methods & Apparatus For Monitoring A Lithographic Manufacturing Process
App 20210018847 - SCHMITT-WEAVER; Emil Peter ;   et al.
2021-01-21
Methods and apparatus for monitoring a lithographic manufacturing process
Grant 10,866,527 - Schmitt-Weaver , et al. December 15, 2
2020-12-15
Methods & Apparatus For Monitoring A Lithographic Manufacturing Process
App 20200004164 - SCHMITT-WEAVER; Emil Peter ;   et al.
2020-01-02
Lithographic Apparatus
App 20190369508 - KOEVOETS; Adrianus Hendrik ;   et al.
2019-12-05
Lithographic Apparatus
App 20180173116 - KOEVOETS; Adrianus Hendrik ;   et al.
2018-06-21
Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation
Grant 9,983,489 - Berendsen , et al. May 29, 2
2018-05-29
Method For Compensating for an Exposure Error, a Device Manufacturing Method, a Substrate Table, a Lithographic Apparatus, a Control System, a Method for Measuring Reflectivity and a Method for Measuring a Dose of EUV Radiation
App 20170115578 - BERENDSEN; Christianus Wilhelmus Johannes ;   et al.
2017-04-27
Support Structure, Method of Controlling the Temperature Of The Same, and Apparatuses Including the Same
App 20160035605 - SCHMITZ; Roger Wilhelmus Antonius Henricus ;   et al.
2016-02-04
Lithographic apparatus and device manufacturing method
Grant 8,797,504 - Nienhuys , et al. August 5, 2
2014-08-05
Lithographic apparatus and device manufacturing method
Grant 8,730,448 - Nienhuys , et al. May 20, 2
2014-05-20
Lithographic apparatus and device manufacturing method
Grant 8,514,365 - De Jong , et al. August 20, 2
2013-08-20
Device manufacturing method, lithographic apparatus and a computer program
Grant 8,477,287 - Oudshoorn , et al. July 2, 2
2013-07-02
Lithographic apparatus and method for calibrating the same
Grant 8,368,902 - Loopstra , et al. February 5, 2
2013-02-05
Radiation beam modification apparatus and method
Grant 8,351,022 - De Boeij , et al. January 8, 2
2013-01-08
Lithographic apparatus and device manufacturing method
Grant 8,289,498 - Loopstra , et al. October 16, 2
2012-10-16
Lithographic Apparatus And Device Manufacturing Method
App 20120229783 - Nienhuys; Han-Kwang ;   et al.
2012-09-13
Lithographic Apparatus And Device Manufacturing Method
App 20120229782 - Nienhuys; Han-Kwang ;   et al.
2012-09-13
Method for Calibrating a Target Surface of a Position Measurement System, Position Measurement System, and Lithographic Apparatus
App 20120078561 - KNIJN; Paulus Johannes ;   et al.
2012-03-29
Lithographic Apparatus And Method For Calibrating The Same
App 20110075154 - LOOPSTRA; Erik Roelof ;   et al.
2011-03-31
Lithographic apparatus and method for calibrating the same
Grant 7,880,901 - Loopstra , et al. February 1, 2
2011-02-01
Lithographic apparatus and method for calibrating the same
Grant 7,859,686 - Loopstra , et al. December 28, 2
2010-12-28
Radiation Beam Modification Apparatus and Method
App 20100315612 - DE BOEIJ; Wilhelmus Petrus ;   et al.
2010-12-16
Device Manufacturing Method, Lithographic Apparatus and a Computer Program
App 20100231890 - Oudshoorn; Alex ;   et al.
2010-09-16
Lithographic Apparatus And Method For Calibrating The Same
App 20100220335 - LOOPSTRA; Erik Roelof ;   et al.
2010-09-02
Lithographic Apparatus And Device Manufacturing Method
App 20100002207 - LOOPSTRA; Erik Roelof ;   et al.
2010-01-07
Lithographic Apparatus And Method For Calibrating The Same
App 20090207422 - LOOPSTRA; Erik Roelof ;   et al.
2009-08-20
Lithographic apparatus and method for manufacturing a device
Grant 7,542,127 - Sengers , et al. June 2, 2
2009-06-02
Lithographic apparatus and method for calibrating the same
Grant 7,528,965 - Loopstra , et al. May 5, 2
2009-05-05
Lithographic apparatus and device manufacturing method
App 20080297744 - Eduard De Jong; Frederik ;   et al.
2008-12-04
Lithographic apparatus and method for calibrating the same
Grant 7,408,655 - Loopstra , et al. August 5, 2
2008-08-05
Lithographic apparatus and method for calibrating the same
App 20080074681 - Loopstra; Erik Roelof ;   et al.
2008-03-27
Lithographic apparatus and method for calibrating the same
App 20070256471 - Loopstra; Erik Roelof ;   et al.
2007-11-08
Lithographic apparatus and method for calibrating the same
Grant 7,292,312 - Loopstra , et al. November 6, 2
2007-11-06
Lithographic apparatus, position quantity detection system and method
Grant 7,271,917 - Van Donkelaar , et al. September 18, 2
2007-09-18
Lithographic apparatus and method for calibrating the same
Grant 7,256,871 - Loopstra , et al. August 14, 2
2007-08-14
Using unflatness information of the substrate table or mask table for decreasing overlay
Grant 7,239,368 - Oesterholt , et al. July 3, 2
2007-07-03
Lithographic apparatus and method for manufacturing a device
App 20070139629 - Sengers; Timotheus Franciscus ;   et al.
2007-06-21
Lithographic apparatus, projection system, method of projecting and device manufacturing method
Grant 7,170,580 - Leenders , et al. January 30, 2
2007-01-30
System and method of monitoring and diagnosing system condition and performance
App 20070002295 - Reuhman-Huisken; Maria Elisabeth ;   et al.
2007-01-04
Lithographic apparatus, position quantity detection system and method
App 20060250617 - Donkelaar; Edwin Teunis Van ;   et al.
2006-11-09
Using unflatness information of the substrate table or mask table for decreasing overlay
App 20060114436 - Oesterholt; Rene ;   et al.
2006-06-01
Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby
Grant 7,002,667 - Levasier , et al. February 21, 2
2006-02-21
Lithographic apparatus with alignment subsystem, device manufacturing method, using alignment, and alignment structure
Grant 6,995,831 - Levasier , et al. February 7, 2
2006-02-07
Lithographic apparatus and method for calibrating the same
App 20060023194 - Loopstra; Erik Roelof ;   et al.
2006-02-02
Lithographic apparatus and method for calibrating the same
App 20060023178 - Loopstra; Erik Roelof ;   et al.
2006-02-02
Lithographic apparatus, method of calibration, calibration plate, device manufacturing method, and device manufactured thereby
Grant 6,955,074 - Levasier , et al. October 18, 2
2005-10-18
Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby
App 20050146699 - Levasier, Leon Martin ;   et al.
2005-07-07
Lithographic apparatus, method of calibration, calibration plate, device manufacturing method, and device manufactured thereby
App 20050138988 - Levasier, Leon Martin ;   et al.
2005-06-30
Lithographic apparatus, projection system, method of projecting and device manufacturing method
App 20040257549 - Leenders, Martinus Hendrikus Antonius ;   et al.
2004-12-23
Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby
App 20040179184 - Levasier, Leon Martin ;   et al.
2004-09-16
Method for calibrating a lithographic projection apparatus and apparatus capable of applying such a method
Grant 6,710,849 - Kwan , et al. March 23, 2
2004-03-23
Method for calibrating a lithographic projection apparatus and apparatus capable of applying such a method
App 20020026878 - Kwan, Yim Bun Patrick ;   et al.
2002-03-07

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