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Methods and apparatus for monitoring a lithographic manufacturing process Grant 11,422,476 - Schmitt-Weaver , et al. August 23, 2 | 2022-08-23 |
Lithographic apparatus Grant 10,935,895 - Koevoets , et al. March 2, 2 | 2021-03-02 |
Methods & Apparatus For Monitoring A Lithographic Manufacturing Process App 20210018847 - SCHMITT-WEAVER; Emil Peter ;   et al. | 2021-01-21 |
Methods and apparatus for monitoring a lithographic manufacturing process Grant 10,866,527 - Schmitt-Weaver , et al. December 15, 2 | 2020-12-15 |
Methods & Apparatus For Monitoring A Lithographic Manufacturing Process App 20200004164 - SCHMITT-WEAVER; Emil Peter ;   et al. | 2020-01-02 |
Lithographic Apparatus App 20190369508 - KOEVOETS; Adrianus Hendrik ;   et al. | 2019-12-05 |
Lithographic Apparatus App 20180173116 - KOEVOETS; Adrianus Hendrik ;   et al. | 2018-06-21 |
Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation Grant 9,983,489 - Berendsen , et al. May 29, 2 | 2018-05-29 |
Method For Compensating for an Exposure Error, a Device Manufacturing Method, a Substrate Table, a Lithographic Apparatus, a Control System, a Method for Measuring Reflectivity and a Method for Measuring a Dose of EUV Radiation App 20170115578 - BERENDSEN; Christianus Wilhelmus Johannes ;   et al. | 2017-04-27 |
Support Structure, Method of Controlling the Temperature Of The Same, and Apparatuses Including the Same App 20160035605 - SCHMITZ; Roger Wilhelmus Antonius Henricus ;   et al. | 2016-02-04 |
Lithographic apparatus and device manufacturing method Grant 8,797,504 - Nienhuys , et al. August 5, 2 | 2014-08-05 |
Lithographic apparatus and device manufacturing method Grant 8,730,448 - Nienhuys , et al. May 20, 2 | 2014-05-20 |
Lithographic apparatus and device manufacturing method Grant 8,514,365 - De Jong , et al. August 20, 2 | 2013-08-20 |
Device manufacturing method, lithographic apparatus and a computer program Grant 8,477,287 - Oudshoorn , et al. July 2, 2 | 2013-07-02 |
Lithographic apparatus and method for calibrating the same Grant 8,368,902 - Loopstra , et al. February 5, 2 | 2013-02-05 |
Radiation beam modification apparatus and method Grant 8,351,022 - De Boeij , et al. January 8, 2 | 2013-01-08 |
Lithographic apparatus and device manufacturing method Grant 8,289,498 - Loopstra , et al. October 16, 2 | 2012-10-16 |
Lithographic Apparatus And Device Manufacturing Method App 20120229783 - Nienhuys; Han-Kwang ;   et al. | 2012-09-13 |
Lithographic Apparatus And Device Manufacturing Method App 20120229782 - Nienhuys; Han-Kwang ;   et al. | 2012-09-13 |
Method for Calibrating a Target Surface of a Position Measurement System, Position Measurement System, and Lithographic Apparatus App 20120078561 - KNIJN; Paulus Johannes ;   et al. | 2012-03-29 |
Lithographic Apparatus And Method For Calibrating The Same App 20110075154 - LOOPSTRA; Erik Roelof ;   et al. | 2011-03-31 |
Lithographic apparatus and method for calibrating the same Grant 7,880,901 - Loopstra , et al. February 1, 2 | 2011-02-01 |
Lithographic apparatus and method for calibrating the same Grant 7,859,686 - Loopstra , et al. December 28, 2 | 2010-12-28 |
Radiation Beam Modification Apparatus and Method App 20100315612 - DE BOEIJ; Wilhelmus Petrus ;   et al. | 2010-12-16 |
Device Manufacturing Method, Lithographic Apparatus and a Computer Program App 20100231890 - Oudshoorn; Alex ;   et al. | 2010-09-16 |
Lithographic Apparatus And Method For Calibrating The Same App 20100220335 - LOOPSTRA; Erik Roelof ;   et al. | 2010-09-02 |
Lithographic Apparatus And Device Manufacturing Method App 20100002207 - LOOPSTRA; Erik Roelof ;   et al. | 2010-01-07 |
Lithographic Apparatus And Method For Calibrating The Same App 20090207422 - LOOPSTRA; Erik Roelof ;   et al. | 2009-08-20 |
Lithographic apparatus and method for manufacturing a device Grant 7,542,127 - Sengers , et al. June 2, 2 | 2009-06-02 |
Lithographic apparatus and method for calibrating the same Grant 7,528,965 - Loopstra , et al. May 5, 2 | 2009-05-05 |
Lithographic apparatus and device manufacturing method App 20080297744 - Eduard De Jong; Frederik ;   et al. | 2008-12-04 |
Lithographic apparatus and method for calibrating the same Grant 7,408,655 - Loopstra , et al. August 5, 2 | 2008-08-05 |
Lithographic apparatus and method for calibrating the same App 20080074681 - Loopstra; Erik Roelof ;   et al. | 2008-03-27 |
Lithographic apparatus and method for calibrating the same App 20070256471 - Loopstra; Erik Roelof ;   et al. | 2007-11-08 |
Lithographic apparatus and method for calibrating the same Grant 7,292,312 - Loopstra , et al. November 6, 2 | 2007-11-06 |
Lithographic apparatus, position quantity detection system and method Grant 7,271,917 - Van Donkelaar , et al. September 18, 2 | 2007-09-18 |
Lithographic apparatus and method for calibrating the same Grant 7,256,871 - Loopstra , et al. August 14, 2 | 2007-08-14 |
Using unflatness information of the substrate table or mask table for decreasing overlay Grant 7,239,368 - Oesterholt , et al. July 3, 2 | 2007-07-03 |
Lithographic apparatus and method for manufacturing a device App 20070139629 - Sengers; Timotheus Franciscus ;   et al. | 2007-06-21 |
Lithographic apparatus, projection system, method of projecting and device manufacturing method Grant 7,170,580 - Leenders , et al. January 30, 2 | 2007-01-30 |
System and method of monitoring and diagnosing system condition and performance App 20070002295 - Reuhman-Huisken; Maria Elisabeth ;   et al. | 2007-01-04 |
Lithographic apparatus, position quantity detection system and method App 20060250617 - Donkelaar; Edwin Teunis Van ;   et al. | 2006-11-09 |
Using unflatness information of the substrate table or mask table for decreasing overlay App 20060114436 - Oesterholt; Rene ;   et al. | 2006-06-01 |
Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby Grant 7,002,667 - Levasier , et al. February 21, 2 | 2006-02-21 |
Lithographic apparatus with alignment subsystem, device manufacturing method, using alignment, and alignment structure Grant 6,995,831 - Levasier , et al. February 7, 2 | 2006-02-07 |
Lithographic apparatus and method for calibrating the same App 20060023194 - Loopstra; Erik Roelof ;   et al. | 2006-02-02 |
Lithographic apparatus and method for calibrating the same App 20060023178 - Loopstra; Erik Roelof ;   et al. | 2006-02-02 |
Lithographic apparatus, method of calibration, calibration plate, device manufacturing method, and device manufactured thereby Grant 6,955,074 - Levasier , et al. October 18, 2 | 2005-10-18 |
Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby App 20050146699 - Levasier, Leon Martin ;   et al. | 2005-07-07 |
Lithographic apparatus, method of calibration, calibration plate, device manufacturing method, and device manufactured thereby App 20050138988 - Levasier, Leon Martin ;   et al. | 2005-06-30 |
Lithographic apparatus, projection system, method of projecting and device manufacturing method App 20040257549 - Leenders, Martinus Hendrikus Antonius ;   et al. | 2004-12-23 |
Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby App 20040179184 - Levasier, Leon Martin ;   et al. | 2004-09-16 |
Method for calibrating a lithographic projection apparatus and apparatus capable of applying such a method Grant 6,710,849 - Kwan , et al. March 23, 2 | 2004-03-23 |
Method for calibrating a lithographic projection apparatus and apparatus capable of applying such a method App 20020026878 - Kwan, Yim Bun Patrick ;   et al. | 2002-03-07 |