| Patent | Date |
|---|
Method For Filling Recessed Features In Semiconductor Devices With A Low-resistivity Metal
App 20220301930 - Yu; Kai-Hung ; et al. | 2022-09-22 |
Method for forming and using stress-tuned silicon oxide films in semiconductor device patterning
Grant 11,443,953 - Tapily , et al. September 13, 2 | 2022-09-13 |
Semiconductor apparatus having stacked gates and method of manufacture thereof
Grant 11,444,082 - Smith , et al. September 13, 2 | 2022-09-13 |
Method For Filling Recessed Features In Semiconductor Devices With A Low-resistivity Metal
App 20220139776 - Yu; Kai-Hung ; et al. | 2022-05-05 |
Semiconductor Processing Systems With In-situ Electrical Bias
App 20210313189 - Hurley; David ; et al. | 2021-10-07 |
Interconnect structure and method of forming the same
Grant 10,923,392 - Chae , et al. February 16, 2 | 2021-02-16 |
Semiconductor Apparatus Having Stacked Gates And Method Of Manufacture Thereof
App 20210028169 - Smith; Jeffrey ; et al. | 2021-01-28 |
Semiconductor apparatus having stacked gates and method of manufacture thereof
Grant 10,833,078 - Smith , et al. November 10, 2 | 2020-11-10 |
Ruthenium metal feature fill for interconnects
Grant 10,700,009 - Yu , et al. | 2020-06-30 |
Method For Forming And Using Stress-tuned Silicon Oxide Films In Semiconductor Device Patterning
App 20200152473 - Tapily; Kandabara N. ; et al. | 2020-05-14 |
Method of integrated circuit fabrication with dual metal power rail
Grant 10,580,691 - Chae , et al. | 2020-03-03 |
Interconnect structure and method of forming the same
Grant 10,541,174 - Chae , et al. Ja | 2020-01-21 |
Interconnect Structure And Method Of Forming The Same
App 20200006129 - CHAE; Soo Doo ; et al. | 2020-01-02 |
Method of selective vertical growth of a dielectric material on a dielectric substrate
Grant 10,453,681 - Tapily , et al. Oc | 2019-10-22 |
Processing system for electromagnetic wave treatment of a substrate at microwave frequencies
Grant 10,426,001 - Nasman , et al. Sept | 2019-09-24 |
Method of filling retrograde recessed features
Grant 10,410,861 - Tapily , et al. Sept | 2019-09-10 |
Selective deposition with surface treatment
Grant 10,378,105 - Yu , et al. A | 2019-08-13 |
Semiconductor Apparatus Having Stacked Gates And Method Of Manufacture Thereof
App 20190172828 - SMITH; Jeffrey ; et al. | 2019-06-06 |
Ruthenium Metal Feature Fill For Interconnects
App 20190103363 - Yu; Kai-Hung ; et al. | 2019-04-04 |
Wrap-around contact integration scheme
Grant 10,217,670 - Tapily , et al. Feb | 2019-02-26 |
System And Method For Backside Deposition Of A Substrate
App 20190035646 - Nasman; Ronald ; et al. | 2019-01-31 |
Integration of a self-forming barrier layer and a ruthenium metal liner in copper metallization
Grant 10,157,784 - Yu , et al. Dec | 2018-12-18 |
Method Of Integrated Circuit Fabrication With Dual Metal Power Rail
App 20180350665 - Chae; Soo Doo ; et al. | 2018-12-06 |
Method Of Selective Vertical Growth Of A Dielectric Material On A Dielectric Substrate
App 20180301335 - Tapily; Kandabara N. ; et al. | 2018-10-18 |
Method Of Filling Retrograde Recessed Features
App 20180261450 - Tapily; Kandabara N. ; et al. | 2018-09-13 |
Selective metal oxide deposition using a self-assembled monolayer surface pretreatment
Grant 10,068,764 - Tapily , et al. September 4, 2 | 2018-09-04 |
Ruthenium metal feature fill for interconnects
Grant 10,056,328 - Yu , et al. August 21, 2 | 2018-08-21 |
Interconnect Structure And Method Of Forming The Same
App 20180211870 - CHAE; Soo Doo ; et al. | 2018-07-26 |
Selective bottom-up metal feature filling for interconnects
Grant 10,014,213 - Yu , et al. July 3, 2 | 2018-07-03 |
Method of corner rounding and trimming of nanowires by microwave plasma
Grant 10,008,564 - Tapily , et al. June 26, 2 | 2018-06-26 |
Selective Metal Oxide Deposition Using A Self-assembled Monolayer Surface Pretreatment
App 20180076027 - Tapily; Kandabara N. ; et al. | 2018-03-15 |
Wrap-around Contact Integration Scheme
App 20180068899 - Tapily; Kandabara N. ; et al. | 2018-03-08 |
Method Of Metal Filling Recessed Features In A Substrate
App 20180053688 - Yu; Kai-Hung ; et al. | 2018-02-22 |
Selective Deposition With Surface Treatment
App 20170342553 - Yu; Kai-Hung ; et al. | 2017-11-30 |
Ruthenium Metal Feature Fill For Interconnects
App 20170317022 - Yu; Kai-Hung ; et al. | 2017-11-02 |
Ruthenium Metal Deposition Method For Electrical Connections
App 20170241014 - Yu; Kai-Hung ; et al. | 2017-08-24 |
Integration Of A Self-forming Barrier Layer And A Ruthenium Metal Liner In Copper Metallization
App 20170236752 - Yu; Kai-Hung L. ; et al. | 2017-08-17 |
Substrate tuning system and method using optical projection
Grant 9,735,067 - deVilliers , et al. August 15, 2 | 2017-08-15 |
Ruthenium metal feature fill for interconnects
Grant 9,711,449 - Yu , et al. July 18, 2 | 2017-07-18 |
Methods for treating a substrate by optical projection of a correction pattern based on a detected spatial heat signature of the substrate
Grant 9,646,898 - deVilliers , et al. May 9, 2 | 2017-05-09 |
Method Of Corner Rounding And Trimming Of Nanowires By Microwave Plasma
App 20170125517 - Tapily; Kandabara N. ; et al. | 2017-05-04 |
Selective Bottom-up Metal Feature Filling For Interconnects
App 20170110368 - Yu; Kai-Hung ; et al. | 2017-04-20 |
Germanium-containing Semiconductor Device And Method Of Forming
App 20170084464 - Tapily; Kandabara N. ; et al. | 2017-03-23 |
Ruthenium Metal Feature Fill For Interconnects
App 20160358815 - Yu; Kai-Hung ; et al. | 2016-12-08 |
Atomic Layer Deposition of Aluminum-doped High-k Films
App 20150255267 - Tapily; Kandabara N. ; et al. | 2015-09-10 |
Substrate Tuning System and Method Using Optical Projection
App 20150146178 - deVilliers; Anton J. ; et al. | 2015-05-28 |
Substrate Tuning System and Method Using Optical Projection
App 20150147827 - deVilliers; Anton J. ; et al. | 2015-05-28 |
Processing System For Electromagnetic Wave Treatment Of A Substrate At Microwave Frequencies
App 20140273532 - Nasman; Ronald ; et al. | 2014-09-18 |
Method of forming conformal metal silicide films
Grant 8,785,310 - Hasegawa , et al. July 22, 2 | 2014-07-22 |
Process Gas Diffuser Assembly For Vapor Deposition System
App 20140116339 - Nasman; Ronald ; et al. | 2014-05-01 |
Method Of Forming Conformal Metal Silicide Films
App 20130196505 - Hasegawa; Toshio ; et al. | 2013-08-01 |
Semiconductor device containing a buried threshold voltage adjustment layer and method of forming
Grant 8,334,183 - Clark , et al. December 18, 2 | 2012-12-18 |
Process Gas Diffuser Assembly For Vapor Deposition System
App 20120312234 - NASMAN; Ronald ; et al. | 2012-12-13 |
Method and system for depositing a layer from light-induced vaporization of a solid precursor
Grant 8,197,898 - Leusink June 12, 2 | 2012-06-12 |
Method of forming aluminum-doped metal carbonitride gate electrodes
Grant 7,985,680 - Hasegawa , et al. July 26, 2 | 2011-07-26 |
Semiconductor Device Containing A Buried Threshold Voltage Adjustment Layer And Method Of Forming
App 20100261342 - Clark; Robert D. ; et al. | 2010-10-14 |
Semiconductor device containing a buried threshold voltage adjustment layer and method of forming
Grant 7,772,073 - Clark , et al. August 10, 2 | 2010-08-10 |
Film precursor tray for use in a film precursor evaporation system and method of using
Grant 7,708,835 - Suzuki , et al. May 4, 2 | 2010-05-04 |
Method for increasing deposition rates of metal layers from metal-carbonyl precursors
Grant 7,678,421 - Suzuki , et al. March 16, 2 | 2010-03-16 |
Method Of Forming Aluminum-doped Metal Carbonitride Gate Electrodes
App 20100048009 - Hasegawa; Toshio ; et al. | 2010-02-25 |
Multi-tray film precursor evaporation system and thin film deposition system incorporating same
Grant 7,638,002 - Suzuki , et al. December 29, 2 | 2009-12-29 |
Semiconductor Device Containing A Buried Threshold Voltage Adjustment Layer And Method Of Forming
App 20090085175 - Clark; Robert D. ; et al. | 2009-04-02 |
Sequential Flow Deposition Of A Tungsten Silicide Gate Electrode Film
App 20090087550 - Leusink; Gerrit J. ; et al. | 2009-04-02 |
Method for preparing solid precursor tray for use in solid precursor evaporation system
Grant 7,488,512 - Suzuki , et al. February 10, 2 | 2009-02-10 |
Replaceable precursor tray for use in a multi-tray solid precursor delivery system
Grant 7,484,315 - Suzuki , et al. February 3, 2 | 2009-02-03 |
Method for thin film deposition using multi-tray film precursor evaporation system
Grant 7,459,396 - Suzuki , et al. December 2, 2 | 2008-12-02 |
Method and system for refurbishing a metal carbonyl precursor
Grant 7,345,184 - Suzuki , et al. March 18, 2 | 2008-03-18 |
Method For Increasing Deposition Rates Of Metal Layers From Metal-carbonyl Precursors
App 20080003360 - Suzuki; Kenji ; et al. | 2008-01-03 |
Method for increasing deposition rates of metal layers from metal-carbonyl precursors
Grant 7,270,848 - Suzuki , et al. September 18, 2 | 2007-09-18 |
Method For Thin Film Deposition Using Multi-tray Film Precursor Evaporation System
App 20070032079 - Suzuki; Kenji ; et al. | 2007-02-08 |
Method and system for depositing a layer from light-induced vaporization of a solid precursor
App 20060228494 - Leusink; Gerrit J. | 2006-10-12 |
Method and system for forming a high-k dielectric layer
App 20060228898 - Wajda; Cory ; et al. | 2006-10-12 |
Method and system for refurbishing a metal carbonyl precursor
App 20060224008 - Suzuki; Kenji ; et al. | 2006-10-05 |
Film precursor tray for use in a film precursor evaporation system and method of using
App 20060185598 - Suzuki; Kenji ; et al. | 2006-08-24 |
Film precursor evaporation system and method of using
App 20060185597 - Suzuki; Kenji ; et al. | 2006-08-24 |
Method and system for improved delivery of a precursor vapor to a processing zone
App 20060182886 - Guidotti; Emmanuel P. ; et al. | 2006-08-17 |
Replaceable precursor tray for use in a multi-tray solid precursor delivery system
App 20060112883 - Suzuki; Kenji ; et al. | 2006-06-01 |
Multi-tray film precursor evaporation system and thin film deposition system incorporating same
App 20060112882 - Suzuki; Kenji ; et al. | 2006-06-01 |
Method and system for performing in-situ cleaning of a deposition system
App 20060115590 - Suzuki; Kenji ; et al. | 2006-06-01 |
Method for preparing solid precursor tray for use in solid precursor evaporation system
App 20060115593 - Suzuki; Kenji ; et al. | 2006-06-01 |
Method for increasing deposition rates of metal layers from metal-carbonyl precursors
App 20060110530 - Suzuki; Kenji ; et al. | 2006-05-25 |
Wafer heater assembly
App 20050217799 - O'Meara, David L. ; et al. | 2005-10-06 |
Method for stabilizing the internal surface of a PECVD process chamber
Grant 6,626,186 - Hillman , et al. September 30, 2 | 2003-09-30 |
Apparatus and method for electrically isolating an electrode in a PECVD process chamber
Grant 6,302,057 - Leusink , et al. October 16, 2 | 2001-10-16 |
Method for single chamber processing of PECVD-Ti and CVD-TiN films for integrated contact/barrier applications in IC manufacturing
Grant 6,274,496 - Leusink , et al. August 14, 2 | 2001-08-14 |
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