loadpatents
Patent applications and USPTO patent grants for Leung; Garlen C..The latest application filed is for "polishing with measurement prior to deposition of outer layer".
Patent | Date |
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Polishing with measurement prior to deposition of outer layer Grant 10,651,098 - Kitajima , et al. | 2020-05-12 |
Polishing with pre deposition spectrum Grant 9,811,077 - Kitajima , et al. November 7, 2 | 2017-11-07 |
Polishing With Measurement Prior To Deposition Of Outer Layer App 20160284615 - Kitajima; Tomohiko ;   et al. | 2016-09-29 |
Polishing with eddy current feed meaurement prior to deposition of conductive layer Grant 9,362,186 - Kitajima , et al. June 7, 2 | 2016-06-07 |
Polishing With Eddy Current Feed Meaurement Prior To Deposition Of Conductive Layer App 20160020157 - Kitajima; Tomohiko ;   et al. | 2016-01-21 |
Polishing With Pre Deposition Spectrum App 20160018815 - Kitajima; Tomohiko ;   et al. | 2016-01-21 |
Method Of Forming Polishing Sheet App 20140237905 - Bonner; Benjamin A. ;   et al. | 2014-08-28 |
Chemical mechanical polisher with heater and method Grant 8,439,723 - Marks , et al. May 14, 2 | 2013-05-14 |
Process sequence to achieve global planarity using a combination of fixed abrasive and high selectivity slurry for pre-metal dielectric CMP applications Grant 8,211,325 - Diao , et al. July 3, 2 | 2012-07-03 |
Real-time Monitoring Of Retaining Ring Thickness And Lifetime App 20120021671 - McReynolds; Peter ;   et al. | 2012-01-26 |
Polishing article with integrated window stripe Grant 7,841,925 - Menk , et al. November 30, 2 | 2010-11-30 |
Process Sequence To Achieve Global Planarity Using A Combination Of Fixed Abrasive And High Selectivity Slurry For Pre-metal Dielectric Cmp Applications App 20100285666 - DIAO; JIE ;   et al. | 2010-11-11 |
Monolithic Linear Polishing Sheet App 20100112919 - Bonner; Benjamin A. ;   et al. | 2010-05-06 |
Chemical Mechanical Polisher With Heater And Method App 20100035515 - Marks; Robert ;   et al. | 2010-02-11 |
Polishing apparatus with grooved subpad Grant 7,601,050 - Zuniga , et al. October 13, 2 | 2009-10-13 |
Polishing Article With Integrated Window Stripe App 20090253358 - Menk; Gregory E. ;   et al. | 2009-10-08 |
Polishing article with integrated window stripe Grant 7,553,214 - Menk , et al. June 30, 2 | 2009-06-30 |
Selective Chemistry For Fixed Abrasive Cmp App 20080182413 - MENK; GREGORY E. ;   et al. | 2008-07-31 |
Smart polishing media assembly for planarizing substrates App 20070212976 - McReynolds; Peter ;   et al. | 2007-09-13 |
Polishing system with spiral-grooved subpad App 20070197147 - Rondum; Erik S. ;   et al. | 2007-08-23 |
Dechuck using subpad with recess App 20070197132 - Menk; Gregory E. ;   et al. | 2007-08-23 |
Polishing apparatus with grooved subpad App 20070197141 - Zuniga; Steven M. ;   et al. | 2007-08-23 |
Polishing article with integrated window stripe App 20070197133 - Menk; Gregory E. ;   et al. | 2007-08-23 |
Polishing article with window stripe App 20070197145 - Menk; Gregory E. ;   et al. | 2007-08-23 |
Polishing article with integrated window stripe App 20070197134 - Menk; Gregory E. ;   et al. | 2007-08-23 |
Polishing processes for shallow trench isolation substrates Grant 7,063,597 - Prabhu , et al. June 20, 2 | 2006-06-20 |
Polishing processes for shallow trench isolation substrates App 20040142640 - Prabhu, Gopalakrishna B. ;   et al. | 2004-07-22 |
Platen with patterned surface for chemical mechanical polishing App 20040072518 - Prabhu, Gopalakrishna B. ;   et al. | 2004-04-15 |
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