Lerner; Alexander N.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lerner; Alexander N..The latest application filed is for "method for mask and substrate alignment".

Company Profile

15.45.53

Lerner; Alexander N. - San Jose CA
Lerner; Alexander N. - US
Lerner; Alexander N - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Processing system for forming layers Grant 11,414,740 - Lerner , et al. August 16, 2	2022-08-16
Method For Mask And Substrate Alignment App 20220051921 - FREEMAN; Greg ; et al.	2022-02-17
Proximity contact cover ring for plasma dicing Grant 11,195,756 - Holden , et al. December 7, 2	2021-12-07
System and method for electrostatically chucking a substrate to a carrier Grant 11,196,360 - Lerner , et al. December 7, 2	2021-12-07
Method for mask and substrate alignment Grant 11,189,516 - Freeman , et al. November 30, 2	2021-11-30
Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency Grant 11,183,411 - Vellore , et al. November 23, 2	2021-11-23
Light-absorbing mask for hybrid laser scribing and plasma etch wafer singulation process Grant 11,158,540 - Li , et al. October 26, 2	2021-10-26
Method Of Pre Aligning Carrier, Wafer And Carrier-wafer Combination For Throughput Efficiency App 20210159106 - VELLORE; Kim Ramkumar ; et al.	2021-05-27
Vapor Delivery Methods And Apparatus App 20210069745 - LERNER; Alexander N. ; et al.	2021-03-11
Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency Grant 10,916,464 - Vellore , et al. February 9, 2	2021-02-09
Evaporator Chamber For Forming Films On Substrates App 20210025048 - LERNER; Alexander N. ; et al.	2021-01-28
System and method for electrostatically chucking a substrate to a carrier App 20210028726 - LERNER; Alexander N. ; et al.	2021-01-28
Method Of Pre Aligning Carrier, Wafer And Carrier-wafer Combination For Throughput Efficiency App 20210028044 - VELLORE; Kim Ramkumar ; et al.	2021-01-28
Carrier Foup And A Method Of Placing A Carrier App 20210028039 - TINDEL; Steven Trey ; et al.	2021-01-28
Processing System For Forming Layers App 20200385851 - LERNER; Alexander N. ; et al.	2020-12-10
Methods And Systems For Forming Films On Substrates App 20200378000 - Lerner; Alexander N. ; et al.	2020-12-03
Alignment Module With A Cleaning Chamber App 20200373134 - LERNER; Alexander N. ; et al.	2020-11-26
System And Method For Aligning A Mask With A Substrate App 20200373183 - LERNER; Alexander N. ; et al.	2020-11-26
Method For Mask And Substrate Alignment App 20200371448 - FREEMAN; Greg ; et al.	2020-11-26
Deposition Mask And Methods Of Manufacturing And Using A Deposition Mask App 20200295265 - MORAES; Kevin ; et al.	2020-09-17
Transfer Arm For Film Frame Substrate Handling During Plasma Singulation Of Wafers App 20200258780 - A1	2020-08-13
Transfer arm for film frame substrate handling during plasma singulation of wafers Grant 10,692,765 - Holden , et al.	2020-06-23
Light-absorbing Mask For Hybrid Laser Scribing And Plasma Etch Wafer Singulation Process App 20180342422 - Li; Wenguang ; et al.	2018-11-29
Etch mask for hybrid laser scribing and plasma etch wafer singulation process Grant 9,793,132 - Li , et al. October 17, 2	2017-10-17
Rapid thermal processing chamber with micro-positioning system Grant 9,564,349 - Sorabji , et al. February 7, 2	2017-02-07
Thermal pyrolytic graphite shadow ring assembly for heat dissipation in plasma chamber Grant 9,478,455 - Ouye , et al. October 25, 2	2016-10-25
Transparent reflector plate for rapid thermal processing chamber Grant 9,449,858 - Koelmel , et al. September 20, 2	2016-09-20
Rapid thermal processing chamber with micro-positioning system Grant 9,390,950 - Sorabji , et al. July 12, 2	2016-07-12
Transfer Arm For Film Frame Substrate Handling During Plasma Singulation Of Wafers App 20160133519 - Holden; James M. ; et al.	2016-05-12
Proximity Contact Cover Ring For Plasma Dicing App 20160086852 - Holden; James M. ; et al.	2016-03-24
Rapid conductive cooling using a secondary process plane Grant 9,209,049 - Sorabji , et al. December 8, 2	2015-12-08
Actively-cooled Shadow Ring For Heat Dissipation In Plasma Chamber App 20150170955 - Ouye; Alan Hiroshi ; et al.	2015-06-18
Rapid Thermal Processing Chamber with Micro-Positioning System App 20150050118 - Sorabji; Khurshed ; et al.	2015-02-19
Rapid thermal processing chamber with micro-positioning system Grant 8,900,889 - Sorabji , et al. December 2, 2	2014-12-02
Thermal reactor with improved gas flow distribution Grant 8,888,916 - Tseng , et al. November 18, 2	2014-11-18
Rapid Conductive Cooling Using A Secondary Process Plane App 20140199786 - SORABJI; Khurshed ; et al.	2014-07-17
High temperature vacuum chuck assembly Grant 8,698,048 - Lerner , et al. April 15, 2	2014-04-15
Thermal Reactor With Improved Gas Flow Distribution App 20140079376 - TSENG; Ming-Kuei (Michael) ; et al.	2014-03-20
Rapid conductive cooling using a secondary process plane Grant 8,658,947 - Sorabji , et al. February 25, 2	2014-02-25
Thermal reactor with improved gas flow distribution Grant 8,608,853 - Tseng , et al. December 17, 2	2013-12-17
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber Grant 8,490,660 - Koelmel , et al. July 23, 2	2013-07-23
Rapid Thermal Processing Chamber With Micro-positioning System App 20130043235 - Sorabji; Khurshed ; et al.	2013-02-21
Rapid thermal processing chamber with micro-positioning system Grant 8,314,371 - Sorabji , et al. November 20, 2	2012-11-20
Apparatus and method of aligning and positioning a cold substrate on a hot surface Grant 8,309,475 - Koelmel , et al. November 13, 2	2012-11-13
Rapid Conductive Cooling Using A Secondary Process Plane App 20120270166 - SORABJI; KHURSHED ; et al.	2012-10-25
Lift pin for substrate processing Grant 8,256,754 - Lerner , et al. September 4, 2	2012-09-04
High Temperature Vacuum Chuck Assembly App 20120205878 - Lerner; Alexander N. ; et al.	2012-08-16
Rapid conductive cooling using a secondary process plane Grant 8,227,729 - Sorabji , et al. July 24, 2	2012-07-24
High temperature vacuum chuck assembly Grant 8,198,567 - Lerner , et al. June 12, 2	2012-06-12
Apparatus And Method Of Aligning And Positioning A Cold Substrate On A Hot Surface App 20120122253 - Koelmel; Blake ; et al.	2012-05-17
Transparent Reflector Plate For Rapid Thermal Processing Chamber App 20120070136 - Koelmel; Blake R. ; et al.	2012-03-22
Thermal Reactor With Improved Gas Flow Distribution App 20120058648 - Tseng; Ming-Kuei (Michael) ; et al.	2012-03-08
Apparatus And Method For Supporting, Positioning And Rotating A Substrate In A Processing Chamber App 20120055405 - Koelmel; Blake ; et al.	2012-03-08
Rapid thermal processing chamber with shower head Grant 8,111,978 - Sorabji , et al. February 7, 2	2012-02-07
Apparatus and method of aligning and positioning a cold substrate on a hot surface Grant 8,097,543 - Koelmel , et al. January 17, 2	2012-01-17
Thermal reactor with improved gas flow distribution Grant 8,056,500 - Tseng , et al. November 15, 2	2011-11-15
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber Grant 8,057,602 - Koelmel , et al. November 15, 2	2011-11-15
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber Grant 8,057,601 - Koelmel , et al. November 15, 2	2011-11-15
Pulsed laser anneal system architecture Grant 7,923,660 - Lerner , et al. April 12, 2	2011-04-12
Millisecond annealing (DSA) edge protection Grant 7,923,280 - Koelmel , et al. April 12, 2	2011-04-12
Rapid Conductive Cooling Using A Secondary Process Plane App 20110008740 - Sorabji; Khurshed ; et al.	2011-01-13
Millisecond Annealing (dsa) Edge Protection App 20100273334 - Koelmel; Blake ; et al.	2010-10-28
Rapid conductive cooling using a secondary process plane Grant 7,812,286 - Sorabji , et al. October 12, 2	2010-10-12
Millisecond annealing (DSA) edge protection Grant 7,754,518 - Koelmel , et al. July 13, 2	2010-07-13
Rapid Thermal Processing Chamber With Micro-Positioning System App 20100133257 - Sorabji; Khurshed ; et al.	2010-06-03
Rapid Thermal Processing Chamber With Shower Head App 20100008656 - SORABJI; KHURSHED ; et al.	2010-01-14
Apparatus and Methods for Hyperbaric Rapid Thermal Processing App 20090298300 - Ranish; Joseph M. ; et al.	2009-12-03
Single Wafer Dryer And Drying Methods App 20090241996 - Achkire; Younes ; et al.	2009-10-01
Millisecond Annealing (dsa) Edge Protection App 20090209112 - Koelmel; Blake ; et al.	2009-08-20
High Temperature Vacuum Chuck Assembly App 20090179365 - Lerner; Alexander N. ; et al.	2009-07-16
Apparatus And Method Of Aligning And Positioning A Cold Substrate On A Hot Surface App 20090181553 - Koelmel; Blake ; et al.	2009-07-16
Thermal Reactor With Improved Gas Flow Distribution App 20090163042 - Tseng; Ming-Kuei (Michael) ; et al.	2009-06-25
Lift Pin For Substrate Processing App 20090155025 - LERNER; ALEXANDER N. ; et al.	2009-06-18
Integrated bevel clean chamber Grant 7,520,939 - Ho , et al. April 21, 2	2009-04-21
Single wafer dryer and drying methods Grant 7,513,062 - Achkire , et al. April 7, 2	2009-04-07
Pulsed Laser Anneal System Architecture App 20090045182 - LERNER; ALEXANDER N. ; et al.	2009-02-19
Apparatus And Method For Supporting, Positioning And Rotating A Substrate In A Processing Chamber App 20080280453 - KOELMEL; Blake ; et al.	2008-11-13
Apparatus And Method For Supporting, Positioning And Rotating A Substrate In A Processing Chamber App 20080276864 - KOELMEL; BLAKE ; et al.	2008-11-13
Temperature Measurement And Control Of Wafer Support In Thermal Processing Chamber App 20080169282 - SORABJI; KHURSHED ; et al.	2008-07-17
Rapid Conductive Cooling Using A Secondary Process Plane App 20080141556 - SORABJI; KHURSHED ; et al.	2008-06-19
Rapid Conductive Cooling Using A Secondary Process Plane App 20080142497 - Sorabji; Khurshed ; et al.	2008-06-19
Rapid conductive cooling using a secondary process plane Grant 7,378,618 - Sorabji , et al. May 27, 2	2008-05-27
Apparatus For Thermal Processing Structures Formed On A Substrate App 20070221640 - Jennings; Dean ; et al.	2007-09-27
Multi-chemistry plating system Grant 7,223,323 - Yang , et al. May 29, 2	2007-05-29
Single wafer dryer and drying methods App 20050229426 - Achkire, Younes ; et al.	2005-10-20
Deionized water spray on loss of fluid processing tank exhaust Grant 6,865,937 - Lerner , et al. March 15, 2	2005-03-15
Integrated bevel clean chamber App 20040206375 - Ho, Henry ; et al.	2004-10-21
Multi-chemistry plating system App 20040016637 - Yang, Michael X. ; et al.	2004-01-29
Deionized water spray on loss of fluid processing tank exhaust App 20020187742 - Lerner, Alexander N. ; et al.	2002-12-12