Patent | Date |
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Dual-level pulse tuning Grant 11,177,115 - Leray , et al. November 16, 2 | 2021-11-16 |
Dual-level Pulse Tuning App 20200381214 - LERAY; Gary ;   et al. | 2020-12-03 |
Process kit components for use with an extended and independent RF powered cathode substrate for extreme edge tunability Grant 10,825,708 - Todorow , et al. November 3, 2 | 2020-11-03 |
Methods and apparatus for frequency generator and match network communication Grant 10,553,400 - Leray Fe | 2020-02-04 |
Methods And Apparatus For Frequency Generator And Match Network Communication App 20190304753 - Leray; Gary | 2019-10-03 |
Methods And Apparatus For Common Excitation Of Frequency Generators App 20190267213 - Leray; Gary | 2019-08-29 |
Process Kit Components For Use With An Extended And Independent Rf Powered Cathode Substrate For Extreme Edge Tunability App 20190221463 - TODOROW; VALENTIN ;   et al. | 2019-07-18 |
Enhanced plasma source for a plasma reactor Grant 10,290,469 - Todorow , et al. | 2019-05-14 |
Electronegative plasma thruster with optimized injection Grant 10,233,912 - Chabert , et al. | 2019-03-19 |
Dynamic control band for RF plasma current ratio control Grant 9,839,109 - Leray December 5, 2 | 2017-12-05 |
Dynamic Control Band For Rf Plasma Current Ratio Control App 20170347441 - LERAY; GARY | 2017-11-30 |
Frequency tuning for dual level radio frequency (RF) pulsing Grant 9,595,423 - Leray , et al. March 14, 2 | 2017-03-14 |
Self-bias calculation on a substrate in a process chamber with bias power for single or multiple frequencies Grant 9,406,540 - Leray , et al. August 2, 2 | 2016-08-02 |
Frequency Tuning For Dual Level Radio Frequency (rf) Pulsing App 20160196958 - LERAY; GARY ;   et al. | 2016-07-07 |
Frequency tuning for dual level radio frequency (RF) pulsing Grant 9,318,304 - Leray , et al. April 19, 2 | 2016-04-19 |
Measurement of plural RF sensor devices in a pulsed RF plasma reactor Grant 9,190,247 - Leray November 17, 2 | 2015-11-17 |
Electron beam plasma source with arrayed plasma sources for uniform plasma generation Grant 9,129,777 - Dorf , et al. September 8, 2 | 2015-09-08 |
Frequency Tuning For Dual Level Radio Frequency (rf) Pulsing App 20150130354 - LERAY; Gary ;   et al. | 2015-05-14 |
Extended and independent RF powered cathode substrate for extreme edge tunability Grant 8,988,848 - Todorow , et al. March 24, 2 | 2015-03-24 |
Electron beam plasma source with segmented beam dump for uniform plasma generation Grant 8,951,384 - Dorf , et al. February 10, 2 | 2015-02-10 |
Enhanced Plasma Source For A Plasma Reactor App 20140367046 - TODOROW; Valentin N. ;   et al. | 2014-12-18 |
Electron beam plasma source with profiled magnet shield for uniform plasma generation Grant 8,894,805 - Bera , et al. November 25, 2 | 2014-11-25 |
Measurement Of Plural Rf Sensor Devices In A Pulsed Rf Plasma Reactor App 20140232374 - Leray; Gary | 2014-08-21 |
Apparatus for forming a magnetic field and methods of use thereof Grant 8,773,020 - Leray , et al. July 8, 2 | 2014-07-08 |
Process Kit Components For Use With An Extended And Independent Rf Powered Cathode Substrate For Extreme Edge Tunability App 20130154175 - TODOROW; VALENTIN ;   et al. | 2013-06-20 |
Extended And Independent Rf Powered Cathode Substrate For Extreme Edge Tunability App 20130155568 - TODOROW; VALENTIN ;   et al. | 2013-06-20 |
Self-bias Calculation On A Substrate In A Process Chamber With Bias Power For Single Or Multiple Frequencies App 20130110435 - LERAY; GARY ;   et al. | 2013-05-02 |
Electron Beam Plasma Source With Segmented Beam Dump For Uniform Plasma Generation App 20130098882 - Dorf; Leonid ;   et al. | 2013-04-25 |
Electron Beam Plasma Source With Profiled Magnet Shield For Uniform Plasma Generation App 20130098883 - Bera; Kallol ;   et al. | 2013-04-25 |
Electron Beam Plasma Source With Arrayed Plasma Sources For Uniform Plasma Generation App 20130098551 - Dorf; Leonid ;   et al. | 2013-04-25 |
Switched Electron Beam Plasma Source Array For Uniform Plasma Production App 20130098872 - Dorf; Leonid ;   et al. | 2013-04-25 |
E-beam Plasma Source With Profiled E-beam Extraction Grid For Uniform Plasma Generation App 20130098552 - Dorf; Leonid ;   et al. | 2013-04-25 |
Apparatus For Forming A Magnetic Field And Methods Of Use Thereof App 20120097870 - LERAY; GARY ;   et al. | 2012-04-26 |
Electronegative Plasma Thruster With Optimized Injection App 20110232261 - Chabert; Pascal ;   et al. | 2011-09-29 |