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Patent applications and USPTO patent grants for Leonardus Franken; Johannes Christiaan.The latest application filed is for "radiation system and lithographic apparatus comprising the same".
Patent | Date |
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Radiation system and lithographic apparatus comprising the same App 20080074655 - Wilhelmus Van Herpen; Maarten Marinus Johannes ;   et al. | 2008-03-27 |
Lithographic apparatus, device manufacturing method, and use of a radiation collector App 20070085043 - Leonardus Franken; Johannes Christiaan ;   et al. | 2007-04-19 |
Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby App 20060175558 - Bakker; Levinus Pieter ;   et al. | 2006-08-10 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20050157284 - Moors, Johannes Hubertus Josephina ;   et al. | 2005-07-21 |
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