loadpatents
Patent applications and USPTO patent grants for Lempens; Han Henricus Aldegonda.The latest application filed is for "lithography apparatus and device manufacturing method".
Patent | Date |
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Lithography Apparatus And Device Manufacturing Method App 20220308459 - EUMMELEN; Erik Henricus Egidius Catharina ;   et al. | 2022-09-29 |
Lithography apparatus and device manufacturing method Grant 11,372,336 - Eummelen , et al. June 28, 2 | 2022-06-28 |
Fluid Handling Structure And Lithographic Apparatus App 20220137519 - Eummelen; Erik Henricus Egidius Catharina ;   et al. | 2022-05-05 |
Fluid handling structure and lithographic apparatus Grant 11,231,653 - Eummelen , et al. January 25, 2 | 2022-01-25 |
Cleaning device and method of cleaning Grant 11,086,239 - Yu , et al. August 10, 2 | 2021-08-10 |
Fluid Handling Structure And Lithographic Apparatus App 20210181641 - EUMMELEN; Erik Henricus Egidius Catharina ;   et al. | 2021-06-17 |
Cleaning Device And Method Of Cleaning App 20210116824 - YU; Miao ;   et al. | 2021-04-22 |
Fluid handling structure and lithographic apparatus Grant 10,969,695 - Eummelen , et al. April 6, 2 | 2021-04-06 |
Lithography Apparatus And Device Manufacturing Method App 20210096471 - EUMMELEN; Erik Henricus Egidius Catharina ;   et al. | 2021-04-01 |
Fluid Handling Structure And Lithographic Apparatus App 20200004162 - EUMMELEN; Erik Henricus Egidius Catharina ;   et al. | 2020-01-02 |
Object holder and lithographic apparatus Grant 10,481,502 - Laurent , et al. Nov | 2019-11-19 |
Fluid handling structure and lithographic apparatus Grant 10,416,571 - Eummelen , et al. Sept | 2019-09-17 |
Lithographic apparatus and device manufacturing method Grant 10,268,127 - Riepen , et al. | 2019-04-23 |
Fluid Handling Structure And Lithographic Apparatus App 20190004434 - EUMMELEN; Erik Henricus Egidius Catharina ;   et al. | 2019-01-03 |
Object Holder And Lithographic Apparatus App 20180267412 - LAURENT; Thibault Simon Mathieu ;   et al. | 2018-09-20 |
Immersion lithographic apparatus and device manufacturing method Grant 10,001,712 - Polet , et al. June 19, 2 | 2018-06-19 |
Object holder and lithographic apparatus Grant 9,915,877 - Laurent , et al. March 13, 2 | 2018-03-13 |
Object Holder And Lithographic Apparatus App 20170315454 - LAURENT; Thibault Simon Mathieu ;   et al. | 2017-11-02 |
Object holder and lithographic apparatus Grant 9,785,055 - Laurent , et al. October 10, 2 | 2017-10-10 |
Lithographic Apparatus And Device Manufacturing Method App 20170242348 - RIEPEN; Michel ;   et al. | 2017-08-24 |
Immersion Lithographic Apparatus And Device Manufacturing Method App 20170219939 - POLET; Theodorus Wilhelmus ;   et al. | 2017-08-03 |
Lithographic apparatus and device manufacturing method Grant 9,645,506 - Riepen , et al. May 9, 2 | 2017-05-09 |
Object Holder And Lithographic Apparatus App 20150131064 - Laurent; Thibault Simon Mathieu ;   et al. | 2015-05-14 |
Lithographic Apparatus And Device Manufacturing Method App 20140098353 - RIEPEN; Michel ;   et al. | 2014-04-10 |
Lithographic apparatus and device manufacturing method Grant 8,681,308 - Berkvens , et al. March 25, 2 | 2014-03-25 |
Lithographic apparatus and device manufacturing method Grant 8,634,053 - Riepen , et al. January 21, 2 | 2014-01-21 |
Fluid handling structure, lithographic apparatus and device manufacturing method Grant 8,472,003 - Patel , et al. June 25, 2 | 2013-06-25 |
Immersion lithographic apparatus and device manufacturing method Grant 8,259,283 - Direcks , et al. September 4, 2 | 2012-09-04 |
Fluid Handling Structure, Lithographic Apparatus And Device Manufacturing Method App 20110005603 - Patel; Hrishikesh ;   et al. | 2011-01-13 |
Immersion Lithographic Apparatus And Device Manufacturing Method App 20090237632 - Direcks; Daniel Jozef Maria ;   et al. | 2009-09-24 |
Lithographic apparatus and device manufacturing method App 20090073395 - Berkvens; Paul Petrus Joannes ;   et al. | 2009-03-19 |
Lithographic apparatus and device manufacturing method App 20080212046 - Riepen; Michel ;   et al. | 2008-09-04 |
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