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Micromechanical functional apparatus, particularly a loudspeaker apparatus, and appropriate method of manufacture Grant 9,269,831 - Ehrenpfordt , et al. February 23, 2 | 2016-02-23 |
MEMS chip package and method for manufacturing an MEMS chip package Grant 8,981,499 - Ehrenpfordt , et al. March 17, 2 | 2015-03-17 |
Method for etching a layer on a silicon semiconductor substrate Grant 8,946,090 - Becker , et al. February 3, 2 | 2015-02-03 |
Component having a micromechanical microphone structure, and method for its production Grant 8,637,945 - Reichenbach , et al. January 28, 2 | 2014-01-28 |
Micromechanical Device for Measuring an Acceleration, a Pressure or the Like and a Corresponding Method App 20130327147 - Feyh; Ando ;   et al. | 2013-12-12 |
Method for producing a component, in particular a micromechanical and/or microfluidic and/or microelectronic component, and component Grant 8,529,781 - Fuchs , et al. September 10, 2 | 2013-09-10 |
Micromechanical Sound Transducer Arrangement and a Corresponding Production Method App 20130228937 - Ehrenpfordt; Ricardo ;   et al. | 2013-09-05 |
Method for producing micromechanical patterns having a relief-like sidewall outline shape or an adjustable angle of inclination Grant 8,501,516 - Laermer , et al. August 6, 2 | 2013-08-06 |
Method for producing a micromechanical component Grant 8,492,188 - Stahl , et al. July 23, 2 | 2013-07-23 |
Method for manufacturing separated micromechanical components situated on a silicon substrate and components manufactured therefrom Grant 8,466,042 - Laermer , et al. June 18, 2 | 2013-06-18 |
Micromechanical Functional Apparatus, Particularly A Loudspeaker Apparatus, And Appropriate Method Of Manufacture App 20130126991 - Ehrenpfordt; Ricardo ;   et al. | 2013-05-23 |
MEMS Chip Package and Method for Manufacturing an MEMS Chip Package App 20130126992 - Ehrenpfordt; Ricardo ;   et al. | 2013-05-23 |
Micromechanical Functional Apparatus, Particularly A Loudspeaker Apparatus, And Appropriate Method Of Manufacture App 20130094684 - Ehrenpfordt; Ricardo ;   et al. | 2013-04-18 |
Sensor element for sensing accelerations in three spatial directions Grant 8,353,213 - Zoellin , et al. January 15, 2 | 2013-01-15 |
Method For Producing A Micromechanical Component App 20120129291 - Stahl; Heiko ;   et al. | 2012-05-24 |
Method for etching a layer on a substrate Grant 8,182,707 - Laermer , et al. May 22, 2 | 2012-05-22 |
Component Having A Micromechanical Microphone Structure, And Method For Its Production App 20120091544 - Reichenbach; Frank ;   et al. | 2012-04-19 |
Method For Producing Micromechanical Patterns Having A Relief-like Sidewall Outline Shape Or An Adjustable Angle Of Inclination App 20120018779 - Laermer; Franz ;   et al. | 2012-01-26 |
Method for manufacturing a micromechanical chip and a component having a chip of this type Grant 7,989,263 - Kramer , et al. August 2, 2 | 2011-08-02 |
Method For Manufacturing Separated Micromechanical Components Situated On A Silicon Substrate And Components Manufactured Therefrom App 20110163398 - Laermer; Franz ;   et al. | 2011-07-07 |
Method for producing a micromechanical component having a thin-layer capping Grant 7,851,248 - Kronmueller , et al. December 14, 2 | 2010-12-14 |
Method for producing a component, in particular a micromechanical and/or microfluidic and/or microelectronic component, and component App 20100294710 - Fuchs; Tino ;   et al. | 2010-11-25 |
Micromechanical component and corresponding method for its manufacture Grant 7,834,409 - Reichenbach , et al. November 16, 2 | 2010-11-16 |
Sensor Element App 20100206076 - Zoellin; Jochen ;   et al. | 2010-08-19 |
Method For Etching A Layer On A Silicon Semiconductor Substrate App 20100203739 - Becker; Volker ;   et al. | 2010-08-12 |
Method for manufacturing a micromechanical chip and a component having a chip of this type App 20100084722 - KRAMER; Torsten ;   et al. | 2010-04-08 |
Reactor For Carrying Out An Etching Method For A Stack Of Masked Wafers And An Etching Method App 20100006427 - Rudhard; Joachim ;   et al. | 2010-01-14 |
Method For Producing A Micromechanical Component Having A Thin-layer Capping App 20100003790 - Kronmueller; Silvia ;   et al. | 2010-01-07 |
Micromechanical component and corresponding method for its manufacture App 20090026561 - Reichenbach; Frank ;   et al. | 2009-01-29 |
Method for Etching a Layer on a Substrate App 20080311751 - Laermer; Franz ;   et al. | 2008-12-18 |
Method for Accelerated Etching of Silicon App 20080254635 - Benzel; Hubert ;   et al. | 2008-10-16 |
Method for producing a device including an array of microneedles on a support, and device producible according to this method App 20080245764 - Pirk; Tjalf ;   et al. | 2008-10-09 |
Micromechanical component and suitable method for its manufacture Grant 7,262,071 - Larmer , et al. August 28, 2 | 2007-08-28 |
Micromechanical component and suitable method for its manufacture App 20060170012 - Larmer; Franz ;   et al. | 2006-08-03 |