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Patent applications and USPTO patent grants for LEIGHTON; Jamie Stuart.The latest application filed is for "sequential application of cleaning fluids for improved maintenance of chemical mechanical polishing systems".
Patent | Date |
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Sequential Application Of Cleaning Fluids For Improved Maintenance Of Chemical Mechanical Polishing Systems App 20220118583 - OH; Jeonghoon ;   et al. | 2022-04-21 |
Substrate Handling Systems And Methods For Cmp Processing App 20220072682 - OH; Jeonghoon ;   et al. | 2022-03-10 |
Methods Of Detecting Non-conforming Substrate Processing Events During Chemical Mechanical Polishing App 20220016739 - OH; Jeonghoon ;   et al. | 2022-01-20 |
Chemical Mechanical Polishing System With Platen Temperature Control App 20200246935 - Kind Code | 2020-08-06 |
Upper Dome Temperature Closed Loop Control App 20160282886 - LEIGHTON; Jamie Stuart ;   et al. | 2016-09-29 |
Reinforcement ring for carrier head Grant 9,381,613 - Leighton , et al. July 5, 2 | 2016-07-05 |
Reinforcement Ring For Carrier Head App 20140273776 - Leighton; Jamie Stuart ;   et al. | 2014-09-18 |
Self cleaning and adjustable slurry delivery arm Grant 8,523,639 - Leighton , et al. September 3, 2 | 2013-09-03 |
Point Of Use Recycling System For Cmp Slurry App 20110070811 - Neuber; Andreas ;   et al. | 2011-03-24 |
Self Cleaning And Adjustable Slurry Delivery Arm App 20100112917 - LEIGHTON; JAMIE STUART ;   et al. | 2010-05-06 |
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