| Patent | Date |
|---|
Method, device and software for the optical inspection of a semi-conductor substrate
Grant 7,417,719 - Michelsson August 26, 2 | 2008-08-26 |
Apparatus for measuring feature widths on masks for the semiconductor industry
Grant 7,375,792 - Vollrath , et al. May 20, 2 | 2008-05-20 |
Illumination device, and coordinate measuring instrument having an illumination device
Grant 7,209,243 - Cemic , et al. April 24, 2 | 2007-04-24 |
Apparatus for wafer inspection
Grant 7,180,585 - Kreh , et al. February 20, 2 | 2007-02-20 |
System operating unit
Grant 7,152,488 - Hedrich , et al. December 26, 2 | 2006-12-26 |
Method for detecting defects in images
App 20060204109 - Michelsson; Detlef ; et al. | 2006-09-14 |
Method for automatically providing data for the focus monitoring of a lithographic process
App 20060181693 - Kirsch; Markus | 2006-08-17 |
Substrate holder, and use of the substrate holder in a highly accurate measuring instrument
Grant 7,081,963 - Blaesing-Bangert , et al. July 25, 2 | 2006-07-25 |
DUV-capable microscope objective with parfocal IR focus
Grant 7,050,223 - Hoppen May 23, 2 | 2006-05-23 |
Method for inspecting a wafer
App 20060103838 - Richter; Joerg ; et al. | 2006-05-18 |
Adapter apparatus for a substrate workstation
App 20060097438 - Krieg; Thomas | 2006-05-11 |
Inspection microscope and objective for an inspection microscope
Grant 7,019,910 - Hoppen March 28, 2 | 2006-03-28 |
Apparatus and method for reducing the electron-beam-induced deposition of contamination products
Grant 7,005,638 - Spill February 28, 2 | 2006-02-28 |
Method and system for inspecting a wafer
App 20050280807 - Backhauss, Henning ; et al. | 2005-12-22 |
Method and system for inspecting a wafer
App 20050280808 - Backhauss, Henning ; et al. | 2005-12-22 |
Illumination device; and coordinate measuring instrument having an illumination device
Grant 6,975,409 - Cemic , et al. December 13, 2 | 2005-12-13 |
Measuring instrument and method for operating a measuring instrument for optical inspection of an object
App 20050254068 - Rinn, Klaus ; et al. | 2005-11-17 |
Contact sensor, and apparatus for protecting a protruding component
Grant 6,960,755 - Kaczynski November 1, 2 | 2005-11-01 |
Apparatus and method for the determination of positioning coordinates for semiconductor substrates
App 20050225642 - Spill, Burkhard | 2005-10-13 |
Apparatus and method for inspecting a semiconductor component
App 20050219521 - Vollrath, Wolfgang ; et al. | 2005-10-06 |
Critical dimension measuring instrument
Grant 6,943,901 - Cemic , et al. September 13, 2 | 2005-09-13 |
Method for inspecting a wafer
App 20050168729 - Jung, Paul ; et al. | 2005-08-04 |
Method and microscope for detection of a specimen
Grant 6,924,900 - Rinn August 2, 2 | 2005-08-02 |
Coordinate measuring stage
Grant 6,919,658 - Kaczynski July 19, 2 | 2005-07-19 |
Method and measuring instrument for determining the position of an edge of a pattern element on a substrate
Grant 6,920,249 - Rinn , et al. July 19, 2 | 2005-07-19 |
Apparatus and method for inspection of a wafer
App 20050134846 - Kreh, Albert ; et al. | 2005-06-23 |
Method for inspection of a wafer
App 20050134839 - Kreh, Albert ; et al. | 2005-06-23 |
Apparatus for wafer inspection
App 20050122509 - Backhauss, Henning | 2005-06-09 |
Apparatus For Measuring Feature Widths On Masks For The Semiconductor Industry
App 20050084770 - Vollrath, Wolfgang ; et al. | 2005-04-21 |
Autofocus module and method for a microscope-based system
Grant 6,879,440 - Cemic , et al. April 12, 2 | 2005-04-12 |
Method for measuring overlay shift
App 20050037270 - Gerlach, Steffen | 2005-02-17 |
Method for the inspection of features on semiconductor substrates
App 20050031189 - Richter, Jorg | 2005-02-10 |
Method for defect segmentation in features on semiconductor substrates
App 20050008217 - Luu, Thin Van ; et al. | 2005-01-13 |
Method and apparatus for scanning a semiconductor wafer
App 20050002022 - Michelsson, Detlef | 2005-01-06 |
Apparatus for inspection of a wafer
App 20050002023 - Kreh, Albert ; et al. | 2005-01-06 |
Apparatus for inspection of a wafer
App 20050001900 - Kreh, Albert ; et al. | 2005-01-06 |
Apparatus, method, and computer program for wafer inspection
App 20050002021 - Kreh, Albert ; et al. | 2005-01-06 |
System operating unit
App 20040244512 - Hedrich, Roland ; et al. | 2004-12-09 |
Apparatus for wafer inspection
App 20040239920 - Kreh, Albert ; et al. | 2004-12-02 |
Method and measuring arrangement for detecting an object
Grant 6,825,939 - Rinn November 30, 2 | 2004-11-30 |
Interferometric measurement apparatus for wavelength calibration
Grant 6,816,263 - Kaczynski , et al. November 9, 2 | 2004-11-09 |
Substrate holder, and use of the substrate holder in a highly accurate measuring instrument
Grant 6,816,253 - Blaesing-Bangert , et al. November 9, 2 | 2004-11-09 |
Autofocus module for microscope-based systems
Grant 6,812,446 - Kreh November 2, 2 | 2004-11-02 |
Apparatus and method for reducing the electron-beam-induced deposition of contamination products
App 20040195525 - Spill, Burkhard | 2004-10-07 |
Illumination apparatus for an optical system and microscope
App 20040179363 - Bosser, Hans-Artur ; et al. | 2004-09-16 |
Method and apparatus for examining semiconductor wafers in a context of die/SAW design
App 20040165764 - Michelsson, Detlef | 2004-08-26 |
Coordinate measuring stage and coordinate measuring instrument
Grant 6,778,260 - Blaesing-Bangert , et al. August 17, 2 | 2004-08-17 |
Method and apparatus for scanning a specimen using an optical imaging system
App 20040129859 - Sonksen, Dirk ; et al. | 2004-07-08 |
Method and microscope for detecting images of an object
App 20040120579 - Cemic, Franz ; et al. | 2004-06-24 |
Apparatus and Method for Calibration of an Optoelectronic Sensor and for Mensuration of Features on a Substrate
App 20040108448 - Bosser, Hans-Artur | 2004-06-10 |
Critical dimension measuring instrument
App 20040070821 - Cemic, Franz ; et al. | 2004-04-15 |
Coordinate measuring stage
App 20040027008 - Kaczynski, Ulrich | 2004-02-12 |
Method of measuring oscillatory semiconductor membranes and shielding for external excitations in the measurement
Grant 6,662,661 - Stach , et al. December 16, 2 | 2003-12-16 |
Method and device for optically examining structured surfaces of objects
Grant 6,633,375 - Veith , et al. October 14, 2 | 2003-10-14 |
Autofocus module and method for a microscope-based system
App 20030147134 - Cemic, Franz ; et al. | 2003-08-07 |
Method and apparatus for defect analysis of wafers
App 20030095252 - Mainberger, Robert | 2003-05-22 |
Coordinate measuring stage and coordinate measuring instrument
App 20030053037 - Blaesing-Bangert, Carola ; et al. | 2003-03-20 |
Method for reading out a detection chip of an electronic camera
App 20020196331 - Rinn, Klaus | 2002-12-26 |
Inspection microscope and objective for an inspection microscope
App 20020186463 - Hoppen, Gerhard | 2002-12-12 |
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