Leica Microsystems Lithography GmbH

Patent Applications and Registrations

Patent applications and USPTO patent grants for Leica Microsystems Lithography GmbH.The latest application filed is for "electrostatic deflection system for corpuscular radiation".

Company Profile

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Leica Microsystems Lithography GmbH - Jena DE
Leica Microsystems Lithography GmbH - DE DE
Leica Microsystems Lithography GmbH -

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Electrostatic deflection system for corpuscular radiation Grant 7,491,946 - Risse , et al. February 17, 2	2009-02-17
Device and method for imaging a multiple particle beam on a substrate Grant 7,332,730 - Heinitz , et al. February 19, 2	2008-02-19
Process for controlling the proximity effect correction Grant 7,241,542 - Hudek , et al. July 10, 2	2007-07-10
Electrostatic deflection system for corpuscular radiation App 20060192133 - Risse; Stefan ; et al.	2006-08-31
Method for exposing a substrate with a beam App 20060121396 - Gauglitz; Heike ; et al.	2006-06-08
Device and method for imaging a multiple particle beam on a substrate App 20060102853 - Heinitz; Joachim ; et al.	2006-05-18
Method for reducing the fogging effect App 20050287451 - Hudek, Peter ; et al.	2005-12-29
Process for controlling the proximity effect correction App 20050287450 - Hudek, Peter ; et al.	2005-12-29
Method and apparatus for forming a curved polyline on a radiation-sensitive resist Grant 6,774,375 - Plontke , et al. August 10, 2	2004-08-10
Six-axis positioning system having a zero-magnetic-field space Grant 6,639,225 - Kirschstein , et al. October 28, 2	2003-10-28
Method for exposing a layout comprising multiple layers on a wafer Grant 6,635,395 - Hahmann , et al. October 21, 2	2003-10-21
Method for directing an electron beam onto a target position on a substrate surface Grant 6,635,884 - Plontke , et al. October 21, 2	2003-10-21
Method and device for exposing a substrate to light Grant 6,600,162 - Hahmann , et al. July 29, 2	2003-07-29
Method for exposing a layout comprising multiple layers on a wafer App 20020039828 - Hahmann, Peter ; et al.	2002-04-04

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