Leica Microsystems Jena GmbH

Patent Applications and Registrations

Patent applications and USPTO patent grants for Leica Microsystems Jena GmbH.The latest application filed is for "system for inspecting a disk-shaped object".

Company Profile

0.17.18

Leica Microsystems Jena GmbH - Jena DE
LEICA MICROSYSTEMS JENA GmbH -
Leica Microsystems Jena GmbH - Goschwitzer Strasse 25 Jena DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
System for inspecting a disk-shaped object App 20070186699 - Hiltawski; Knut Detlef ; et al.	2007-08-16
Apparatus and method for recovery of a system for disc-shaped objects App 20060182616 - Weniger; Gert	2006-08-17
Apparatus and process for placing a FOUP on a loadport App 20060182537 - Weniger; Gert	2006-08-17
Method for automatic focusing an imaging optical system on the surface of a sample Grant 7,041,952 - Iffland , et al. May 9, 2	2006-05-09
Method and arrangement for transporting and inspecting semiconductor substrates Grant 7,028,565 - Birkner , et al. April 18, 2	2006-04-18
Setting module for the illumination of an optical instrument Grant 7,002,740 - Veith , et al. February 21, 2	2006-02-21
Method for determining layer thickness ranges Grant 6,985,237 - Mikkelsen , et al. January 10, 2	2006-01-10
Substrate conveying module and system made up of substrate conveying module and workstation Grant 6,962,471 - Birkner , et al. November 8, 2	2005-11-08
Apparatus and method for acquiring a complete image of a surface of a semiconductor substrate App 20050225632 - Iffland, Thomas ; et al.	2005-10-13
Method for evaluating pattern defects on a water surface Grant 6,941,009 - Wienecke September 6, 2	2005-09-06
Holding device for wafers Grant 6,918,735 - Urban , et al. July 19, 2	2005-07-19
Arrangement and method for the identification of substrates Grant 6,845,174 - Grau , et al. January 18, 2	2005-01-18
Method and apparatus for the determination of layer thicknesses Grant 6,826,511 - Mikkelsen , et al. November 30, 2	2004-11-30
Method and apparatus for high-resolution defect location and classification App 20040233422 - Wienecke, Joachim	2004-11-25
Method and arrangement for transporting and inspecting semiconductor substrates Grant 6,789,436 - Birkner , et al. September 14, 2	2004-09-14
Optical measurement arrangement App 20040169868 - Slodowski, Matthias ; et al.	2004-09-02
Method for automatic focusing App 20040169124 - Iffland, Thomas ; et al.	2004-09-02
Apparatus and method for thin-layer metrology App 20040164725 - Slodowski, Matthias	2004-08-26
Method and apparatus for user guidance in optical inspection and measurement of thin films and substrates, and software therefore Grant 6,775,583 - Slodowski , et al. August 10, 2	2004-08-10
Method and arrangement for transporting and inspecting semiconductor substrates App 20040149055 - Birkner, Andreas ; et al.	2004-08-05
Arrangement and method for illuminating a specimen field in an optical instrument Grant 6,713,746 - Veith , et al. March 30, 2	2004-03-30
Arrangement for the visual inspection of substrates Grant 6,674,524 - Urban January 6, 2	2004-01-06
Optical measurement arrangement, in particular for layer thickness measurement Grant 6,618,154 - Engel , et al. September 9, 2	2003-09-09
Method for the determination of layer thicknesses App 20030147085 - Mikkelsen, Hakon ; et al.	2003-08-07
Method and arrangement for transporting and inspecting semiconductor substrates App 20030140716 - Birkner, Andreas ; et al.	2003-07-31
Optical measurement arrangement having an ellipsometer Grant 6,600,560 - Mikkelsen , et al. July 29, 2	2003-07-29
Arrangement and method for inspecting unpatterned wafers App 20030038932 - Wienecke, Joachim ; et al.	2003-02-27
Arrangement and method for illuminating a specimen field in an optical instrument App 20030015643 - Veith, Michael ; et al.	2003-01-23
Setting module for the illumination of an optical instrument App 20030011882 - Veith, Michael ; et al.	2003-01-16
Optical measurement arrangement and method for inclination measurement Grant 6,504,608 - Hallmeyer , et al. January 7, 2	2003-01-07
Arrangement for wafer inspection App 20020187035 - Schaefer, Kersten ; et al.	2002-12-12
Method and apparatus for monitoring the light emitted from an illumination apparatus for an optical measuring instrument Grant 6,456,373 - Wienecke , et al. September 24, 2	2002-09-24
Method and arrangement for transporting and inspecting semiconductor substrates App 20020095999 - Birkner, Andreas ; et al.	2002-07-25
Arrangement for the visual inspection of substrates App 20020097394 - Urban, Karsten	2002-07-25
Arrangement and method for the identification of substrates App 20020097905 - Grau, Dominik ; et al.	2002-07-25

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