| Patent | Date |
|---|
Monoalkoxysilanes And Dense Organosilica Films Made Therefrom
App 20220301862 - XIAO; MANCHAO ; et al. | 2022-09-22 |
Formulation For Deposition Of Silicon Doped Hafnium Oxide
App 20220282367 - MACDONALD; MATTHEW R. ; et al. | 2022-09-08 |
Compositions Comprising Silacycloalkanes And Methods Using Same For Deposition Of Silicon-containing Film
App 20220267642 - VRTIS; RAYMOND N. ; et al. | 2022-08-25 |
Organosilicon Precursors For Deposition Of Silicon-containing Films
App 20220234903 - PEARLSTEIN; RONALD M. ; et al. | 2022-07-28 |
Compositions And Methods Using Same For Thermal Deposition Silicon-containing Films
App 20220213597 - HARIPIN; CHANDRA ; et al. | 2022-07-07 |
Formulation For Deposition Of Silicon Doped Hafnium Oxide As Ferroelectric Materials
App 20220189767 - Lei; Xinjian ; et al. | 2022-06-16 |
Halidosilane Compounds And Compositions And Processes For Depositing Silicon-containing Films Using Same
App 20220154331 - LEI; XINJIAN ; et al. | 2022-05-19 |
Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features
App 20220157601 - Li; Jianheng ; et al. | 2022-05-19 |
Methods For Making Silicon Containing Films That Have High Carbon Content
App 20220145453 - Lei; Xinjian ; et al. | 2022-05-12 |
Organoamino-functionalized Cyclic Oligosiloxanes For Deposition Of Silicon-containing Films
App 20220081453 - MACDONALD; MATTHEW R. ; et al. | 2022-03-17 |
Precursors and flowable CVD methods for making low-k films to fill surface features
Grant 11,270,880 - Li , et al. March 8, 2 | 2022-03-08 |
Processes for depositing silicon-containing films using halidosilane compounds
Grant 11,268,190 - Lei , et al. March 8, 2 | 2022-03-08 |
Silicon Compounds And Methods For Depositing Films Using Same
App 20220044928 - RIDGEWAY; ROBERT G. ; et al. | 2022-02-10 |
Compositions And Processes For Depositing Carbon-doped Silicon-containing Films
App 20220041870 - XIAO; MANCHAO ; et al. | 2022-02-10 |
Composition And Methods Using Same For Carbon Doped Silicon Containing Films
App 20220037151 - CHANDRA; HARIPIN ; et al. | 2022-02-03 |
Methods For Making Silicon And Nitrogen Containing Films
App 20220037144 - RAO; MADHUKAR B ; et al. | 2022-02-03 |
Organoaminosilane Precursors And Methods For Depositing Films Comprising Same
App 20210407793 - O'NEILL; MARK LEONARD ; et al. | 2021-12-30 |
Methods For Making Silicon And Nitrogen Containing Films
App 20210398796 - LEI; XINJIAN ; et al. | 2021-12-23 |
Methods for Depositing a Conformal Metal or Metalloid Silicon Nitride Film and Resultant Films
App 20210388489 - Lei; Xinjian ; et al. | 2021-12-16 |
High Temperature Atomic Layer Deposition Of Silicon-containing Film
App 20210380418 - WANG; MEILIANG ; et al. | 2021-12-09 |
Formulation for deposition of silicon doped hafnium oxide as ferroelectric materials
Grant 11,193,206 - Lei , et al. December 7, 2 | 2021-12-07 |
Composition For High Temperature Atomic Layer Deposition Of High Quality Silicon Oxide Thin Films
App 20210363639 - WANG; MEILIANG ; et al. | 2021-11-25 |
Silacyclic Compounds And Methods For Depositing Silicon-containing Films Using Same
App 20210339280 - Lei; Xinjian ; et al. | 2021-11-04 |
Trisilylamine Derivatives As Precursors For High Growth Rate Silicon-containing Films
App 20210340673 - Lei; Xinjian ; et al. | 2021-11-04 |
Silicon compounds and methods for depositing films using same
Grant 11,158,498 - Ridgeway , et al. October 26, 2 | 2021-10-26 |
Compositions and methods using same for carbon doped silicon containing films
Grant 11,152,206 - Chandra , et al. October 19, 2 | 2021-10-19 |
Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films
Grant 11,142,658 - Spence , et al. October 12, 2 | 2021-10-12 |
Organoaminosilane precursors and methods for depositing films comprising same
Grant 11,139,162 - O'Neill , et al. October 5, 2 | 2021-10-05 |
Methods for depositing a conformal metal or metalloid silicon nitride film and resultant films
Grant 11,104,990 - Lei , et al. August 31, 2 | 2021-08-31 |
Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-containing films
Grant 11,098,069 - MacDonald , et al. August 24, 2 | 2021-08-24 |
Trisilylamine derivatives as precursors for high growth rate silicon-containing films
Grant 11,078,569 - Lei , et al. August 3, 2 | 2021-08-03 |
Formulation for deposition of silicon doped hafnium oxide as ferroelectric materials
Grant 11,081,337 - Lei , et al. August 3, 2 | 2021-08-03 |
Silacycloalkane compounds and methods for depositing silicon containing films using same
Grant 11,043,374 - Xiao , et al. June 22, 2 | 2021-06-22 |
Compositions and methods for depositing silicon nitride films
Grant 11,035,039 - Lei , et al. June 15, 2 | 2021-06-15 |
Precursors and flowable CVD methods for making low-K films to fill surface features
Grant 11,017,998 - Li , et al. May 25, 2 | 2021-05-25 |
Compositions And Methods Using Same For Deposition Of Silicon-containing Film
App 20210140040 - LI; JIANHENG ; et al. | 2021-05-13 |
High temperature atomic layer deposition of silicon oxide thin films
Grant 10,991,571 - Chandra , et al. April 27, 2 | 2021-04-27 |
Methods for making silicon and nitrogen containing films
Grant 10,985,010 - Chandra , et al. April 20, 2 | 2021-04-20 |
Method and precursors for manufacturing 3D devices
Grant 10,985,013 - Li , et al. April 20, 2 | 2021-04-20 |
Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features
App 20210043446 - Li; Jianheng ; et al. | 2021-02-11 |
Volatile dihydropyrazinly and dihydropyrazine metal complexes
Grant 10,914,001 - Norman , et al. February 9, 2 | 2021-02-09 |
Alkoxysilylamine compounds and applications thereof
Grant 10,899,500 - Xiao , et al. January 26, 2 | 2021-01-26 |
Organoamino-Functionalized Linear And Cyclic Oligosiloxanes For Deposition Of Silicon-Containing Films
App 20210017339 - Xiao; Manchao ; et al. | 2021-01-21 |
Boron-Containing Compounds, Compositions, And Methods For The Deposition Of A Boron Containing Films
App 20200365401 - Lei; Xinjian ; et al. | 2020-11-19 |
Alkoxysilacyclic Or Acyloxysilacyclic Compounds And Methods For Depositing Films Using Same
App 20200354386 - Ridgeway; Robert Gordon ; et al. | 2020-11-12 |
Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films
Grant 10,822,458 - Xiao , et al. November 3, 2 | 2020-11-03 |
Compositions And Methods For The Deposition Of Silicon Oxide Films
App 20200308416 - Lei; Xinjian ; et al. | 2020-10-01 |
Boron-containing compounds, compositions, and methods for the deposition of a boron containing films
Grant 10,763,103 - Lei , et al. Sep | 2020-09-01 |
Compositions And Methods For Depositing Silicon-containing Films
App 20200270749 - Li; Ming ; et al. | 2020-08-27 |
Methods for depositing Group 13 metal or metalloid nitride films
Grant 10,745,808 - Lei , et al. A | 2020-08-18 |
Compositions And Methods Using Same for Silicon Containing Films
App 20200247830 - Kind Code | 2020-08-06 |
Deposition Of Carbon Doped Silicon Oxide
App 20200248309 - Kind Code | 2020-08-06 |
Compositions and methods for the deposition of silicon oxide films
Grant 10,703,915 - Lei , et al. | 2020-07-07 |
Compositions And Methods Using Same For Carbon Doped Silicon Containing Films
App 20200203155 - Chandra; Haripin ; et al. | 2020-06-25 |
1-Methyl-1-Iso-Propoxy-Silacycloalkanes And Dense Organosilica Films Made Therefrom
App 20200165727 - Entley; William Robert ; et al. | 2020-05-28 |
Silacycloalkane Compounds And Methods For Depositing Silicon Containing Films Using Same
App 20200075323 - Xiao; Manchao ; et al. | 2020-03-05 |
Methods For Making Silicon Containing Films That Have High Carbon Content
App 20200071819 - Lei; Xinjian ; et al. | 2020-03-05 |
Methods For Making Silicon And Nitrogen Containing Films
App 20200075312 - Chandra; Haripin ; et al. | 2020-03-05 |
Stable Alkenyl Or Alkynyl-Containing Organosilicon Precursor Compositions
App 20200062787 - Ridgeway; Robert G. ; et al. | 2020-02-27 |
Precursors And Flowable CVD Methods For Making Low-K Films To Fill Surface Features
App 20200058496 - Li; Jianheng ; et al. | 2020-02-20 |
Silicon Compounds And Methods For Depositing Films Using Same
App 20200048286 - Xiao; Manchao ; et al. | 2020-02-13 |
Organoaminosilane Precursors And Methods For Depositing Films Comprising Same
App 20200051811 - O'Neill; Mark Leonard ; et al. | 2020-02-13 |
Compositions and Methods for the Deposition of Silicon Oxide Films
App 20200040192 - Lei; Xinjian ; et al. | 2020-02-06 |
Halidosilane Compounds And Compositions And Processes For Depositing Silicon-containing Films Using Same
App 20200032389 - Lei; Xinjian ; et al. | 2020-01-30 |
Siloxane Compositions and Methods for Using the Compositions to Deposit Silicon Containing Films
App 20190382886 - Li; Jianheng ; et al. | 2019-12-19 |
Silicon Compounds and Methods for Depositing Films Using Same
App 20190385840 - Ridgeway; Robert G. ; et al. | 2019-12-19 |
Bisaminoalkoxysilane Compounds And Methods For Using Same To Deposit Silicon-Containing Films
App 20190359637 - Spence; Daniel P. ; et al. | 2019-11-28 |
Precursors and flowable CVD methods for making low-K films to fill surface features
Grant 10,468,244 - Li , et al. No | 2019-11-05 |
Carbon bridged aminosilane compounds for high growth rate silicon-containing films
Grant 10,464,953 - Wang , et al. No | 2019-11-05 |
Organoaminosilane precursors and methods for depositing films comprising same
Grant 10,460,929 - O'Neill , et al. Oc | 2019-10-29 |
Organoaminosilane precursors and methods for depositing films comprising same
Grant 10,453,675 - O'Neill , et al. Oc | 2019-10-22 |
Monoorganoaminodisilane Precursors and Methods for Depositing Films Comprising Same
App 20190318925 - Lei; Xinjian ; et al. | 2019-10-17 |
Spin-On Metallization
App 20190309422 - Cooper; Alan C. ; et al. | 2019-10-10 |
Method and Precursors for Manufacturing 3D Devices
App 20190304775 - Li; Jianheng ; et al. | 2019-10-03 |
Compositions And Methods Using Same For Deposition Of Silicon-containing Film
App 20190292658 - Li; Jianheng ; et al. | 2019-09-26 |
Volatile dihydropyrazinly and dihydropyrazine metal complexes
App 20190292659 - Norman; John Anthony Thomas ; et al. | 2019-09-26 |
Silicon-based films and methods of forming the same
Grant 10,422,034 - Lei , et al. Sept | 2019-09-24 |
Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films
Grant 10,421,766 - Spence , et al. Sept | 2019-09-24 |
Compositions and Processes for Depositing Carbon-Doped Silicon-Containing Films
App 20190287798 - Xiao; Manchao ; et al. | 2019-09-19 |
Compositions and Methods Using Same for Deposition of Silicon-Containing Films
App 20190271075 - Lei; Xinjian ; et al. | 2019-09-05 |
Alkyl-alkoxysilacyclic compounds
Grant 10,395,920 - Vrtis , et al. A | 2019-08-27 |
Organoamino-Functionalized Cyclic Oligosiloxanes for Deposition of Silicon-Containing Films
App 20190233446 - MacDonald; Matthew R. ; et al. | 2019-08-01 |
Alkoxysilylamine Compounds and Applications Thereof
App 20190225377 - Xiao; Manchao ; et al. | 2019-07-25 |
Method and precursors for manufacturing 3D devices
Grant 10,354,860 - Li , et al. July 16, 2 | 2019-07-16 |
High Temperature Atomic Layer Deposition of Silicon Oxide Thin Films
App 20190189431 - Chandra; Haripin ; et al. | 2019-06-20 |
Compositions and methods using same for deposition of silicon-containing films
Grant 10,316,407 - Lei , et al. | 2019-06-11 |
Compositions and processes for depositing carbon-doped silicon-containing films
Grant 10,319,584 - Xiao , et al. | 2019-06-11 |
Barrier materials for display devices
Grant 10,319,862 - Ridgeway , et al. | 2019-06-11 |
Organoaminosilanes and methods for making same
Grant 10,294,250 - Xiao , et al. | 2019-05-21 |
Silacyclic Compounds and Methods for Depositing Silicon-Containing Films Using Same
App 20190134663 - Lei; Xinjian ; et al. | 2019-05-09 |
High temperature atomic layer deposition of silicon-containing films
Grant 10,283,348 - Wang , et al. | 2019-05-07 |
Alkoxysilylamine compounds and applications thereof
Grant 10,279,959 - Xiao , et al. | 2019-05-07 |
Methods for depositing films with organoaminodisilane precursors
Grant 10,283,350 - Xiao , et al. | 2019-05-07 |
High temperature atomic layer deposition of silicon oxide thin films
Grant 10,242,864 - Chandra , et al. | 2019-03-26 |
Trisilylamine Derivatives as Precursors for High Growth Rate Silicon-Containing Films
App 20190085452 - Lei; Xinjian ; et al. | 2019-03-21 |
Compositions And Methods For Depositing Silicon Nitride Films
App 20190085451 - Lei; Xinjian ; et al. | 2019-03-21 |
Compositions And Methods Using Same For Deposition Of Silicon-containing Film
App 20190055645 - Li; Jianheng ; et al. | 2019-02-21 |
Compositions and Methods Using Same for Deposition of Silicon-Containing Film
App 20190017167 - Vrtis; Raymond Nicholas ; et al. | 2019-01-17 |
Compositions and methods using same for carbon doped silicon containing films
Grant 10,145,008 - Chandra , et al. De | 2018-12-04 |
Volatile Dihydropyrazinly and Dihydropyrazine Metal Complexes
App 20180327900 - Norman; John Anthony Thomas ; et al. | 2018-11-15 |
Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features
App 20180315598 - Li; Jianheng ; et al. | 2018-11-01 |
Compositions and methods using same for deposition of silicon-containing film
Grant 10,106,890 - Li , et al. October 23, 2 | 2018-10-23 |
Methods for Depositing Films with Organoaminodisilane Precursors
App 20180294152 - Xiao; Manchao ; et al. | 2018-10-11 |
Method and Composition for Providing Pore Sealing Layer on Porous Low Dielectric Constant Films
App 20180277360 - Li; Jianheng ; et al. | 2018-09-27 |
Methods For Depositing A Conformal Metal Or Metalloid Silicon Nitride Film
App 20180274097 - LEI; Xinjian ; et al. | 2018-09-27 |
Formulation for Deposition of Silicon Doped Hafnium Oxide as Ferroelectric Materials
App 20180265967 - Lei; Xinjian ; et al. | 2018-09-20 |
Formulation for Deposition of Silicon Doped Hafnium Oxide as Ferroelectric Materials
App 20180269057 - Lei; Xinjian ; et al. | 2018-09-20 |
Organoaminodisilane precursors and methods for depositing films comprising same
Grant 10,077,364 - Mayorga , et al. September 18, 2 | 2018-09-18 |
Methods For Depositing A Conformal Metal Or Metalloid Silicon Nitride Film And Resultant Films
App 20180245215 - Lei; Xinjian ; et al. | 2018-08-30 |
Alkyl-Alkoxysilacyclic Compounds And Methods For Depositing Films Using Same
App 20180233355 - Vrtis; Raymond Nicholas ; et al. | 2018-08-16 |
Organoamino-Polysiloxanes For Deposition Of Silicon-Containing Films
App 20180223428 - Lei; Xinjian ; et al. | 2018-08-09 |
Organoamino-Functionalized Linear And Cyclic Oligosiloxanes For Deposition Of Silicon-Containing Films
App 20180223047 - Xiao; Manchao ; et al. | 2018-08-09 |
Methods for depositing films with organoaminodisilane precursors
Grant 9,997,350 - Xiao , et al. June 12, 2 | 2018-06-12 |
Volatile dihydropyrazinly and dihydropyrazine metal complexes
Grant 9,994,954 - Norman , et al. June 12, 2 | 2018-06-12 |
Organoaminodisilane precursors and methods for depositing films comprising same
Grant 9,978,585 - Xiao , et al. May 22, 2 | 2018-05-22 |
Compositions and Methods for the Deposition of Silicon Oxide Films
App 20180127592 - Lei; Xinjian ; et al. | 2018-05-10 |
Silicon-Based Films and Methods of Forming the Same
App 20180119276 - Lei; Xinjian ; et al. | 2018-05-03 |
Carbon Bridged Aminosilane Compounds for High Growth Rate Silicon-Containing Films
App 20180105541 - Wang; Meiliang ; et al. | 2018-04-19 |
Alkyl-alkoxysilacyclic compounds
Grant 9,922,818 - Vrtis , et al. March 20, 2 | 2018-03-20 |
Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features
App 20180061636 - Li; Jianheng ; et al. | 2018-03-01 |
Methods for depositing silicon nitride films
Grant 9,905,415 - Chandra , et al. February 27, 2 | 2018-02-27 |
Process For Depositing Porous Organosilicate Glass Films For Use As Resistive Random Access Memory
App 20180047898 - RIDGEWAY; Robert Gordon ; et al. | 2018-02-15 |
Compositions and Methods Using Same for Carbon Doped Silicon Containing Films
App 20180033614 - Chandra; Haripin ; et al. | 2018-02-01 |
Silicon-based films and methods of forming the same
Grant 9,879,340 - Lei , et al. January 30, 2 | 2018-01-30 |
Compositions And Methods Using Same For Carbon Doped Silicon Containing Films
App 20180023192 - Chandra; Haripin ; et al. | 2018-01-25 |
Compositions And Methods Using Same For Deposition Of Silicon-containing Film
App 20170335449 - LI; Jianheng ; et al. | 2017-11-23 |
Compositions And Methods Using Same For Deposition Of Silicon-containing Films
App 20170338109 - LEI; Xinjian ; et al. | 2017-11-23 |
Catalyst and formulations comprising same for alkoxysilanes hydrolysis reaction in semiconductor process
Grant 9,809,711 - Xiao , et al. November 7, 2 | 2017-11-07 |
AZA-polysilane precursors and methods for depositing films comprising same
Grant 9,796,739 - Xiao , et al. October 24, 2 | 2017-10-24 |
Organoaminosilanes and methods for making same
Grant 9,758,534 - Xiao , et al. September 12, 2 | 2017-09-12 |
High Temperature Atomic Layer Deposition Of Silicon Oxide Thin Films
App 20170256399 - Chandra; Haripin ; et al. | 2017-09-07 |
Organoaminosilane Precursors and Methods for Depositing Films Comprising Same
App 20170207084 - O'Neill; Mark Leonard ; et al. | 2017-07-20 |
High Temperature Atomic Layer Deposition of Silicon-Containing Films
App 20170207082 - Wang; Meiliang ; et al. | 2017-07-20 |
Organoaminosilanes and Methods for Making Same
App 20170204120 - Xiao; Manchao ; et al. | 2017-07-20 |
Organoaminodisilane Precursors and Methods for Depositing Films Comprising Same
App 20170183502 - Mayorga; Steven Gerard ; et al. | 2017-06-29 |
Methods for Depositing Films with Organoaminodisilane Precursors
App 20170186605 - Xiao; Manchao ; et al. | 2017-06-29 |
Alkoxyaminosilane compounds and applications thereof
Grant 9,677,178 - Spence , et al. June 13, 2 | 2017-06-13 |
Vessel With Filter
App 20170137936 - Birtcher; Charles Michael ; et al. | 2017-05-18 |
Organoaminodisilane precursors and methods for depositing films comprising same
Grant 9,627,193 - Mayorga , et al. April 18, 2 | 2017-04-18 |
Methods for depositing films with organoaminodisilane precursors
Grant 9,613,799 - Xiao , et al. April 4, 2 | 2017-04-04 |
Vessel with filter
Grant 9,598,766 - Birtcher , et al. March 21, 2 | 2017-03-21 |
Methods For Depositing Group 13 Metal or Metalloid Nitride Films
App 20170022612 - Lei; Xinjian ; et al. | 2017-01-26 |
Method of making a multicomponent film
Grant 9,543,517 - Lei , et al. January 10, 2 | 2017-01-10 |
High Temperature Atomic Layer Deposition Of Silicon Oxide Thin Films
App 20160365244 - Chandra; Haripin ; et al. | 2016-12-15 |
Compositions and Processes for Depositing Carbon-Doped Silicon-Containing Films
App 20160351389 - Xiao; Manchao ; et al. | 2016-12-01 |
Methods to prepare silicon-containing films
Grant 9,502,234 - Xiao , et al. November 22, 2 | 2016-11-22 |
Boron-containing Compounds, Compositions, And Methods For The Deposition Of A Boron Containing Films
App 20160293410 - Lei; Xinjian ; et al. | 2016-10-06 |
High temperature atomic layer deposition of silicon oxide thin films
Grant 9,460,912 - Chandra , et al. October 4, 2 | 2016-10-04 |
Compositions and processes for depositing carbon-doped silicon-containing films
Grant 9,447,287 - Xiao , et al. September 20, 2 | 2016-09-20 |
Splashguard and inlet diffuser for high vacuum, high flow bubbler vessel
Grant 9,435,027 - Birtcher , et al. September 6, 2 | 2016-09-06 |
Bisaminoalkoxysilane Compounds And Methods For Using Same To Deposit Silicon-containing Films
App 20160237100 - Spence; Daniel P. ; et al. | 2016-08-18 |
Method And Precursors For Manufacturing 3d Devices
App 20160225616 - Li; Jianheng ; et al. | 2016-08-04 |
Methods For Depositing Films With Organoaminodisilane Precursors
App 20160203975 - Xiao; Manchao ; et al. | 2016-07-14 |
Organoaminosilanes And Methods For Making Same
App 20160168169 - Xiao; Manchao ; et al. | 2016-06-16 |
Methods for depositing films with organoaminodisilane precursors
Grant 9,337,018 - Xiao , et al. May 10, 2 | 2016-05-10 |
Silicon-based Films And Methods Of Forming The Same
App 20160122869 - Lei; Xinjian ; et al. | 2016-05-05 |
Alkoxyaminosilane Compounds And Applications Thereof
App 20160083847 - Spence; Daniel P. ; et al. | 2016-03-24 |
Method Of Making A Multicomponent Film
App 20160087207 - Lei; Xinjian ; et al. | 2016-03-24 |
Method And Composition For Providing Pore Sealing Layer On Porous Low Dielectric Constant Films
App 20160049293 - Li; Jianheng ; et al. | 2016-02-18 |
Organoaminosilanes and methods for making same
Grant 9,233,990 - Xiao , et al. January 12, 2 | 2016-01-12 |
Alkyl-Alkoxysilacyclic Compounds and Methods for Depositing Films Using Same
App 20150364321 - Vrtis; Raymond Nicholas ; et al. | 2015-12-17 |
Method of making a multicomponent film
Grant 9,214,630 - Xiao , et al. December 15, 2 | 2015-12-15 |
Alkoxyaminosilane compounds and applications thereof
Grant 9,200,167 - Spence , et al. December 1, 2 | 2015-12-01 |
Compositions And Methods For The Deposition Of Silicon Oxide Films
App 20150275355 - Mallikarjunan; Anupama ; et al. | 2015-10-01 |
Organoaminosilanes And Methods For Making Same
App 20150246937 - Xiao; Manchao ; et al. | 2015-09-03 |
Methods to Prepare Silicon-Containing Films
App 20150249007 - Xiao; Manchao ; et al. | 2015-09-03 |
Multidentate ketoimine ligands for metal complexes
Grant 9,079,923 - Lei , et al. July 14, 2 | 2015-07-14 |
Aza-polysilane Precursors And Methods For Depositing Films Comprising Same
App 20150147871 - Xiao; Manchao ; et al. | 2015-05-28 |
Precursors For GST Films In ALD/CVD Processes
App 20150140790 - Xiao; Manchao ; et al. | 2015-05-21 |
Complexes of imidazole ligands
Grant 9,018,387 - Norman , et al. April 28, 2 | 2015-04-28 |
Organoaminosilane precursors and methods for making and using same
Grant 9,005,719 - Xiao , et al. April 14, 2 | 2015-04-14 |
Methods for Depositing Silicon Nitride Films
App 20150099375 - Haripin; Chandra ; et al. | 2015-04-09 |
Halogenated organoaminosilane precursors and methods for depositing films comprising same
Grant 8,993,072 - Xiao , et al. March 31, 2 | 2015-03-31 |
Organoaminosilane Precursors And Methods For Depositing Films Comprising Same
App 20150087139 - O'Neill; Mark Leonard ; et al. | 2015-03-26 |
Metal-enolate precursors for depositing metal-containing films
Grant 8,962,875 - Norman , et al. February 24, 2 | 2015-02-24 |
Group 4 metal precursors for metal-containing films
Grant 8,952,188 - Ivanov , et al. February 10, 2 | 2015-02-10 |
Volatile dihydropyrazinly and dihydropyrazine metal complexes
App 20150030782 - Ivanov; Sergei Vladimirovich ; et al. | 2015-01-29 |
Process for producing silicon and oxide films from organoaminosilane precursors
Grant 8,940,648 - Xiao , et al. January 27, 2 | 2015-01-27 |
Organoaminodisilane Precursors and Methods for Depositing Films Comprising Same
App 20150024608 - Mayorga; Steven Gerard ; et al. | 2015-01-22 |
Barrier Materials For Display Devices
App 20150021599 - Ridgeway; Robert Gordon ; et al. | 2015-01-22 |
Compositions And Methods For Making Silicon Containing Films
App 20150014823 - Mallikarjunan; Anupama ; et al. | 2015-01-15 |
Organoaminosilane precursors and methods for depositing films comprising same
Grant 8,912,353 - Xiao , et al. December 16, 2 | 2014-12-16 |
Low temperature deposition of silicon-containing films
Grant 8,906,455 - Yang , et al. December 9, 2 | 2014-12-09 |
Method Of Making A Multicomponent Film
App 20140308802 - Xiao; Manchao ; et al. | 2014-10-16 |
Compositions And Processes For Depositing Carbon-doped Silicon-containing Films
App 20140287164 - Xiao; Manchao ; et al. | 2014-09-25 |
Organoaminosilane Precursors And Methods For Making And Using Same
App 20140272194 - Xiao; Manchao ; et al. | 2014-09-18 |
Plasma enhanced cyclic chemical vapor deposition of silicon-containing films
Grant 8,828,505 - Thridandam , et al. September 9, 2 | 2014-09-09 |
Splashguard and Inlet Diffuser for High Vacuum, High Flow Bubbler Vessel
App 20140191423 - Birtcher; Charles Michael ; et al. | 2014-07-10 |
Splashguard and Inlet Diffuser for High Vacuum, High Flow Bubbler Vessel
App 20140193578 - Birtcher; Charles Michael ; et al. | 2014-07-10 |
Organoaminosilane precursors and methods for making and using same
Grant 8,771,807 - Xiao , et al. July 8, 2 | 2014-07-08 |
Alkoxysilylamine Compounds And Applications Thereof
App 20140158580 - Xiao; Manchao ; et al. | 2014-06-12 |
Method for preparing metal complexes of polydentate beta-ketoiminates
Grant 8,722,933 - Lei , et al. May 13, 2 | 2014-05-13 |
Splashguard and inlet diffuser for high vacuum, high flow bubbler vessel
Grant 8,708,320 - Steidl , et al. April 29, 2 | 2014-04-29 |
Group IV metal complexes for metal-containing film deposition
Grant 8,691,710 - Bailey, III , et al. April 8, 2 | 2014-04-08 |
Complexes of imidazole ligands
Grant 8,680,289 - Norman , et al. March 25, 2 | 2014-03-25 |
Amidate precursors for depositing metal containing films
Grant 8,642,797 - Ivanov , et al. February 4, 2 | 2014-02-04 |
Non-oxygen Containing Silicon-based Films And Methods Of Forming The Same
App 20140030448 - Bowen; Heather Regina ; et al. | 2014-01-30 |
Method of Making a Multicomponent Film
App 20140024173 - Xiao; Manchao ; et al. | 2014-01-23 |
Metal complexes for metal-containing film deposition
Grant 8,617,305 - Lei , et al. December 31, 2 | 2013-12-31 |
Metal complexes for metal-containing film deposition
Grant 08617305 - | 2013-12-31 |
Process for Producing Silicon and Oxide Films from Organoaminosilane Precursors
App 20130330937 - Xiao; Manchao ; et al. | 2013-12-12 |
Organoaminodisilane Precursors And Methods For Depositing Films Comprising Same
App 20130319290 - Xiao; Manchao ; et al. | 2013-12-05 |
Organoaminodisilane Precursors And Methods For Depositing Films Comprising Same
App 20130323435 - Xiao; Manchao ; et al. | 2013-12-05 |
Vessel with Filter
App 20130312855 - Birtcher; Charles Michael ; et al. | 2013-11-28 |
Liquid precursor for depositing group 4 metal containing films
Grant 8,592,606 - Lei , et al. November 26, 2 | 2013-11-26 |
Methods of forming strontium titanate films
Grant 8,592,058 - Matz , et al. November 26, 2 | 2013-11-26 |
High Temperature Atomic Layer Deposition Of Silicon Oxide Thin Films
App 20130295779 - Chandra; Haripin ; et al. | 2013-11-07 |
Method of making a multicomponent film
Grant 8,563,353 - Xiao , et al. October 22, 2 | 2013-10-22 |
Catalyst Synthesis For Organosilane Sol-gel Reactions
App 20130243968 - Xiao; Manchao ; et al. | 2013-09-19 |
Process for producing silicon and oxide films from organoaminosilane precursors
Grant 8,530,361 - Xiao , et al. September 10, 2 | 2013-09-10 |
Precursors for GST Films in ALD/CVD Processes
App 20130210217 - Xiao; Manchao ; et al. | 2013-08-15 |
Liquid composition containing aminoether for deposition of metal-containing films
Grant 8,507,704 - Ivanov , et al. August 13, 2 | 2013-08-13 |
Binary and ternary metal chalcogenide materials and method of making and using same
Grant 8,507,040 - Xiao , et al. August 13, 2 | 2013-08-13 |
Alkoxyaminosilane Compounds And Applications Thereof
App 20130196082 - Spence; Daniel P. ; et al. | 2013-08-01 |
Low Temperature Deposition of Silicon-Containing Films
App 20130189853 - Yang; Liu ; et al. | 2013-07-25 |
Catalyst And Formulations Comprising Same For Alkoxysilanes Hydrolysis Reaction In Semiconductor Process
App 20130180215 - Xiao; Manchao ; et al. | 2013-07-18 |
Precursors for depositing group 4 metal-containing films
Grant 8,471,049 - Lei , et al. June 25, 2 | 2013-06-25 |
Organoaminosilane Precursors And Methods For Making And Using Same
App 20130129940 - Xiao; Manchao ; et al. | 2013-05-23 |
Halogenated Organoaminosilane Precursors And Methods For Depositing Films Comprising Same
App 20130078392 - Xiao; Manchao ; et al. | 2013-03-28 |
Complexes Of Imidazole Ligands
App 20130078391 - Norman; John Anthony Thomas ; et al. | 2013-03-28 |
Metal-Enolate Precursors For Depositing Metal-Containing Films
App 20130066082 - Norman; John Anthony Thomas ; et al. | 2013-03-14 |
Method of forming strontium titanate films
App 20130059066 - Rui; Xiangxin ; et al. | 2013-03-07 |
Group IV Metal Complexes For Metal-Containing Film Deposition
App 20130030191 - Bailey, III; Wade Hampton ; et al. | 2013-01-31 |
Novel Metal Complexes for Metal-Containing Film Deposition
App 20130008345 - Lei; Xinjian ; et al. | 2013-01-10 |
Metal-Enolate Precursors For Depositing Metal-Containing Films
App 20130011579 - Norman; John Anthony Thomas ; et al. | 2013-01-10 |
High coordination sphere group 2 metal .beta.-diketiminate precursors
Grant 8,313,807 - Norman , et al. November 20, 2 | 2012-11-20 |
Low temperature deposition of silicon-containing films
Grant 8,298,628 - Yang , et al. October 30, 2 | 2012-10-30 |
Method of Making a Multicomponent Film
App 20120220076 - Xiao; Manchao ; et al. | 2012-08-30 |
Group 2 metal precursors for depositing multi-component metal oxide films
Grant 8,247,617 - Lei , et al. August 21, 2 | 2012-08-21 |
Multidentate Ketoimine Ligands For Metal Complexes
App 20120201958 - Lei; Xinjian ; et al. | 2012-08-09 |
Plasma Enhanced Cyclic Chemical Vapor Deposition of Silicon- Containing Films
App 20120171874 - Thridandam; Hareesh ; et al. | 2012-07-05 |
Binary and Ternary Metal Chalcogenide Materials and Method of Making and Using Same
App 20120171378 - Xiao; Manchao ; et al. | 2012-07-05 |
Methods of forming strontium titanate films
Grant 8,202,808 - Matz , et al. June 19, 2 | 2012-06-19 |
Method of making a multicomponent film
Grant 8,193,027 - Xiao , et al. June 5, 2 | 2012-06-05 |
Organoaminosilane Precursors and Methods for Depositing Films Comprising Same
App 20120128897 - Xiao; Manchao ; et al. | 2012-05-24 |
Complexes Of Imidazole Ligands
App 20120121806 - Norman; John Anthony Thomas ; et al. | 2012-05-17 |
Amidate Precursors For Depositing Metal Containing Films
App 20120045589 - Ivanov; Sergei Vladimirovich ; et al. | 2012-02-23 |
Method of Making a Multicomponent Film
App 20120034767 - Xiao; Manchao ; et al. | 2012-02-09 |
Preparation of metal oxide thin film via cyclic CVD or ALD
Grant 8,092,870 - Kim , et al. January 10, 2 | 2012-01-10 |
Process for Producing Silicon and Oxide Films from Organoaminosilane Precursors
App 20110262642 - Xiao; Manchao ; et al. | 2011-10-27 |
Methods For Deposition Of Group 4 Metal Containing Films
App 20110256314 - Ivanov; Sergei Vladimirovich ; et al. | 2011-10-20 |
Group 4 Metal Precursors For Metal-containing Films
App 20110250126 - Ivanov; Sergei Vladimirovich ; et al. | 2011-10-13 |
Liquid Composition Containing Aminoether For Deposition Of Metal-containing Films
App 20110212629 - Ivanov; Sergei Vladimirovich ; et al. | 2011-09-01 |
Liquid Precursor for Depositing Group 4 Metal Containing Films
App 20110135838 - Lei; Xinjian ; et al. | 2011-06-09 |
Metal complexes of polydentate beta-ketoiminates
Grant 7,947,814 - Lei , et al. May 24, 2 | 2011-05-24 |
Materials for adhesion enhancement of copper film on diffusion barriers
Grant 7,919,409 - Cheng , et al. April 5, 2 | 2011-04-05 |
Method for Preparing Metal Complexes of Polydentate Beta-Ketoiminates
App 20110040124 - Lei; Xinjian ; et al. | 2011-02-17 |
Methods of Forming Strontium Titanate Films
App 20110027617 - Matz; Laura M. ; et al. | 2011-02-03 |
Methods of Forming Strontium Titanate Films
App 20110027960 - Matz; Laura M. ; et al. | 2011-02-03 |
Process for producing silicon oxide films for organoaminosilane precursors
Grant 7,875,312 - Thridandam , et al. January 25, 2 | 2011-01-25 |
Low Temperature Deposition of Silicon-Containing Films
App 20100304047 - Yang; Liu ; et al. | 2010-12-02 |
Ti, Ta, Hf, Zr and related metal silicon amides for ALD/CVD of metal-silicon nitrides, oxides or oxynitrides
Grant 7,754,906 - Norman , et al. July 13, 2 | 2010-07-13 |
High Coordination Sphere Group 2 Metal B-Diketiminate Precursors
App 20100173075 - Norman; John Anthony Thomas ; et al. | 2010-07-08 |
Precursors for Depositing Group 4 Metal-Containing Films
App 20100143607 - Lei; Xinjian ; et al. | 2010-06-10 |
Metal complexes of tridentate BETA -ketoiminates
Grant 7,723,493 - Lei , et al. May 25, 2 | 2010-05-25 |
Group 2 Metal Precursors For Deposition Of Group 2 Metal Oxide Films
App 20100119726 - Lei; Xinjian ; et al. | 2010-05-13 |
Metal complexes of tridentate .beta.-ketoiminates
Grant 7,691,984 - Lei , et al. April 6, 2 | 2010-04-06 |
Preparation of Metal Oxide Thin Film Via Cyclic CVD or ALD
App 20100075067 - Kim; Moo-Sung ; et al. | 2010-03-25 |
Cyclic chemical vapor deposition of metal-silicon containing films
Grant 7,678,422 - Lei , et al. March 16, 2 | 2010-03-16 |
Materials for Adhesion Enhancement of Copper Film on Diffusion Barriers
App 20100038785 - Cheng; Hansong ; et al. | 2010-02-18 |
Metal Complexes of Tridentate Beta-Ketoiminates
App 20090136685 - Lei; Xinjian ; et al. | 2009-05-28 |
Metal Complexes of Tridentate Beta-Ketoiminates
App 20090136677 - Lei; Xinjian ; et al. | 2009-05-28 |
Group 2 Metal Precursors for Depositing Multi-Component Metal Oxide Films
App 20090130338 - Lei; Xinjian ; et al. | 2009-05-21 |
Preparation of A Metal-containing Film Via ALD or CVD Processes
App 20090130414 - Kim; Min-Kyung ; et al. | 2009-05-21 |
Plasma enhanced cyclic deposition method of metal silicon nitride film
App 20080318443 - Kim; Min-Kyung ; et al. | 2008-12-25 |
Group 2 Metal Precursors For Depositing Multi-Component Metal Oxide Films
App 20080286464 - Lei; Xinjian ; et al. | 2008-11-20 |
Stabilization of nitrogen-containing and oxygen-containing organosilanes using weakly basic ion-exchange resins
Grant 7,442,822 - Bowen , et al. October 28, 2 | 2008-10-28 |
Metal Precursor Solutions For Chemical Vapor Deposition
App 20080254218 - Lei; Xinjian ; et al. | 2008-10-16 |
Plasma Enhanced Cyclic Chemical Vapor Deposition of Silicon-Containing Films
App 20080207007 - Thridandam; Hareesh ; et al. | 2008-08-28 |
Splashguard and Inlet Diffuser for High Vacuum, High Flow Bubbler Vessel
App 20080143002 - Steidl; Thomas Andrew ; et al. | 2008-06-19 |
Cyclic Chemical Vapor Deposition of Metal-Silicon Containing Films
App 20080145535 - Lei; Xinjian ; et al. | 2008-06-19 |
Organosilane Compounds For Modifying Dielectrical Properties Of Silicon Oxide And Silicon Nitride Films
App 20080124946 - XIAO; MANCHAO ; et al. | 2008-05-29 |
Stabilization of nitrogen-containing and oxygen-containing organosilanes using weakly basic ion-exchange resins
App 20080058541 - Bowen; Heather Regina ; et al. | 2008-03-06 |
Process for producing silicon oxide films from organoaminosilane precursors
App 20070275166 - Thridandam; Hareesh ; et al. | 2007-11-29 |
Metal Complexes of Polydentate Beta-Ketoiminates
App 20070248754 - Lei; Xinjian ; et al. | 2007-10-25 |
Ti, Ta, Hf, Zr and related metal silicon amides for ALD/CVD of metal-silicon nitrides, oxides or oxynitrides
App 20070082500 - Norman; John Anthony Thomas ; et al. | 2007-04-12 |
Preparation of metal silicon nitride films via cyclic deposition
App 20060182885 - Lei; Xinjian ; et al. | 2006-08-17 |
Precursors for silica or metal silicate films
Grant 7,064,227 - Lei , et al. June 20, 2 | 2006-06-20 |
Organometallic complexes and their use as precursors to deposit metal films
Grant 7,064,224 - Lei , et al. June 20, 2 | 2006-06-20 |
Precursors For Silica Or Metal Silicate Films
App 20060127578 - Lei; Xinjian ; et al. | 2006-06-15 |
Preparation of metal imino/amino complexes for metal oxide and metal nitride thin films
Grant 6,552,209 - Lei , et al. April 22, 2 | 2003-04-22 |
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