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Atomic Layer Deposition Apparatus
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Self aligning non contact shadow ring process kit
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Multi-station deposition apparatus and method
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Multi-station Deposition Apparatus And Method
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Multi-station deposition apparatus and method
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Method and apparatus for measuring a thickness of a layer of a wafer
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Multi-station Deposition Apparatus And Method
App 20090214786 - Chang; Mei ; et al. | 2009-08-27 |
Multi-station deposition apparatus and method
Grant 7,547,465 - Chang , et al. June 16, 2 | 2009-06-16 |
Method And Apparatus For Measuring Object Thickness
App 20080186022 - Lei; Lawrence C. ; et al. | 2008-08-07 |
Apparatus and method of dynamically measuring thickness of a layer of a substrate
Grant 7,355,394 - Lei , et al. April 8, 2 | 2008-04-08 |
Self Aligning Non Contact Shadow Ring Process Kit
App 20080072823 - Yudovsky; Joseph ; et al. | 2008-03-27 |
Method and apparatus for measuring object thickness
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Method and apparatus for dynamically measuring the thickness of an object
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Multi-station deposition apparatus and method
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Multi-station deposition apparatus and method
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Clamshell and small volume chamber with fixed substrate support
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Clamshell and small volume chamber with fixed substrate support
Grant 6,866,746 - Lei , et al. March 15, 2 | 2005-03-15 |
Apparatus and method for vaporizing solid precursor for CVD or atomic layer deposition
App 20040170403 - Lei, Lawrence C. | 2004-09-02 |
Method and apparatus for measuring object thickness
App 20040140797 - Lei, Lawrence C. ; et al. | 2004-07-22 |
Dual robot processing system
Grant 6,729,824 - Lei , et al. May 4, 2 | 2004-05-04 |
Apparatus and method for vaporizing solid precursor for CVD or atomic layer deposition
Grant 6,718,126 - Lei April 6, 2 | 2004-04-06 |
Self aligning non contact shadow ring process kit
App 20040003780 - Yudovsky, Joseph ; et al. | 2004-01-08 |
Clamshell and small volume chamber with fixed substrate support
App 20030221780 - Lei, Lawrence C. ; et al. | 2003-12-04 |
Multi-station deposition apparatus and method
App 20030194493 - Chang, Mei ; et al. | 2003-10-16 |
Self aligning non contact shadow ring process kit
Grant 6,589,352 - Yudovsky , et al. July 8, 2 | 2003-07-08 |
Dual robot processing system
App 20030113187 - Lei, Lawrence C. ; et al. | 2003-06-19 |
Apparatus and method for vaporizing solid precursor for CVD or atomic layer deposition
App 20030053799 - Lei, Lawrence C. | 2003-03-20 |
Chemical vapor deposition chamber
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Apparatus for aligning a wafer
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Method and apparatus for preventing edge deposition
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300 mm CVD chamber design for metal-organic thin film deposition
Grant 6,364,949 - Or , et al. April 2, 2 | 2002-04-02 |
Apparatus And Method For Aligning A Wafer
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One-piece dual gas faceplate for a showerhead in a semiconductor wafer processing system
Grant 6,302,964 - Umotoy , et al. October 16, 2 | 2001-10-16 |
Dual gas faceplate for a showerhead in a semiconductor wafer processing system
Grant 6,086,677 - Umotoy , et al. July 11, 2 | 2000-07-11 |
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Controlling edge deposition on semiconductor substrates
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Silicon scavenger in an inductively coupled RF plasma reactor
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Chemical vapor deposition chamber with a purge guide
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