| Patent | Date |
|---|
Semiconductor Developer Tool And Methods Of Operation
App 20220299876 - LEE; Yung-Yao ; et al. | 2022-09-22 |
Wafer Stage And Method Of Using
App 20220291592 - LEE; Yung-Yao ; et al. | 2022-09-15 |
Immersion Exposure Tool
App 20220236646 - LEE; Yung-Yao | 2022-07-28 |
Immersion lithography system and method of using
Grant 11,378,889 - Lee , et al. July 5, 2 | 2022-07-05 |
Immersion Lithography System And Method Of Using
App 20220137518 - LEE; Yung-Yao ; et al. | 2022-05-05 |
Semiconductor Structure And Manufacturing Method Thereof
App 20220121121 - LEE; YUNG-YAO ; et al. | 2022-04-21 |
Semiconductor Manufacturing Method And Apparatus Thereof
App 20220115229 - LEE; YUNG-YAO ; et al. | 2022-04-14 |
Semiconductor manufacturing method and apparatus thereof
Grant 11,244,827 - Lee , et al. February 8, 2 | 2022-02-08 |
Semiconductor structure and manufacturing method thereof
Grant 11,226,562 - Lee , et al. January 18, 2 | 2022-01-18 |
Method for improving exposure performance and apparatus thereof
Grant 11,221,564 - Lu , et al. January 11, 2 | 2022-01-11 |
Semiconductor apparatus and method for baking coating layer
Grant 11,181,824 - Lee , et al. November 23, 2 | 2021-11-23 |
Apparatus for forming a photoresist layer, method for forming a masking layer, and method for forming a photoresist layer
Grant 11,163,235 - Lee , et al. November 2, 2 | 2021-11-02 |
Semiconductor Apparatus And Method For Baking Coating Layer
App 20210200096 - LEE; YUNG-YAO ; et al. | 2021-07-01 |
Apparatus for dispensing liquid material and method for fabricating semiconductor device
Grant 11,048,170 - Lee , et al. June 29, 2 | 2021-06-29 |
Drainage for temperature and humidity controlling system
Grant 11,035,619 - Cheng , et al. June 15, 2 | 2021-06-15 |
Exhaust system and method of using
Grant 11,022,018 - Cheng , et al. June 1, 2 | 2021-06-01 |
Substrate processing apparatus and substrate processing method
Grant 11,014,103 - Lee , et al. May 25, 2 | 2021-05-25 |
Optical Module Structure
App 20210088744 - LEE; YUNG-YAO ; et al. | 2021-03-25 |
Optical module structure
Grant 10,942,329 - Lee , et al. March 9, 2 | 2021-03-09 |
Method Of Manufacturing Semiconductor Structure
App 20210057206 - LEE; YUNG-YAO ; et al. | 2021-02-25 |
Apparatus For Forming A Photoresist Layer, Method For Forming A Masking Layer, And Method For Forming A Photoresist Layer
App 20210055658 - LEE; YUNG-YAO ; et al. | 2021-02-25 |
Lithographic Overlay Correction And Lithographic Process
App 20210041792 - HUNG; AI-JEN ; et al. | 2021-02-11 |
Method Of Operating Drippage Prevention System
App 20210016316 - WANG; Chien-Hung ; et al. | 2021-01-21 |
Apparatus and methods for chemical mechanical polishing
Grant 10,875,148 - Peng , et al. December 29, 2 | 2020-12-29 |
Method and apparatus for manufacturing semiconductor structure
Grant 10,867,872 - Lee , et al. December 15, 2 | 2020-12-15 |
Exposure Method And Exposure Apparatus
App 20200379361 - LEE; Yung-Yao ; et al. | 2020-12-03 |
Lithographic overlay correction and lithographic process
Grant 10,831,110 - Hung , et al. November 10, 2 | 2020-11-10 |
Apparatus For Dispensing Liquid Material And Method For Fabricating Semiconductor Device
App 20200326626 - LEE; YUNG-YAO ; et al. | 2020-10-15 |
Drippage prevention system and method of operating same
Grant 10,792,697 - Wang , et al. October 6, 2 | 2020-10-06 |
Exposure method and exposure apparatus
Grant 10,747,128 - Lee , et al. A | 2020-08-18 |
Apparatus for dispensing liquid material and method for fabricating semiconductor device
Grant 10,691,020 - Lee , et al. | 2020-06-23 |
Resist Pump Buffer Tank And Method Of Resist Defect Reduction
App 20200174372 - HSU; Chen Yi ; et al. | 2020-06-04 |
Apparatus For Physical Vapor Deposition And Method For Forming A Layer
App 20200161100 - CHEN; HSIN-LIANG ; et al. | 2020-05-21 |
Semiconductor Manufacturing Method And Apparatus Thereof
App 20200135450 - LEE; YUNG-YAO ; et al. | 2020-04-30 |
Method For Improving Exposure Performance And Apparatus Thereof
App 20200133142 - LU; CHAO PEI ; et al. | 2020-04-30 |
Apparatus For Dispensing Liquid Material And Method For Fabricating Semiconductor Device
App 20200133130 - LEE; YUNG-YAO ; et al. | 2020-04-30 |
Semiconductor Structure And Manufacturing Method Thereof
App 20200096859 - LEE; YUNG-YAO ; et al. | 2020-03-26 |
Exhaust System And Method Of Using
App 20200080463 - CHENG; Wei Chang ; et al. | 2020-03-12 |
Method And Apparatus For Manufacturing Semiconductor Structure
App 20200035570 - LEE; YUNG-YAO ; et al. | 2020-01-30 |
Apparatus And Methods For Chemical Mechanical Polishing
App 20190375071 - PENG; HE HUI ; et al. | 2019-12-12 |
Lithographic Overlay Correction And Lithographic Process
App 20190369504 - HUNG; AI-JEN ; et al. | 2019-12-05 |
Exhaust system and method of using
Grant 10,473,021 - Cheng , et al. Nov | 2019-11-12 |
Exposure Method And Exposure Apparatus
App 20190146351 - LEE; Yung-Yao ; et al. | 2019-05-16 |
Substrate Processing Apparatus And Substrate Processing Method
App 20190030550 - LEE; YUNG-YAO ; et al. | 2019-01-31 |
Method of manufacturing a semiconductor structure
Grant 10,157,741 - Lee , et al. Dec | 2018-12-18 |
Drippage Prevention System And Method Of Operating Same
App 20180333738 - WANG; Chien-Hung ; et al. | 2018-11-22 |
Method for layoutless overlay control
Grant 10,061,211 - Lee , et al. August 28, 2 | 2018-08-28 |
Patterning method and patterning apparatus for fabricating a resist pattern
Grant 10,061,215 - Lee , et al. August 28, 2 | 2018-08-28 |
Drainage for Temperature Humidity Controlling System
App 20180164839 - Cheng; Wei-Chang ; et al. | 2018-06-14 |
Exhaust System And Method Of Using
App 20180149067 - CHENG; Wei Chang ; et al. | 2018-05-31 |
Semiconductor method and associated apparatus
Grant 9,978,625 - Lee , et al. May 22, 2 | 2018-05-22 |
Overlay sampling methodology
Grant 9,927,719 - Lee , et al. March 27, 2 | 2018-03-27 |
Synchronized integrated metrology for overlay-shift reduction
Grant 9,841,687 - Lee , et al. December 12, 2 | 2017-12-12 |
Semiconductor Method And Associated Apparatus
App 20170352564 - LEE; YUNG-YAO ; et al. | 2017-12-07 |
Patterning Method And Patterning Apparatus For Fabricating A Resist Pattern
App 20170277044 - LEE; Yung-Yao ; et al. | 2017-09-28 |
Semiconductor manufacturing method and tool
Grant 9,772,561 - Lee , et al. September 26, 2 | 2017-09-26 |
Edge-dominant alignment method in exposure scanner system
Grant 9,766,559 - Lee , et al. September 19, 2 | 2017-09-19 |
Method For Layoutless Overlay Control
App 20170235233 - Lee; Yung-Yao ; et al. | 2017-08-17 |
Lithographic overlay sampling
Grant 9,646,896 - Hsieh , et al. May 9, 2 | 2017-05-09 |
Focus metrology method and photolithography method and system
Grant 9,587,929 - Kuo , et al. March 7, 2 | 2017-03-07 |
Overlay metrology method and overlay control method and system
Grant 9,563,946 - Lee , et al. February 7, 2 | 2017-02-07 |
Synchronized Integrated Metrology for Overlay-Shift Reduction
App 20170017166 - Lee; Yung-Yao ; et al. | 2017-01-19 |
Semiconductor Manufacturing Method and Tool
App 20160240443 - Lee; Yung-Yao ; et al. | 2016-08-18 |
Overlay Sampling Methodology
App 20160033878 - Lee; Yung-Yao ; et al. | 2016-02-04 |
Overlay Metrology Method And Overlay Control Method And System
App 20160025650 - LEE; Yung-Yao ; et al. | 2016-01-28 |
Focus Metrology Method And Photolithography Method And System
App 20160018743 - KUO; Hung-Ming ; et al. | 2016-01-21 |
Method of determining overlay error and control system for dynamic control of reticle position
Grant 9,188,876 - Lee , et al. November 17, 2 | 2015-11-17 |
Overlay sampling methodology
Grant 9,176,396 - Lee , et al. November 3, 2 | 2015-11-03 |
Overlay metrology method
Grant 9,164,398 - Lee , et al. October 20, 2 | 2015-10-20 |
Edge-dominant Alignment Method In Exposure Scanner System
App 20150116686 - LEE; Yung-Yao ; et al. | 2015-04-30 |
Lithographic Overlay Sampling
App 20150016943 - Hsieh; Yi-Ping ; et al. | 2015-01-15 |
Tool induced shift reduction determination for overlay metrology
Grant 8,860,941 - Lee , et al. October 14, 2 | 2014-10-14 |
Defect monitoring for resist layer
Grant 8,852,673 - Laing , et al. October 7, 2 | 2014-10-07 |
Overlay Sampling Methodology
App 20140240703 - Lee; Yung-Yao ; et al. | 2014-08-28 |
Overlay Sampling Methodology
App 20140240706 - LEE; Yung-Yao ; et al. | 2014-08-28 |
Lithography process
Grant 8,703,368 - Lee , et al. April 22, 2 | 2014-04-22 |
Lithography Process
App 20140017604 - Lee; Yung-Yao ; et al. | 2014-01-16 |
Tool Induced Shift Reduction Determination for Overlay Metrology
App 20130286395 - Lee; Yung-Yao ; et al. | 2013-10-31 |
Method Of Determining Overlay Error And Control System For Dynamic Control Of Reticle Position
App 20130201462 - LEE; Yung-Yao ; et al. | 2013-08-08 |
Iterative rinse for semiconductor fabrication
Grant 8,476,003 - Lee , et al. July 2, 2 | 2013-07-02 |
Defect Monitoring For Resist Layer
App 20130108775 - Laing; Che-Rong ; et al. | 2013-05-02 |
Iterative Rinse For Semiconductor Fabrication
App 20120231395 - Lee; Yung-Yao ; et al. | 2012-09-13 |
Method And System For Processing Test Wafer In Photolithography Process
App 20090239315 - Lee; Yung-Yao | 2009-09-24 |
Method And System For Auto-dispatching Lots In Photolithography Process
App 20090062954 - Lee; Yung-Yao ; et al. | 2009-03-05 |
Methods for forming shallow trench isolation structures in deep trenches and uses of the same
App 20080032471 - Kuo; Wen-Shuo ; et al. | 2008-02-07 |
Methods and systems for determining lithography overlay offsets
App 20060064194 - Lee; Yung-Yao | 2006-03-23 |
Photolithographic parameter feedback system and control method thereof
App 20050154484 - Lee, Yung-Yao ; et al. | 2005-07-14 |
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