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Film stress control for plasma enhanced chemical vapor deposition Grant 11,094,508 - Kao , et al. August 17, 2 | 2021-08-17 |
Remote plasma source cleaning nozzle for cleaning a gas distribution plate Grant 10,751,765 - Won , et al. A | 2020-08-25 |
Film Stress Control For Plasma Enhanced Chemical Vapor Deposition App 20200194233 - KAO; Chien-Teh ;   et al. | 2020-06-18 |
Remote Plasma Source Cleaning Nozzle For Plasma Enhanced Cvd Chambers App 20200047222 - WON; Tae Kyung ;   et al. | 2020-02-13 |
CVD thin film stress control method for display application Grant 10,312,475 - Won , et al. | 2019-06-04 |
Microwave plasma processing apparatus Grant 10,134,567 - Choi , et al. November 20, 2 | 2018-11-20 |
Cvd Thin Film Stress Control Method For Display Application App 20180331328 - WON; Tae Kyung ;   et al. | 2018-11-15 |
Methods of fabricating gate insulating layers in gate trenches and methods of fabricating semiconductor devices including the same Grant 9,312,124 - Park , et al. April 12, 2 | 2016-04-12 |
Microwave Plasma Processing Apparatus App 20150162167 - CHOI; Jin Hyuk ;   et al. | 2015-06-11 |
Microwave plasma processing apparatus Grant 8,980,047 - Choi , et al. March 17, 2 | 2015-03-17 |
Semiconductor devices having nitrided gate insulating layer and methods of fabricating the same Grant 8,835,275 - Park , et al. September 16, 2 | 2014-09-16 |
Semiconductor Devices Having Nitrided Gate Insulating Layer And Methods Of Fabricating The Same App 20130171801 - PARK; Tai-Su ;   et al. | 2013-07-04 |
Methods Of Fabricating Semiconductor Devices And Methods Of Fabricating Gate Insulating Layers App 20130164919 - PARK; Tai-Su ;   et al. | 2013-06-27 |
Microwave Plasma Processing Apparatus App 20120000610 - Choi; Jin Hyuk ;   et al. | 2012-01-05 |
Microwave resonance plasma generating apparatus and plasma processing system having the same Grant 8,039,772 - Lee , et al. October 18, 2 | 2011-10-18 |
Flat lamp using plasma discharge Grant 7,999,474 - Lee , et al. August 16, 2 | 2011-08-16 |
Light emitting device using plasma discharge App 20100026163 - Lee; Young-dong ;   et al. | 2010-02-04 |
Light emitting device using plasma discharge Grant 7,615,928 - Lee , et al. November 10, 2 | 2009-11-10 |
Plasma based ion implantation system App 20080289576 - Lee; Young dong ;   et al. | 2008-11-27 |
Inductively coupled plasma generating apparatus incorporating serpentine coil antenna Grant 7,381,292 - Lee , et al. June 3, 2 | 2008-06-03 |
Plasma based ion implantation apparatus App 20080023653 - Lee; Young dong ;   et al. | 2008-01-31 |
Light emitting device using plasma discharge App 20060170344 - Lee; Young-dong ;   et al. | 2006-08-03 |
Flat lamp App 20060076880 - Park; Hyoung-bin ;   et al. | 2006-04-13 |
Apparatus for generating inductively-coupled plasma and antenna coil structure thereof for generating inductive electric fields App 20050109462 - Lee, Young-Dong ;   et al. | 2005-05-26 |
Inductively coupled plasma generating apparatus incorporating serpentine coil antenna App 20040079485 - Lee, Young-Dong ;   et al. | 2004-04-29 |