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Patent applications and USPTO patent grants for Lee; Yong-Gwan.The latest application filed is for "plasma generation apparatus and plasma generation method".
Patent | Date |
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Plasma generation apparatus and plasma generation method Grant 9,960,011 - Lee , et al. May 1, 2 | 2018-05-01 |
RF power distribution device and RF power distribution method Grant 9,736,919 - Kim , et al. August 15, 2 | 2017-08-15 |
Impedance matching apparatus Grant 8,884,520 - Kim , et al. November 11, 2 | 2014-11-11 |
Plasma Generation Apparatus And Plasma Generation Method App 20140130980 - Lee; Yong-Gwan ;   et al. | 2014-05-15 |
Impedance matching methods and systems performing the same Grant 8,466,623 - Kim , et al. June 18, 2 | 2013-06-18 |
Rf Power Distribution Device And Rf Power Distribution Method App 20130134877 - KIM; Jaehyun ;   et al. | 2013-05-30 |
Impedance Matching Apparatus App 20120306367 - Kim; Jae Hyun ;   et al. | 2012-12-06 |
Impedance matching methods and systems performing the same Grant 8,120,259 - Kim , et al. February 21, 2 | 2012-02-21 |
Impedance Matching Methods And Systems Performing The Same App 20120013416 - KIM; JAE-HYUN ;   et al. | 2012-01-19 |
Impedance matching methods and systems performing the same Grant 8,053,991 - Kim , et al. November 8, 2 | 2011-11-08 |
Impedance Matching Methods And Systems Performing The Same App 20090066438 - Kim; Jae-Hyun ;   et al. | 2009-03-12 |
Impedance matching methods and systems performing the same App 20080258836 - Kim; Jae-Hyun ;   et al. | 2008-10-23 |
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