| Patent | Date |
|---|
Etching Composition And Method For Selectively Removing Silicon Nitride During Manufacture Of A Semiconductor Device
App 20220298182 - Ge; Jhih Kuei ; et al. | 2022-09-22 |
Liquid Compositions For Selectively Removing Polysilicon Over P-Doped Silicon And Silicon-Germanium During Manufacture Of A Semiconductor Device
App 20220298417 - Liu; Wen Dar ; et al. | 2022-09-22 |
Compositions For Removing Etch Residues, Methods Of Using And Use Thereof
App 20220251480 - Sun; Laisheng ; et al. | 2022-08-11 |
Cleaning Composition For Semiconductor Substrates
App 20220243150 - WANG; LILI ; et al. | 2022-08-04 |
Etching Composition And Method For Selectively Removing Silicon Nitride During Manufacture Of A Semiconductor Device
App 20220228062 - Ge; Jhih Kuei ; et al. | 2022-07-21 |
Etching Solution And Method For Selectively Removing Silicon Nitride During Manufacture Of A Semiconductor Device
App 20220157613 - Ge; Jhih Kuei ; et al. | 2022-05-19 |
Hafnium Oxide Corrosion Inhibitor
App 20220064803 - Liu; Wen Dar ; et al. | 2022-03-03 |
Etching solution for selectively removing silicon nitride during manufacture of a semiconductor device
Grant 11,186,771 - Lee , et al. November 30, 2 | 2021-11-30 |
Etching solution having silicon oxide corrosion inhibitor and method of using the same
Grant 11,180,697 - Liu , et al. November 23, 2 | 2021-11-23 |
Stripper solutions and methods of using stripper solutions
Grant 11,175,587 - Ge , et al. November 16, 2 | 2021-11-16 |
Post etch residue cleaning compositions and methods of using the same
Grant 11,091,727 - Sun , et al. August 17, 2 | 2021-08-17 |
Etching solution for tungsten and GST films
Grant 11,035,044 - Liu , et al. June 15, 2 | 2021-06-15 |
Composition for TiN hard mask removal and etch residue cleaning
Grant 11,017,995 - Chen , et al. May 25, 2 | 2021-05-25 |
Wafer level integrated MEMS device enabled by silicon pillar and smart cap
Grant 10,961,118 - Lee , et al. March 30, 2 | 2021-03-30 |
Compositions and methods for preventing collapse of high aspect ratio structures during drying
Grant 10,954,480 - Ge , et al. March 23, 2 | 2021-03-23 |
Etching solution for selectively removing silicon over silicon-germanium alloy from a silicon-germanium/ silicon stack during manufacture of a semiconductor device
Grant 10,934,485 - Liu , et al. March 2, 2 | 2021-03-02 |
Etching solution for selectively removing silicon-germanium alloy from a silicon-germanium/ germanium stack during manufacture of a semiconductor device
Grant 10,934,484 - Liu , et al. March 2, 2 | 2021-03-02 |
Wafer level integrated MEMS device enabled by silicon pillar and smart cap
Grant 10,899,608 - Lee , et al. January 26, 2 | 2021-01-26 |
Etching solution for selectively removing silicon-germanium alloy from a silicon-germanium/silicon stack during manufacture of a semiconductor device
Grant 10,879,076 - Liu , et al. December 29, 2 | 2020-12-29 |
Etching solution for selectively removing tantalum nitride over titanium nitride during manufacture of a semiconductor device
Grant 10,870,799 - Liu , et al. December 22, 2 | 2020-12-22 |
TiN hard mask and etch residue removal
Grant 10,711,227 - Liu , et al. | 2020-07-14 |
Etching Solution Having Silicon Oxide Corrosion Inhibitor And Method Of Using The Same
App 20200157422 - Liu; Wen Dar ; et al. | 2020-05-21 |
Wafer level integrated MEMS device enabled by silicon pillar and smart cap
Grant 10,556,792 - Lee , et al. Feb | 2020-02-11 |
Post Etch Residue Cleaning Compositions And Methods Of Using The Same
App 20200032177 - Sun; Laisheng ; et al. | 2020-01-30 |
Composition For TiN Hard Mask Removal And Etch Residue Cleaning
App 20200035485 - Chen; Chao-Hsiang ; et al. | 2020-01-30 |
Wafer Level Integrated Mems Device Enabled By Silicon Pillar And Smart Cap
App 20200024137 - Lee; Yi-Chia ; et al. | 2020-01-23 |
Wafer Level Integrated Mems Device Enabled By Silicon Pillar And Smart Cap
App 20200024136 - Lee; Yi-Chia ; et al. | 2020-01-23 |
Etching Solution for Tungsten Word Line Recess
App 20190284704 - Ge; Jhih Kuei ; et al. | 2019-09-19 |
Etching Solution for Selectively Removing Silicon-Germanium Alloy From a Silicon-Germanium/ Germanium Stack During Manufacture o
App 20190276739 - Liu; Wen Dar ; et al. | 2019-09-12 |
Etching compositions and methods for using same
Grant 10,400,167 - Liu , et al. Sep | 2019-09-03 |
Wafer Level Integrated Mems Device Enabled By Silicon Pillar And Smart Cap
App 20190161346 - Lee; Yi-Chia ; et al. | 2019-05-30 |
Stripping compositions having high WN/W etching selectivity
Grant 10,301,580 - Liu , et al. | 2019-05-28 |
Compositions and Methods for Preventing Collapse of High Aspect Ratio Structures During Drying
App 20190119610 - Ge; Jhih Kuei ; et al. | 2019-04-25 |
Etching Solution for Simultaneously Removing Silicon and Silicon-Germanium Alloy From a Silicon-Germanium/Silicon Stack During Manufacture of a Semiconductor Device
App 20190103282 - Ge; Jhih Kuei ; et al. | 2019-04-04 |
Stripper Solutions and Methods of Using Stripper Solutions
App 20190101830 - Ge; Jhih Kuei ; et al. | 2019-04-04 |
Etching Solution For Selectively Removing Tantalum Nitride Over Titanium Nitride During Manufacture of a Semiconductor Device
App 20190085241 - Liu; Wen Dar ; et al. | 2019-03-21 |
Etching Solution for Selectively Removing Silicon-Germanium Alloy From a Silicon-Germanium/Silicon Stack During Manufacture of a Semiconductor Device
App 20190088492 - Liu; Wen Dar ; et al. | 2019-03-21 |
Etching Solution for Selectively Removing Silicon Over Silicon-Germanium Alloy From a Silicon-Germanium/ Silicon Stack During Manufacture of a Semiconductor Device
App 20190085240 - Liu; Wen Dar ; et al. | 2019-03-21 |
Etching Solution For Selectively Removing Silicon Nitride During Manufacture Of A Semiconductor Device
App 20180346811 - Lee; Yi-Chia ; et al. | 2018-12-06 |
Photoresist cleaning composition used in photolithography and a method for treating substrate therewith
Grant 10,072,237 - Chang , et al. September 11, 2 | 2018-09-11 |
Semi-aqueous photoresist or semiconductor manufacturing residue stripping and cleaning composition with improved silicon passivation
Grant 10,073,351 - Agarwal , et al. September 11, 2 | 2018-09-11 |
TiN Hard Mask and Etch Residue Removal
App 20180251711 - Liu; Wen Dar ; et al. | 2018-09-06 |
Etching Solution For Tungsten And GST Films
App 20180209049 - Liu; Wen Dar ; et al. | 2018-07-26 |
TiN hard mask and etch residual removal
Grant 9,976,111 - Liu , et al. May 22, 2 | 2018-05-22 |
Copper corrosion inhibition system
Grant 9,957,469 - Liu , et al. May 1, 2 | 2018-05-01 |
Etching Compositions and Methods for Using Same
App 20170145311 - Liu; Wen Dar ; et al. | 2017-05-25 |
TiN Hard Mask And Etch Residual Removal
App 20170107460 - Liu; Wen Dar ; et al. | 2017-04-20 |
Photoresist Cleaning Composition Used in Photolithography and a Method for Treating Substrate Therewith
App 20170037344 - Chang; Randy Li-Kai ; et al. | 2017-02-09 |
Cleaning formulations
Grant 9,536,730 - Lee , et al. January 3, 2 | 2017-01-03 |
Composition for titanium nitride hard mask and etch residue removal
Grant 9,472,420 - Casteel, Jr. , et al. October 18, 2 | 2016-10-18 |
Stripping Compositions Having High WN/W Etching Selectivity
App 20160186105 - Liu; Wen Dar ; et al. | 2016-06-30 |
Semi-Aqueous Photoresist or Semiconductor Manufacturing Residue Stripping and Cleaning Composition with Improved Silicon Passivation
App 20160179011 - Agarwal; Rajiv Krishan ; et al. | 2016-06-23 |
Electronic Device And Alarm Method Of The Electronic Device
App 20160125715 - LEE; YI-CHIA | 2016-05-05 |
Copper Corrosion Inhibition System
App 20160010035 - Liu; Wen Dar ; et al. | 2016-01-14 |
Water-rich stripping and cleaning formulation and method for using same
Grant 9,201,308 - Rao , et al. December 1, 2 | 2015-12-01 |
Composition for Titanium Nitride Hard Mask and Etch Residue Removal
App 20150175943 - Casteel, JR.; William Jack ; et al. | 2015-06-25 |
Cleaning formulations and method of using the cleaning formulations
Grant 8,889,609 - Wu , et al. November 18, 2 | 2014-11-18 |
Cleaning Formulations
App 20140109931 - Lee; Yi Chia ; et al. | 2014-04-24 |
Water-rich Stripping And Cleaning Formulation And Method For Using Same
App 20130296215 - RAO; Madhukar Bhaskara ; et al. | 2013-11-07 |
Water-rich stripping and cleaning formulation and method for using same
Grant 8,518,865 - Rao , et al. August 27, 2 | 2013-08-27 |
Cleaning Formulations and Method of Using the Cleaning Formulations
App 20130061882 - Wu; Aiping ; et al. | 2013-03-14 |
Stripper for dry film removal
Grant 8,357,646 - Liu , et al. January 22, 2 | 2013-01-22 |
Water-rich Stripping And Cleaning Formulation And Method For Using Same
App 20110212866 - Rao; Madhukar Bhaskara ; et al. | 2011-09-01 |
Electronic Device And Method For Displaying Multimedia Files
App 20100235363 - HUANG; SHU-YUN ; et al. | 2010-09-16 |
Stripper For Copper/Low k BEOL Clean
App 20090229629 - Lee; Yi-Chia ; et al. | 2009-09-17 |
Stripper For Dry Film Removal
App 20090227483 - Liu; Wen Dar ; et al. | 2009-09-10 |
Method of cleaning a semiconductor substrate
Grant 7,306,681 - Cheng , et al. December 11, 2 | 2007-12-11 |
Method for fabricating a semiconductor device having improved hot carrier immunity ability
Grant 7,250,332 - Lai , et al. July 31, 2 | 2007-07-31 |
Method For Fabricating A Semiconductor Device Having Improved Hot Carrier Immunity Ability
App 20060040448 - Lai; Wen-Koi ; et al. | 2006-02-23 |
Method of cleaning a semiconductor substrate and cleaning recipes
App 20050252525 - Cheng, Ya-Lun ; et al. | 2005-11-17 |
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