Patent | Date |
---|
Electroplating systems Grant 9,593,431 - Ramarajan , et al. March 14, 2 | 2017-03-14 |
Methods Of Forming Single Crystal Silicon Structures App 20150206761 - Fucsko; Janos ;   et al. | 2015-07-23 |
Methods of forming single crystal silicon structures and semiconductor device structures including single crystal silicon structures Grant 9,040,424 - Fucsko , et al. May 26, 2 | 2015-05-26 |
Methods of planarization and electro-chemical mechanical polishing processes Grant 8,974,655 - Huang , et al. March 10, 2 | 2015-03-10 |
Methods and systems for removing materials from microfeature workpieces with organic and/or non-aqueous electrolytic media Grant 8,603,319 - Lee , et al. December 10, 2 | 2013-12-10 |
Electroplating Systems App 20130228458 - Ramarajan; Suresh ;   et al. | 2013-09-05 |
Methods of etching single crystal silicon Grant 8,450,214 - Lee , et al. May 28, 2 | 2013-05-28 |
Methods And Systems For Removing Materials From Microfeature Workpieces With Organic And/or Non-aqueous Electrolytic Media App 20130102154 - Lee; Whonchee ;   et al. | 2013-04-25 |
Electroplating systems Grant 8,419,906 - Ramarajan , et al. April 16, 2 | 2013-04-16 |
Methods Of Etching Single Crystal Silicon App 20120322263 - Lee; Whonchee ;   et al. | 2012-12-20 |
Semiconductor structures including square cuts in single crystal silicon and method of forming same Grant 8,294,246 - Lee , et al. October 23, 2 | 2012-10-23 |
Methods Of Forming Single Crystal Silicon Structures And Semiconductor Device Structures Including Single Crystal Silicon Structures App 20120168898 - Fucsko; Janos ;   et al. | 2012-07-05 |
Single crystal silicon structures Grant 8,159,050 - Fucsko , et al. April 17, 2 | 2012-04-17 |
Methods and apparatuses for electrochemical-mechanical polishing Grant 8,101,060 - Lee January 24, 2 | 2012-01-24 |
Method for selectively removing conductive material from a microelectronic substrate Grant 8,048,287 - Lee , et al. November 1, 2 | 2011-11-01 |
Method for removing metal layers formed outside an aperture of a BPSG layer utilizing multiple etching processes including electrochemical-mechanical polishing Grant 8,048,756 - Lee , et al. November 1, 2 | 2011-11-01 |
Semiconductor Structures Including Square Cuts In Single Crystal Silicon And Method Of Forming Same App 20110260298 - Lee; Whonchee ;   et al. | 2011-10-27 |
High selectivity BPSG to TEOS etchant Grant 7,977,251 - Lee , et al. July 12, 2 | 2011-07-12 |
Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate Grant 7,972,485 - Lee , et al. July 5, 2 | 2011-07-05 |
Semiconductor structures including square cuts in single crystal silicon Grant 7,973,388 - Lee , et al. July 5, 2 | 2011-07-05 |
Method And Apparatus For Removing Adjacent Conductive And Non-conductive Materials Of A Microelectronic Substrate App 20100176083 - Lee; Whonchee ;   et al. | 2010-07-15 |
Methods And Apparatuses For Electrochemical-mechanical Polishing App 20100116685 - Lee; Whonchee | 2010-05-13 |
Single Crystal Silicon Structures App 20100109120 - Fucsko; Janos ;   et al. | 2010-05-06 |
Noncontact localized electrochemical deposition of metal thin films Grant 7,708,875 - Ramarajan , et al. May 4, 2 | 2010-05-04 |
Methods of shaping vertical single crystal silicon walls and resulting structures Grant 7,709,341 - Fucsko , et al. May 4, 2 | 2010-05-04 |
Method for forming a microelectronic structure having a conductive material and a fill material with a hardness of 0.04 GPA or higher within an aperture Grant 7,700,436 - Lee , et al. April 20, 2 | 2010-04-20 |
Methods and apparatuses for electrochemical-mechanical polishing Grant 7,670,466 - Lee March 2, 2 | 2010-03-02 |
Methods And Apparatus For Selectively Removing Conductive Material From A Microelectronic Substrate App 20100032314 - Lee; Whonchee ;   et al. | 2010-02-11 |
Semiconductor Structures Including Square Cuts In Single Crystal Silicon App 20100013061 - Lee; Whonchee ;   et al. | 2010-01-21 |
Methods And Apparatus For Electromechanically And/or Electrochemically-mechanically Removing Conductive Material From A Microelectronic Substrate App 20100006428 - Lee; Whonchee ;   et al. | 2010-01-14 |
Wet etch suitable for creating square cuts in si Grant 7,628,932 - Lee , et al. December 8, 2 | 2009-12-08 |
Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate Grant 7,618,528 - Lee , et al. November 17, 2 | 2009-11-17 |
Methods and apparatus for selectively removing conductive material from a microelectronic substrate Grant 7,604,729 - Lee , et al. October 20, 2 | 2009-10-20 |
Methods And Systems For Removing Materials From Microfeature Workpieces With Organic And/or Non-aqueous Electrolytic Media App 20090255806 - Lee; Whonchee ;   et al. | 2009-10-15 |
Methods of Planarization and Electro-Chemical Mechanical Polishing Processes App 20090239379 - Huang; Wayne ;   et al. | 2009-09-24 |
Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate Grant 7,588,677 - Lee , et al. September 15, 2 | 2009-09-15 |
Methods and systems for removing materials from microfeature workpieces with organic and/or non-aqueous electrolytic media Grant 7,566,391 - Lee , et al. July 28, 2 | 2009-07-28 |
Methods and apparatus for electrically detecting characteristics of a microelectronic substrate and/or polishing medium Grant 7,560,017 - Lee , et al. July 14, 2 | 2009-07-14 |
Methods and apparatus for removing conductive material from a microelectronic substrate Grant 7,524,410 - Lee , et al. April 28, 2 | 2009-04-28 |
Electroplating Systems App 20090014322 - Ramarajan; Suresh ;   et al. | 2009-01-15 |
Noncontact localized electrochemical deposition of metal thin films Grant 7,435,324 - Ramarajan , et al. October 14, 2 | 2008-10-14 |
High Selectivity Bpsg To Teos Etchant App 20080233759 - Lee; Whonchee ;   et al. | 2008-09-25 |
High selectivity BPSG to TEOS etchant Grant 7,378,353 - Lee , et al. May 27, 2 | 2008-05-27 |
Wet etch suitable for creating square cuts in si and resulting structures App 20070278183 - Lee; Whonchee ;   et al. | 2007-12-06 |
Methods of shaping vertical single crystal silicon walls and resulting structures App 20070281493 - Fucsko; Janos ;   et al. | 2007-12-06 |
Method and composition for selectively etching against cobalt silicide Grant 7,256,138 - Lee , et al. August 14, 2 | 2007-08-14 |
Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate Grant 7,220,166 - Lee , et al. May 22, 2 | 2007-05-22 |
Methods And Apparatus For Electromechanically And/or Electrochemically-mechanically Removing Conductive Material From A Microelectronic Substrate App 20070111641 - Lee; Whonchee ;   et al. | 2007-05-17 |
Method and apparatus for chemically, mechanically, and/or electrolytically removing material from microelectronic substrates Grant 7,192,335 - Lee , et al. March 20, 2 | 2007-03-20 |
Methods and apparatus for filling features in microfeature workpieces App 20070045120 - Tiwari; Chandra Shekhar ;   et al. | 2007-03-01 |
Methods and apparatus for selectively removing conductive material from a microelectronic substrate App 20070037490 - Lee; Whonchee ;   et al. | 2007-02-15 |
Methods and apparatus for electrically and/or chemically-mechanically removing conductive material from a microelectronic substrate Grant 7,160,176 - Lee , et al. January 9, 2 | 2007-01-09 |
Noncontact localized electrochemical deposition of metal thin films App 20070000786 - Ramarajan; Suresh ;   et al. | 2007-01-04 |
Methods and apparatus for electrochemical-mechanical processing of microelectronic workpieces Grant 7,153,410 - Moore , et al. December 26, 2 | 2006-12-26 |
Methods and apparatuses for electrochemical-mechanical polishing Grant 7,153,777 - Lee December 26, 2 | 2006-12-26 |
Methods and apparatus for selectively removing conductive material from a microelectronic substrate Grant 7,153,195 - Lee , et al. December 26, 2 | 2006-12-26 |
Methods and apparatuses for planarizing microelectronic substrate assemblies Grant 7,138,072 - Sabde , et al. November 21, 2 | 2006-11-21 |
Methods and apparatus for electrically detecting characteristics of a microelectronic substrate and/or polishing medium Grant 7,134,934 - Lee , et al. November 14, 2 | 2006-11-14 |
Methods and apparatus for electrically detecting characteristics of a microelectronic substrate and/or polishing medium App 20060249397 - Lee; Whonchee ;   et al. | 2006-11-09 |
Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate App 20060234604 - Lee; Whonchee ;   et al. | 2006-10-19 |
Methods and apparatus for removing conductive material from a microelectronic substrate Grant 7,112,122 - Lee , et al. September 26, 2 | 2006-09-26 |
Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate Grant 7,112,121 - Lee , et al. September 26, 2 | 2006-09-26 |
Method and apparatus for removing adjacent conductive and non-conductive materials of a microelectronic substrate App 20060208322 - Lee; Whonchee ;   et al. | 2006-09-21 |
Method and apparatus for removing adjacent conductive and non-conductive materials of a microelectronic substrate App 20060199351 - Lee; Whonchee ;   et al. | 2006-09-07 |
Methods and apparatuses for electrochemical-mechanical polishing App 20060189139 - Lee; Whonchee | 2006-08-24 |
Microelectronic substrate having conductive material with blunt cornered apertures, and associated methods for removing conductive material Grant 7,094,131 - Lee , et al. August 22, 2 | 2006-08-22 |
Methods and apparatuses for planarizing microelectronic substrate assemblies Grant 7,083,700 - Sabde , et al. August 1, 2 | 2006-08-01 |
Method and apparatus for removing adjacent conductive and nonconductive materials of a microelectronic substrate Grant 7,078,308 - Lee , et al. July 18, 2 | 2006-07-18 |
High selectivity BPSG to TEOS etchant App 20060102586 - Lee; Whonchee ;   et al. | 2006-05-18 |
Noncontact localized electrochemical deposition of metal thin films App 20060042953 - Ramarajan; Suresh ;   et al. | 2006-03-02 |
Methods and systems for removing materials from microfeature workpieces with organic and/or non-aqueous electrolytic media App 20060042956 - Lee; Whonchee ;   et al. | 2006-03-02 |
Methods and apparatuses for electrochemical-mechanical polishing App 20050196963 - Lee, Whonchee | 2005-09-08 |
Methods and apparatuses for planarizing microelectronic substrate assemblies Grant 6,903,018 - Sabde , et al. June 7, 2 | 2005-06-07 |
Method and apparatuses for planarizing microelectronic substrate assemblies Grant 6,881,127 - Sabde , et al. April 19, 2 | 2005-04-19 |
Methods and apparatus for removing conductive material from a microelectronic substrate App 20050056550 - Lee, Whonchee ;   et al. | 2005-03-17 |
Methods And Apparatus For Removing Conductive Material From A Microelectronic Substrate App 20050059324 - Lee, Whonchee ;   et al. | 2005-03-17 |
Electro-mechanically polished structure Grant 6,867,448 - Lee , et al. March 15, 2 | 2005-03-15 |
Methods and apparatus for electrically and/or chemically-mechanically removing conductive material from a microelectronic substrate App 20050034999 - Lee, Whonchee ;   et al. | 2005-02-17 |
Methods and apparatus for electrically and/or chemically-mechanically removing conductive material from a microelectronic substrate App 20050035000 - Lee, Whonchee ;   et al. | 2005-02-17 |
Method and apparatus for chemically, mechanically, and/or electrolytically removing material from microelectronic substrates App 20050020192 - Lee, Whonchee ;   et al. | 2005-01-27 |
Method and composition for selectively etching against cobalt silicide App 20050000942 - Lee, Whonchee ;   et al. | 2005-01-06 |
Resistance-reducing conductive adhesives for attachment of electronic components Grant 6,825,570 - Jiang , et al. November 30, 2 | 2004-11-30 |
Composition for selectively etching against cobalt silicide Grant 6,783,694 - Lee , et al. August 31, 2 | 2004-08-31 |
Capacitor structures with recessed hemispherical grain silicon App 20040155274 - DeBoer, Scott J. ;   et al. | 2004-08-12 |
Method and composition for selectively etching against cobalt silicide Grant 6,759,343 - Lee , et al. July 6, 2 | 2004-07-06 |
Systems for electrolytic removal of metals from substrates App 20040040863 - Lee, Whonchee ;   et al. | 2004-03-04 |
Method and apparatus for chemically, mechanically, and/or electrolytically removing material from microelectronic substrates App 20040043705 - Lee, Whonchee ;   et al. | 2004-03-04 |
Method and apparatus for removing adjacent conductive and nonconductive materials of a microelectronic substrate App 20040043629 - Lee, Whonchee ;   et al. | 2004-03-04 |
Capacitor structures with recessed hemispherical grain silicon Grant 6,693,320 - DeBoer , et al. February 17, 2 | 2004-02-17 |
Methods and apparatus for electrochemical-mechanical processing of microelectronic workpieces App 20030226764 - Moore, Scott E. ;   et al. | 2003-12-11 |
Compositions for etching silicon with high selectivity to oxides and methods of using same Grant 6,660,180 - Lee , et al. December 9, 2 | 2003-12-09 |
Capacitor structures with recessed hemispherical grain silicon Grant 6,632,719 - DeBoer , et al. October 14, 2 | 2003-10-14 |
Electro-mechanical polishing of platinum container structure Grant 6,605,539 - Lee , et al. August 12, 2 | 2003-08-12 |
Methods and apparatus for selectively removing conductive material from a microelectronic substrate App 20030129927 - Lee, Whonchee ;   et al. | 2003-07-10 |
Methods and apparatus for electrically detecting characteristics of a microelectronic substrate and/or polishing medium App 20030109198 - Lee, Whonchee ;   et al. | 2003-06-12 |
Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate App 20030054729 - Lee, Whonchee ;   et al. | 2003-03-20 |
Composition and method of formation and use therefor in chemical-mechanical polishing App 20020185628 - Robinson, Karl M. ;   et al. | 2002-12-12 |
Methods and apparatuses for planarizing microelectronic substrate assemblies App 20020177390 - Sabde, Gundu M. ;   et al. | 2002-11-28 |
Method and apparatus for chemical-mechanical planarization of microelectronic substrates with selected planarizing liquids App 20020098696 - Sabde, Gundu M. ;   et al. | 2002-07-25 |
Method and composition for selectively etching against cobalt silicide App 20020060307 - Lee, Whonchee ;   et al. | 2002-05-23 |
Method and composition for selectively etching against cobalt silicide App 20020055262 - Lee, Whonchee ;   et al. | 2002-05-09 |
Electro-mechanical polishing of platinum container structure App 20020052126 - Lee, Whonchee ;   et al. | 2002-05-02 |
Compositions for etching silicon with high selectivity to oxides and methods of using same App 20020052121 - Lee, Whonchee ;   et al. | 2002-05-02 |
Resistance-reducing conductive adhesives for attachment of electronic components App 20020030286 - Jiang, Tongbi ;   et al. | 2002-03-14 |
Resistance-reducing conductive adhesives for attachment of electronic components App 20020030287 - Jiang, Tongbi ;   et al. | 2002-03-14 |
Methods and apparatus for electrically and/or chemically-mechanically removing conductive material from a microelectronic substrate App 20020025760 - Lee, Whonchee ;   et al. | 2002-02-28 |
Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate App 20020025763 - Lee, Whonchee ;   et al. | 2002-02-28 |
Microelectronic substrate having conductive material with blunt cornered apertures, and associated methods for removing conductive material App 20020025759 - Lee, Whonchee ;   et al. | 2002-02-28 |
Resistance-reducing conductive adhesives for attachment of electronic components Grant 6,346,750 - Jiang , et al. February 12, 2 | 2002-02-12 |
Compositions For Etching Silicon With High Selectivity To Oxides And Methods Of Using Same App 20020001968 - LEE, WHONCHEE ;   et al. | 2002-01-03 |
Methods and apparatuses for planarizing microelectronic substrate assemblies App 20010055936 - Sabde, Gundu M. ;   et al. | 2001-12-27 |
Methods and apparatuses for planarizing microelectronic substrate assemblies App 20010051496 - Sabde, Gundu M. ;   et al. | 2001-12-13 |
Method and apparatuses for planarizing microelectronic substrate assemblies App 20010041508 - Sabde, Gundu M. ;   et al. | 2001-11-15 |
High selectivity BPSG to TEOS etchant Grant 6,232,232 - Lee , et al. May 15, 2 | 2001-05-15 |
Method for selective etching of antireflective coatings Grant 6,103,637 - Torek , et al. August 15, 2 | 2000-08-15 |
Method and composition for selectively etching against cobalt silicide Grant 6,074,960 - Lee , et al. June 13, 2 | 2000-06-13 |
Method for in situ removal of particulate residues resulting from cleaning treatments Grant 6,029,680 - Hawthorne , et al. February 29, 2 | 2000-02-29 |
Selective etching of oxides Grant 5,990,019 - Torek , et al. November 23, 1 | 1999-11-23 |
Method for selective etching of anitreflective coatings Grant 5,981,401 - Torek , et al. November 9, 1 | 1999-11-09 |
Process for selectively etching silicon nitride in the presence of silicon oxide Grant 5,885,903 - Torek , et al. March 23, 1 | 1999-03-23 |
Method for in situ removal of particulate residues resulting from hydrofluoric acid cleaning treatments Grant 5,770,263 - Hawthorne , et al. June 23, 1 | 1998-06-23 |
Methods and etchants for etching oxides of silicon with low selectivity Grant 5,716,535 - Lee , et al. February 10, 1 | 1998-02-10 |