Lee; Tsung Chuan

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lee; Tsung Chuan.The latest application filed is for "extreme ultraviolet mask and method of manufacturing the same".

Company Profile

5.7.9

Lee; Tsung Chuan - Taipei TW
LEE; Tsung Chuan - Taipei City TW

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Reticle enclosure for lithography systems Grant 11,415,879 - Shih , et al. August 16, 2	2022-08-16
Extreme ultraviolet lithography method, extreme ultraviolet mask and formation method thereof Grant 11,392,022 - Shih , et al. July 19, 2	2022-07-19
Extreme Ultraviolet Mask And Method Of Manufacturing The Same App 20220197127 - SHIH; Chih-Tsung ; et al.	2022-06-23
Extreme ultraviolet mask and method of manufacturing the same Grant 11,275,301 - Shih , et al. March 15, 2	2022-03-15
Extreme Ultraviolet Lithography Method, Extreme Ultraviolet Mask And Formation Method Thereof App 20210389661 - SHIH; Chih-Tsung ; et al.	2021-12-16
Particle prevention method in lithography exposure apparatus Grant 11,119,420 - Lee , et al. September 14, 2	2021-09-14
Particle Prevention Method In Lithography Exposure Apparatus App 20210191283 - LEE; Yi-Wei ; et al.	2021-06-24
Method for detecting EUV pellicle rupture Grant 10,976,674 - Shih , et al. April 13, 2	2021-04-13
Method to reduce native defect printability Grant 10,824,080 - Shih , et al. November 3, 2	2020-11-03
Semiconductor Apparatus And Method Of Operating The Same App 20200341388 - CHEN; Jui-Chieh ; et al.	2020-10-29
Method Of Reducing Undesired Light Influence In Extreme Ultraviolet Exposure App 20200133127 - SHIH; Chih-Tsung ; et al.	2020-04-30
Method To Reduce Native Defect Printability App 20200133141 - SHIH; Chih-Tsung ; et al.	2020-04-30
Extreme Ultraviolet Mask And Method Of Manufacturing The Same App 20200073225 - SHIH; Chih-Tsung ; et al.	2020-03-05
Method For Detecting Euv Pellicle Rupture App 20200057383 - SHIH; Chih-Tsung ; et al.	2020-02-20
Mechanisms for performing a photolithography process with a surface modifying treatment on an exposed photoresist layer Grant 9,625,822 - Tsai , et al. April 18, 2	2017-04-18
Mechanisms For Performing A Photolithography Process App 20150116679 - TSAI; Chi-Cheng ; et al.	2015-04-30

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