Lee; Sook Hyun
Patent Applications and Registrations
Patent applications and USPTO patent grants for Lee; Sook Hyun.The latest application filed is for "electron beam lithography method and apparatus".
- Lee; Sook Hyun - Hwaseong-si KR
| Patent | Date |
|---|---|
| Electron beam lithography method and apparatus Grant 10,007,185 - Lee , et al. June 26, 2 | 2018-06-26 |
| Exposure method using electron beam and substrate manufacturing method using the same Grant 9,709,893 - Lee , et al. July 18, 2 | 2017-07-18 |
| Electron Beam Lithography Method And Apparatus App 20170192358 - LEE; Sook Hyun ; et al. | 2017-07-06 |
| Exposure Method Using Electron Beam And Substrate Manufacturing Method Using The Same App 20160223903 - LEE; SOOK HYUN ; et al. | 2016-08-04 |
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